12/12/2012	9:19:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/12/2012	9:19:10 AM	Recipe started at 9:19 AM
12/12/2012	9:19:10 AM	Helium valve closed
12/12/2012	9:19:10 AM	H2 valve closed
12/12/2012	9:19:10 AM	BCl3 valve closed
12/12/2012	9:19:10 AM	PH3 valve closed
12/12/2012	9:19:10 AM	SiCl4 pre valve closed
12/12/2012	9:19:10 AM	SiCl4 post valve closed
12/12/2012	9:19:10 AM	Main Vac valve closed
12/12/2012	9:19:10 AM	Bypass valve closed
12/12/2012	9:19:10 AM	Bubbler valve closed
12/12/2012	9:19:10 AM	Helium MFC set to  0.000000
12/12/2012	9:19:10 AM	H2 MFC set to  0.000000
12/12/2012	9:19:10 AM	BCl3 MFC set to  0.000000
12/12/2012	9:19:10 AM	PH3 MFC set to  0.000000
12/12/2012	9:19:10 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:19:10 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:19:10 AM	Tube furnace set to 0
12/12/2012	9:19:13 AM	H2 valve closed
12/12/2012	9:19:13 AM	BCl3 valve closed
12/12/2012	9:19:13 AM	PH3 valve closed
12/12/2012	9:19:13 AM	SiCl4 pre valve closed
12/12/2012	9:19:13 AM	SiCl4 post valve closed
12/12/2012	9:19:13 AM	Main Vac valve closed
12/12/2012	9:19:13 AM	Bypass valve closed
12/12/2012	9:19:13 AM	Bubbler valve closed
12/12/2012	9:19:13 AM	Helium valve opened
12/12/2012	9:19:13 AM	Helium MFC set to  500.000000
12/12/2012	9:19:13 AM	H2 MFC set to  0.000000
12/12/2012	9:19:13 AM	BCl3 MFC set to  0.000000
12/12/2012	9:19:13 AM	PH3 MFC set to  0.000000
12/12/2012	9:19:13 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:19:13 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:19:14 AM	Tube furnace set to 0
12/12/2012	9:20:26 AM	Helium valve closed
12/12/2012	9:20:26 AM	H2 valve closed
12/12/2012	9:20:26 AM	BCl3 valve closed
12/12/2012	9:20:26 AM	PH3 valve closed
12/12/2012	9:20:26 AM	SiCl4 pre valve closed
12/12/2012	9:20:26 AM	SiCl4 post valve closed
12/12/2012	9:20:26 AM	Main Vac valve closed
12/12/2012	9:20:26 AM	Bypass valve closed
12/12/2012	9:20:26 AM	Bubbler valve closed
12/12/2012	9:20:26 AM	Helium MFC set to  0.000000
12/12/2012	9:20:26 AM	H2 MFC set to  0.000000
12/12/2012	9:20:26 AM	BCl3 MFC set to  0.000000
12/12/2012	9:20:26 AM	PH3 MFC set to  0.000000
12/12/2012	9:20:26 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:20:26 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:20:27 AM	Tube furnace set to 0
12/12/2012	9:20:28 AM	Run finished at 9:20 AM
12/12/2012	9:20:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/12/2012	9:25:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/12/2012	9:25:43 AM	Recipe started at 9:25 AM
12/12/2012	9:25:43 AM	Helium valve closed
12/12/2012	9:25:43 AM	H2 valve closed
12/12/2012	9:25:43 AM	BCl3 valve closed
12/12/2012	9:25:43 AM	PH3 valve closed
12/12/2012	9:25:43 AM	SiCl4 pre valve closed
12/12/2012	9:25:43 AM	SiCl4 post valve closed
12/12/2012	9:25:43 AM	Main Vac valve closed
12/12/2012	9:25:43 AM	Bubbler valve closed
12/12/2012	9:25:43 AM	Bypass valve opened
12/12/2012	9:25:43 AM	Helium MFC set to  0.000000
12/12/2012	9:25:43 AM	H2 MFC set to  0.000000
12/12/2012	9:25:43 AM	BCl3 MFC set to  0.000000
12/12/2012	9:25:43 AM	PH3 MFC set to  0.000000
12/12/2012	9:25:43 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:25:43 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:25:43 AM	Tube furnace set to 0
12/12/2012	9:27:05 AM	Helium valve closed
12/12/2012	9:27:05 AM	H2 valve closed
12/12/2012	9:27:05 AM	BCl3 valve closed
12/12/2012	9:27:05 AM	PH3 valve closed
12/12/2012	9:27:05 AM	SiCl4 pre valve closed
12/12/2012	9:27:05 AM	SiCl4 post valve closed
12/12/2012	9:27:05 AM	Main Vac valve closed
12/12/2012	9:27:05 AM	Bubbler valve closed
12/12/2012	9:27:05 AM	Bypass valve opened
12/12/2012	9:27:05 AM	Helium MFC set to  0.000000
12/12/2012	9:27:05 AM	H2 MFC set to  0.000000
12/12/2012	9:27:05 AM	BCl3 MFC set to  0.000000
12/12/2012	9:27:05 AM	PH3 MFC set to  0.000000
12/12/2012	9:27:05 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:27:05 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:27:05 AM	Tube furnace set to 0
12/12/2012	9:28:05 AM	Helium valve closed
12/12/2012	9:28:05 AM	H2 valve closed
12/12/2012	9:28:05 AM	BCl3 valve closed
12/12/2012	9:28:05 AM	PH3 valve closed
12/12/2012	9:28:05 AM	SiCl4 pre valve closed
12/12/2012	9:28:05 AM	SiCl4 post valve closed
12/12/2012	9:28:05 AM	Bypass valve closed
12/12/2012	9:28:05 AM	Bubbler valve closed
12/12/2012	9:28:05 AM	Main Vac valve opened
12/12/2012	9:28:05 AM	Helium MFC set to  0.000000
12/12/2012	9:28:05 AM	H2 MFC set to  0.000000
12/12/2012	9:28:05 AM	BCl3 MFC set to  0.000000
12/12/2012	9:28:05 AM	PH3 MFC set to  0.000000
12/12/2012	9:28:05 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:28:05 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:28:05 AM	Tube furnace set to 0
12/12/2012	9:28:06 AM	Run finished at 9:28 AM
12/12/2012	9:28:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/12/2012	9:33:27 AM	Tube furnace set to 150
12/12/2012	9:35:12 AM	Recipe started at 9:35 AM
12/12/2012	9:35:12 AM	Helium valve closed
12/12/2012	9:35:12 AM	H2 valve closed
12/12/2012	9:35:12 AM	BCl3 valve closed
12/12/2012	9:35:12 AM	PH3 valve closed
12/12/2012	9:35:12 AM	SiCl4 pre valve closed
12/12/2012	9:35:12 AM	SiCl4 post valve closed
12/12/2012	9:35:12 AM	Bypass valve closed
12/12/2012	9:35:12 AM	Bubbler valve closed
12/12/2012	9:35:12 AM	Main Vac valve opened
12/12/2012	9:35:12 AM	Helium MFC set to  0.000000
12/12/2012	9:35:12 AM	H2 MFC set to  0.000000
12/12/2012	9:35:12 AM	BCl3 MFC set to  0.000000
12/12/2012	9:35:12 AM	PH3 MFC set to  0.000000
12/12/2012	9:35:12 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:35:12 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:35:12 AM	Tube furnace set to 0
12/12/2012	9:35:42 AM	H2 valve closed
12/12/2012	9:35:42 AM	BCl3 valve closed
12/12/2012	9:35:42 AM	PH3 valve closed
12/12/2012	9:35:42 AM	SiCl4 pre valve closed
12/12/2012	9:35:42 AM	SiCl4 post valve closed
12/12/2012	9:35:42 AM	Bypass valve closed
12/12/2012	9:35:42 AM	Bubbler valve closed
12/12/2012	9:35:42 AM	Helium valve opened
12/12/2012	9:35:42 AM	Main Vac valve opened
12/12/2012	9:35:42 AM	Helium MFC set to  20.000000
12/12/2012	9:35:42 AM	H2 MFC set to  0.000000
12/12/2012	9:35:42 AM	BCl3 MFC set to  0.000000
12/12/2012	9:35:42 AM	PH3 MFC set to  0.000000
12/12/2012	9:35:42 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:35:42 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:35:42 AM	Tube furnace set to 0
12/12/2012	9:36:13 AM	Helium valve closed
12/12/2012	9:36:13 AM	H2 valve closed
12/12/2012	9:36:13 AM	BCl3 valve closed
12/12/2012	9:36:13 AM	PH3 valve closed
12/12/2012	9:36:13 AM	SiCl4 pre valve closed
12/12/2012	9:36:13 AM	SiCl4 post valve closed
12/12/2012	9:36:13 AM	Bypass valve closed
12/12/2012	9:36:13 AM	Bubbler valve closed
12/12/2012	9:36:13 AM	Main Vac valve opened
12/12/2012	9:36:13 AM	Helium MFC set to  0.000000
12/12/2012	9:36:13 AM	H2 MFC set to  0.000000
12/12/2012	9:36:13 AM	BCl3 MFC set to  0.000000
12/12/2012	9:36:13 AM	PH3 MFC set to  0.000000
12/12/2012	9:36:13 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:36:13 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:36:13 AM	Tube furnace set to 0
12/12/2012	9:36:43 AM	H2 valve closed
12/12/2012	9:36:43 AM	BCl3 valve closed
12/12/2012	9:36:43 AM	PH3 valve closed
12/12/2012	9:36:43 AM	SiCl4 pre valve closed
12/12/2012	9:36:43 AM	SiCl4 post valve closed
12/12/2012	9:36:43 AM	Bypass valve closed
12/12/2012	9:36:43 AM	Bubbler valve closed
12/12/2012	9:36:43 AM	Helium valve opened
12/12/2012	9:36:43 AM	Main Vac valve opened
12/12/2012	9:36:43 AM	Helium MFC set to  20.000000
12/12/2012	9:36:43 AM	H2 MFC set to  0.000000
12/12/2012	9:36:43 AM	BCl3 MFC set to  0.000000
12/12/2012	9:36:43 AM	PH3 MFC set to  0.000000
12/12/2012	9:36:43 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:36:43 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:36:43 AM	Tube furnace set to 0
12/12/2012	9:37:13 AM	Helium valve closed
12/12/2012	9:37:13 AM	H2 valve closed
12/12/2012	9:37:13 AM	BCl3 valve closed
12/12/2012	9:37:13 AM	PH3 valve closed
12/12/2012	9:37:13 AM	SiCl4 pre valve closed
12/12/2012	9:37:13 AM	SiCl4 post valve closed
12/12/2012	9:37:13 AM	Bypass valve closed
12/12/2012	9:37:13 AM	Bubbler valve closed
12/12/2012	9:37:13 AM	Main Vac valve opened
12/12/2012	9:37:13 AM	Helium MFC set to  0.000000
12/12/2012	9:37:13 AM	H2 MFC set to  0.000000
12/12/2012	9:37:13 AM	BCl3 MFC set to  0.000000
12/12/2012	9:37:13 AM	PH3 MFC set to  0.000000
12/12/2012	9:37:13 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:37:13 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:37:13 AM	Tube furnace set to 0
12/12/2012	9:37:43 AM	H2 valve closed
12/12/2012	9:37:43 AM	BCl3 valve closed
12/12/2012	9:37:43 AM	PH3 valve closed
12/12/2012	9:37:43 AM	SiCl4 pre valve closed
12/12/2012	9:37:43 AM	SiCl4 post valve closed
12/12/2012	9:37:43 AM	Bypass valve closed
12/12/2012	9:37:43 AM	Bubbler valve closed
12/12/2012	9:37:43 AM	Helium valve opened
12/12/2012	9:37:43 AM	Main Vac valve opened
12/12/2012	9:37:43 AM	Helium MFC set to  20.000000
12/12/2012	9:37:43 AM	H2 MFC set to  0.000000
12/12/2012	9:37:43 AM	BCl3 MFC set to  0.000000
12/12/2012	9:37:43 AM	PH3 MFC set to  0.000000
12/12/2012	9:37:43 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:37:43 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:37:43 AM	Tube furnace set to 0
12/12/2012	9:38:13 AM	Helium valve closed
12/12/2012	9:38:13 AM	H2 valve closed
12/12/2012	9:38:13 AM	BCl3 valve closed
12/12/2012	9:38:13 AM	PH3 valve closed
12/12/2012	9:38:13 AM	SiCl4 pre valve closed
12/12/2012	9:38:13 AM	SiCl4 post valve closed
12/12/2012	9:38:13 AM	Bypass valve closed
12/12/2012	9:38:13 AM	Bubbler valve closed
12/12/2012	9:38:14 AM	Main Vac valve opened
12/12/2012	9:38:14 AM	Helium MFC set to  0.000000
12/12/2012	9:38:14 AM	H2 MFC set to  0.000000
12/12/2012	9:38:14 AM	BCl3 MFC set to  0.000000
12/12/2012	9:38:14 AM	PH3 MFC set to  0.000000
12/12/2012	9:38:14 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:38:14 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:38:14 AM	Tube furnace set to 0
12/12/2012	9:38:44 AM	H2 valve closed
12/12/2012	9:38:44 AM	BCl3 valve closed
12/12/2012	9:38:44 AM	PH3 valve closed
12/12/2012	9:38:44 AM	SiCl4 pre valve closed
12/12/2012	9:38:44 AM	SiCl4 post valve closed
12/12/2012	9:38:44 AM	Bypass valve closed
12/12/2012	9:38:44 AM	Bubbler valve closed
12/12/2012	9:38:44 AM	Helium valve opened
12/12/2012	9:38:44 AM	Main Vac valve opened
12/12/2012	9:38:44 AM	Helium MFC set to  20.000000
12/12/2012	9:38:44 AM	H2 MFC set to  0.000000
12/12/2012	9:38:44 AM	BCl3 MFC set to  0.000000
12/12/2012	9:38:44 AM	PH3 MFC set to  0.000000
12/12/2012	9:38:44 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:38:44 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:38:44 AM	Tube furnace set to 0
12/12/2012	9:39:14 AM	Helium valve closed
12/12/2012	9:39:14 AM	H2 valve closed
12/12/2012	9:39:14 AM	BCl3 valve closed
12/12/2012	9:39:14 AM	PH3 valve closed
12/12/2012	9:39:14 AM	SiCl4 pre valve closed
12/12/2012	9:39:14 AM	SiCl4 post valve closed
12/12/2012	9:39:14 AM	Bypass valve closed
12/12/2012	9:39:14 AM	Bubbler valve closed
12/12/2012	9:39:14 AM	Main Vac valve opened
12/12/2012	9:39:14 AM	Helium MFC set to  0.000000
12/12/2012	9:39:14 AM	H2 MFC set to  0.000000
12/12/2012	9:39:14 AM	BCl3 MFC set to  0.000000
12/12/2012	9:39:14 AM	PH3 MFC set to  0.000000
12/12/2012	9:39:14 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:39:14 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:39:14 AM	Tube furnace set to 0
12/12/2012	9:39:44 AM	H2 valve closed
12/12/2012	9:39:44 AM	BCl3 valve closed
12/12/2012	9:39:44 AM	PH3 valve closed
12/12/2012	9:39:44 AM	SiCl4 pre valve closed
12/12/2012	9:39:44 AM	SiCl4 post valve closed
12/12/2012	9:39:44 AM	Bypass valve closed
12/12/2012	9:39:44 AM	Bubbler valve closed
12/12/2012	9:39:44 AM	Helium valve opened
12/12/2012	9:39:44 AM	Main Vac valve opened
12/12/2012	9:39:44 AM	Helium MFC set to  20.000000
12/12/2012	9:39:44 AM	H2 MFC set to  0.000000
12/12/2012	9:39:44 AM	BCl3 MFC set to  0.000000
12/12/2012	9:39:44 AM	PH3 MFC set to  0.000000
12/12/2012	9:39:44 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:39:44 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:39:44 AM	Tube furnace set to 0
12/12/2012	9:40:14 AM	Helium valve closed
12/12/2012	9:40:14 AM	H2 valve closed
12/12/2012	9:40:14 AM	BCl3 valve closed
12/12/2012	9:40:14 AM	PH3 valve closed
12/12/2012	9:40:14 AM	SiCl4 pre valve closed
12/12/2012	9:40:14 AM	SiCl4 post valve closed
12/12/2012	9:40:14 AM	Bypass valve closed
12/12/2012	9:40:14 AM	Bubbler valve closed
12/12/2012	9:40:14 AM	Main Vac valve opened
12/12/2012	9:40:14 AM	Helium MFC set to  0.000000
12/12/2012	9:40:14 AM	H2 MFC set to  0.000000
12/12/2012	9:40:14 AM	BCl3 MFC set to  0.000000
12/12/2012	9:40:14 AM	PH3 MFC set to  0.000000
12/12/2012	9:40:14 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:40:15 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:40:15 AM	Tube furnace set to 0
12/12/2012	9:40:45 AM	H2 valve closed
12/12/2012	9:40:45 AM	BCl3 valve closed
12/12/2012	9:40:45 AM	PH3 valve closed
12/12/2012	9:40:45 AM	SiCl4 pre valve closed
12/12/2012	9:40:45 AM	SiCl4 post valve closed
12/12/2012	9:40:45 AM	Bypass valve closed
12/12/2012	9:40:45 AM	Bubbler valve closed
12/12/2012	9:40:45 AM	Helium valve opened
12/12/2012	9:40:45 AM	Main Vac valve opened
12/12/2012	9:40:45 AM	Helium MFC set to  20.000000
12/12/2012	9:40:45 AM	H2 MFC set to  0.000000
12/12/2012	9:40:45 AM	BCl3 MFC set to  0.000000
12/12/2012	9:40:45 AM	PH3 MFC set to  0.000000
12/12/2012	9:40:45 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:40:45 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:40:45 AM	Tube furnace set to 0
12/12/2012	9:41:15 AM	Helium valve closed
12/12/2012	9:41:15 AM	H2 valve closed
12/12/2012	9:41:15 AM	BCl3 valve closed
12/12/2012	9:41:15 AM	PH3 valve closed
12/12/2012	9:41:15 AM	SiCl4 pre valve closed
12/12/2012	9:41:15 AM	SiCl4 post valve closed
12/12/2012	9:41:15 AM	Bypass valve closed
12/12/2012	9:41:15 AM	Bubbler valve closed
12/12/2012	9:41:15 AM	Main Vac valve opened
12/12/2012	9:41:15 AM	Helium MFC set to  0.000000
12/12/2012	9:41:15 AM	H2 MFC set to  0.000000
12/12/2012	9:41:15 AM	BCl3 MFC set to  0.000000
12/12/2012	9:41:15 AM	PH3 MFC set to  0.000000
12/12/2012	9:41:15 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:41:15 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:41:15 AM	Tube furnace set to 0
12/12/2012	9:41:45 AM	H2 valve closed
12/12/2012	9:41:45 AM	BCl3 valve closed
12/12/2012	9:41:45 AM	PH3 valve closed
12/12/2012	9:41:45 AM	SiCl4 pre valve closed
12/12/2012	9:41:45 AM	SiCl4 post valve closed
12/12/2012	9:41:45 AM	Bypass valve closed
12/12/2012	9:41:45 AM	Bubbler valve closed
12/12/2012	9:41:45 AM	Helium valve opened
12/12/2012	9:41:45 AM	Main Vac valve opened
12/12/2012	9:41:45 AM	Helium MFC set to  20.000000
12/12/2012	9:41:45 AM	H2 MFC set to  0.000000
12/12/2012	9:41:45 AM	BCl3 MFC set to  0.000000
12/12/2012	9:41:45 AM	PH3 MFC set to  0.000000
12/12/2012	9:41:45 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:41:45 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:41:45 AM	Tube furnace set to 0
12/12/2012	9:42:15 AM	Helium valve closed
12/12/2012	9:42:15 AM	H2 valve closed
12/12/2012	9:42:15 AM	BCl3 valve closed
12/12/2012	9:42:15 AM	PH3 valve closed
12/12/2012	9:42:15 AM	SiCl4 pre valve closed
12/12/2012	9:42:15 AM	SiCl4 post valve closed
12/12/2012	9:42:15 AM	Bypass valve closed
12/12/2012	9:42:15 AM	Bubbler valve closed
12/12/2012	9:42:15 AM	Main Vac valve opened
12/12/2012	9:42:15 AM	Helium MFC set to  0.000000
12/12/2012	9:42:15 AM	H2 MFC set to  0.000000
12/12/2012	9:42:15 AM	BCl3 MFC set to  0.000000
12/12/2012	9:42:15 AM	PH3 MFC set to  0.000000
12/12/2012	9:42:15 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:42:15 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:42:16 AM	Tube furnace set to 0
12/12/2012	9:42:46 AM	H2 valve closed
12/12/2012	9:42:46 AM	BCl3 valve closed
12/12/2012	9:42:46 AM	PH3 valve closed
12/12/2012	9:42:46 AM	SiCl4 pre valve closed
12/12/2012	9:42:46 AM	SiCl4 post valve closed
12/12/2012	9:42:46 AM	Bypass valve closed
12/12/2012	9:42:46 AM	Bubbler valve closed
12/12/2012	9:42:46 AM	Helium valve opened
12/12/2012	9:42:46 AM	Main Vac valve opened
12/12/2012	9:42:46 AM	Helium MFC set to  20.000000
12/12/2012	9:42:46 AM	H2 MFC set to  0.000000
12/12/2012	9:42:46 AM	BCl3 MFC set to  0.000000
12/12/2012	9:42:46 AM	PH3 MFC set to  0.000000
12/12/2012	9:42:46 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:42:46 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:42:46 AM	Tube furnace set to 0
12/12/2012	9:43:16 AM	Helium valve closed
12/12/2012	9:43:16 AM	H2 valve closed
12/12/2012	9:43:16 AM	BCl3 valve closed
12/12/2012	9:43:16 AM	PH3 valve closed
12/12/2012	9:43:16 AM	SiCl4 pre valve closed
12/12/2012	9:43:16 AM	SiCl4 post valve closed
12/12/2012	9:43:16 AM	Bypass valve closed
12/12/2012	9:43:16 AM	Bubbler valve closed
12/12/2012	9:43:16 AM	Main Vac valve opened
12/12/2012	9:43:16 AM	Helium MFC set to  0.000000
12/12/2012	9:43:16 AM	H2 MFC set to  0.000000
12/12/2012	9:43:16 AM	BCl3 MFC set to  0.000000
12/12/2012	9:43:16 AM	PH3 MFC set to  0.000000
12/12/2012	9:43:16 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:43:16 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:43:16 AM	Tube furnace set to 0
12/12/2012	9:43:46 AM	H2 valve closed
12/12/2012	9:43:46 AM	BCl3 valve closed
12/12/2012	9:43:46 AM	PH3 valve closed
12/12/2012	9:43:46 AM	SiCl4 pre valve closed
12/12/2012	9:43:46 AM	SiCl4 post valve closed
12/12/2012	9:43:46 AM	Bypass valve closed
12/12/2012	9:43:46 AM	Bubbler valve closed
12/12/2012	9:43:46 AM	Helium valve opened
12/12/2012	9:43:46 AM	Main Vac valve opened
12/12/2012	9:43:46 AM	Helium MFC set to  20.000000
12/12/2012	9:43:46 AM	H2 MFC set to  0.000000
12/12/2012	9:43:46 AM	BCl3 MFC set to  0.000000
12/12/2012	9:43:46 AM	PH3 MFC set to  0.000000
12/12/2012	9:43:46 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:43:46 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:43:46 AM	Tube furnace set to 0
12/12/2012	9:44:16 AM	Helium valve closed
12/12/2012	9:44:16 AM	H2 valve closed
12/12/2012	9:44:16 AM	BCl3 valve closed
12/12/2012	9:44:16 AM	PH3 valve closed
12/12/2012	9:44:16 AM	SiCl4 pre valve closed
12/12/2012	9:44:16 AM	SiCl4 post valve closed
12/12/2012	9:44:16 AM	Bypass valve closed
12/12/2012	9:44:16 AM	Bubbler valve closed
12/12/2012	9:44:16 AM	Main Vac valve opened
12/12/2012	9:44:16 AM	Helium MFC set to  0.000000
12/12/2012	9:44:16 AM	H2 MFC set to  0.000000
12/12/2012	9:44:16 AM	BCl3 MFC set to  0.000000
12/12/2012	9:44:16 AM	PH3 MFC set to  0.000000
12/12/2012	9:44:16 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:44:16 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:44:17 AM	Tube furnace set to 200
12/12/2012	9:44:47 AM	H2 valve closed
12/12/2012	9:44:47 AM	BCl3 valve closed
12/12/2012	9:44:47 AM	PH3 valve closed
12/12/2012	9:44:47 AM	SiCl4 pre valve closed
12/12/2012	9:44:47 AM	SiCl4 post valve closed
12/12/2012	9:44:47 AM	Bypass valve closed
12/12/2012	9:44:47 AM	Bubbler valve closed
12/12/2012	9:44:47 AM	Helium valve opened
12/12/2012	9:44:47 AM	Main Vac valve opened
12/12/2012	9:44:47 AM	Helium MFC set to  20.000000
12/12/2012	9:44:47 AM	H2 MFC set to  0.000000
12/12/2012	9:44:47 AM	BCl3 MFC set to  0.000000
12/12/2012	9:44:47 AM	PH3 MFC set to  0.000000
12/12/2012	9:44:47 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:44:47 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:44:47 AM	Tube furnace set to 200
12/12/2012	9:45:17 AM	Helium valve closed
12/12/2012	9:45:17 AM	H2 valve closed
12/12/2012	9:45:17 AM	BCl3 valve closed
12/12/2012	9:45:17 AM	PH3 valve closed
12/12/2012	9:45:17 AM	SiCl4 pre valve closed
12/12/2012	9:45:17 AM	SiCl4 post valve closed
12/12/2012	9:45:17 AM	Bypass valve closed
12/12/2012	9:45:17 AM	Bubbler valve closed
12/12/2012	9:45:17 AM	Main Vac valve opened
12/12/2012	9:45:17 AM	Helium MFC set to  0.000000
12/12/2012	9:45:17 AM	H2 MFC set to  0.000000
12/12/2012	9:45:17 AM	BCl3 MFC set to  0.000000
12/12/2012	9:45:17 AM	PH3 MFC set to  0.000000
12/12/2012	9:45:17 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:45:17 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:45:17 AM	Tube furnace set to 200
12/12/2012	9:45:47 AM	H2 valve closed
12/12/2012	9:45:47 AM	BCl3 valve closed
12/12/2012	9:45:47 AM	PH3 valve closed
12/12/2012	9:45:47 AM	SiCl4 pre valve closed
12/12/2012	9:45:47 AM	SiCl4 post valve closed
12/12/2012	9:45:47 AM	Bypass valve closed
12/12/2012	9:45:47 AM	Bubbler valve closed
12/12/2012	9:45:47 AM	Helium valve opened
12/12/2012	9:45:47 AM	Main Vac valve opened
12/12/2012	9:45:47 AM	Helium MFC set to  20.000000
12/12/2012	9:45:47 AM	H2 MFC set to  0.000000
12/12/2012	9:45:47 AM	BCl3 MFC set to  0.000000
12/12/2012	9:45:47 AM	PH3 MFC set to  0.000000
12/12/2012	9:45:47 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:45:47 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:45:47 AM	Tube furnace set to 200
12/12/2012	9:46:17 AM	Helium valve closed
12/12/2012	9:46:17 AM	H2 valve closed
12/12/2012	9:46:17 AM	BCl3 valve closed
12/12/2012	9:46:17 AM	PH3 valve closed
12/12/2012	9:46:17 AM	SiCl4 pre valve closed
12/12/2012	9:46:17 AM	SiCl4 post valve closed
12/12/2012	9:46:17 AM	Bypass valve closed
12/12/2012	9:46:17 AM	Bubbler valve closed
12/12/2012	9:46:17 AM	Main Vac valve opened
12/12/2012	9:46:17 AM	Helium MFC set to  0.000000
12/12/2012	9:46:17 AM	H2 MFC set to  0.000000
12/12/2012	9:46:17 AM	BCl3 MFC set to  0.000000
12/12/2012	9:46:17 AM	PH3 MFC set to  0.000000
12/12/2012	9:46:17 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:46:17 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:46:18 AM	Tube furnace set to 200
12/12/2012	9:46:48 AM	H2 valve closed
12/12/2012	9:46:48 AM	BCl3 valve closed
12/12/2012	9:46:48 AM	PH3 valve closed
12/12/2012	9:46:48 AM	SiCl4 pre valve closed
12/12/2012	9:46:48 AM	SiCl4 post valve closed
12/12/2012	9:46:48 AM	Bypass valve closed
12/12/2012	9:46:48 AM	Bubbler valve closed
12/12/2012	9:46:48 AM	Helium valve opened
12/12/2012	9:46:48 AM	Main Vac valve opened
12/12/2012	9:46:48 AM	Helium MFC set to  20.000000
12/12/2012	9:46:48 AM	H2 MFC set to  0.000000
12/12/2012	9:46:48 AM	BCl3 MFC set to  0.000000
12/12/2012	9:46:48 AM	PH3 MFC set to  0.000000
12/12/2012	9:46:48 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:46:48 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:46:48 AM	Tube furnace set to 200
12/12/2012	9:47:18 AM	Helium valve closed
12/12/2012	9:47:18 AM	H2 valve closed
12/12/2012	9:47:18 AM	BCl3 valve closed
12/12/2012	9:47:18 AM	PH3 valve closed
12/12/2012	9:47:18 AM	SiCl4 pre valve closed
12/12/2012	9:47:18 AM	SiCl4 post valve closed
12/12/2012	9:47:18 AM	Bypass valve closed
12/12/2012	9:47:18 AM	Bubbler valve closed
12/12/2012	9:47:18 AM	Main Vac valve opened
12/12/2012	9:47:18 AM	Helium MFC set to  0.000000
12/12/2012	9:47:18 AM	H2 MFC set to  0.000000
12/12/2012	9:47:18 AM	BCl3 MFC set to  0.000000
12/12/2012	9:47:18 AM	PH3 MFC set to  0.000000
12/12/2012	9:47:18 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:47:18 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:47:18 AM	Tube furnace set to 200
12/12/2012	9:47:48 AM	H2 valve closed
12/12/2012	9:47:48 AM	BCl3 valve closed
12/12/2012	9:47:48 AM	PH3 valve closed
12/12/2012	9:47:48 AM	SiCl4 pre valve closed
12/12/2012	9:47:48 AM	SiCl4 post valve closed
12/12/2012	9:47:48 AM	Bypass valve closed
12/12/2012	9:47:48 AM	Bubbler valve closed
12/12/2012	9:47:48 AM	Helium valve opened
12/12/2012	9:47:48 AM	Main Vac valve opened
12/12/2012	9:47:48 AM	Helium MFC set to  20.000000
12/12/2012	9:47:48 AM	H2 MFC set to  0.000000
12/12/2012	9:47:48 AM	BCl3 MFC set to  0.000000
12/12/2012	9:47:48 AM	PH3 MFC set to  0.000000
12/12/2012	9:47:48 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:47:48 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:47:48 AM	Tube furnace set to 200
12/12/2012	9:48:18 AM	Helium valve closed
12/12/2012	9:48:18 AM	H2 valve closed
12/12/2012	9:48:18 AM	BCl3 valve closed
12/12/2012	9:48:18 AM	PH3 valve closed
12/12/2012	9:48:18 AM	SiCl4 pre valve closed
12/12/2012	9:48:18 AM	SiCl4 post valve closed
12/12/2012	9:48:18 AM	Bypass valve closed
12/12/2012	9:48:18 AM	Bubbler valve closed
12/12/2012	9:48:18 AM	Main Vac valve opened
12/12/2012	9:48:18 AM	Helium MFC set to  0.000000
12/12/2012	9:48:18 AM	H2 MFC set to  0.000000
12/12/2012	9:48:18 AM	BCl3 MFC set to  0.000000
12/12/2012	9:48:18 AM	PH3 MFC set to  0.000000
12/12/2012	9:48:18 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:48:18 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:48:19 AM	Tube furnace set to 200
12/12/2012	9:48:49 AM	H2 valve closed
12/12/2012	9:48:49 AM	BCl3 valve closed
12/12/2012	9:48:49 AM	PH3 valve closed
12/12/2012	9:48:49 AM	SiCl4 pre valve closed
12/12/2012	9:48:49 AM	SiCl4 post valve closed
12/12/2012	9:48:49 AM	Bypass valve closed
12/12/2012	9:48:49 AM	Bubbler valve closed
12/12/2012	9:48:49 AM	Helium valve opened
12/12/2012	9:48:49 AM	Main Vac valve opened
12/12/2012	9:48:49 AM	Helium MFC set to  20.000000
12/12/2012	9:48:49 AM	H2 MFC set to  0.000000
12/12/2012	9:48:49 AM	BCl3 MFC set to  0.000000
12/12/2012	9:48:49 AM	PH3 MFC set to  0.000000
12/12/2012	9:48:49 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:48:49 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:48:49 AM	Tube furnace set to 200
12/12/2012	9:49:19 AM	Helium valve closed
12/12/2012	9:49:19 AM	H2 valve closed
12/12/2012	9:49:19 AM	BCl3 valve closed
12/12/2012	9:49:19 AM	PH3 valve closed
12/12/2012	9:49:19 AM	SiCl4 pre valve closed
12/12/2012	9:49:19 AM	SiCl4 post valve closed
12/12/2012	9:49:19 AM	Bypass valve closed
12/12/2012	9:49:19 AM	Bubbler valve closed
12/12/2012	9:49:19 AM	Main Vac valve opened
12/12/2012	9:49:19 AM	Helium MFC set to  0.000000
12/12/2012	9:49:19 AM	H2 MFC set to  0.000000
12/12/2012	9:49:19 AM	BCl3 MFC set to  0.000000
12/12/2012	9:49:19 AM	PH3 MFC set to  0.000000
12/12/2012	9:49:19 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:49:19 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:49:19 AM	Tube furnace set to 200
12/12/2012	9:49:49 AM	H2 valve closed
12/12/2012	9:49:49 AM	BCl3 valve closed
12/12/2012	9:49:49 AM	PH3 valve closed
12/12/2012	9:49:49 AM	SiCl4 pre valve closed
12/12/2012	9:49:49 AM	SiCl4 post valve closed
12/12/2012	9:49:49 AM	Bypass valve closed
12/12/2012	9:49:49 AM	Bubbler valve closed
12/12/2012	9:49:49 AM	Helium valve opened
12/12/2012	9:49:49 AM	Main Vac valve opened
12/12/2012	9:49:49 AM	Helium MFC set to  20.000000
12/12/2012	9:49:49 AM	H2 MFC set to  0.000000
12/12/2012	9:49:49 AM	BCl3 MFC set to  0.000000
12/12/2012	9:49:49 AM	PH3 MFC set to  0.000000
12/12/2012	9:49:49 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:49:49 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:49:49 AM	Tube furnace set to 200
12/12/2012	9:50:19 AM	Helium valve closed
12/12/2012	9:50:19 AM	H2 valve closed
12/12/2012	9:50:19 AM	BCl3 valve closed
12/12/2012	9:50:19 AM	PH3 valve closed
12/12/2012	9:50:19 AM	SiCl4 pre valve closed
12/12/2012	9:50:19 AM	SiCl4 post valve closed
12/12/2012	9:50:19 AM	Bypass valve closed
12/12/2012	9:50:19 AM	Bubbler valve closed
12/12/2012	9:50:19 AM	Main Vac valve opened
12/12/2012	9:50:19 AM	Helium MFC set to  0.000000
12/12/2012	9:50:19 AM	H2 MFC set to  0.000000
12/12/2012	9:50:19 AM	BCl3 MFC set to  0.000000
12/12/2012	9:50:19 AM	PH3 MFC set to  0.000000
12/12/2012	9:50:19 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:50:19 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:50:20 AM	Tube furnace set to 0
12/12/2012	9:50:21 AM	Run finished at 9:50 AM
12/12/2012	9:51:15 AM	Main Vac valve closed
12/12/2012	9:51:28 AM	Main Vac valve opened
12/12/2012	9:51:28 AM	Main Vac valve closed
12/12/2012	9:51:29 AM	Main Vac valve opened
12/12/2012	9:54:56 AM	Helium MFC set to  10.000000
12/12/2012	9:54:58 AM	Helium valve opened
12/12/2012	9:55:16 AM	Helium MFC set to  0.000000
12/12/2012	9:55:16 AM	Helium valve closed
12/12/2012	9:57:28 AM	Recipe started at 9:57 AM
12/12/2012	9:57:28 AM	Helium valve closed
12/12/2012	9:57:28 AM	H2 valve closed
12/12/2012	9:57:28 AM	BCl3 valve closed
12/12/2012	9:57:28 AM	PH3 valve closed
12/12/2012	9:57:28 AM	SiCl4 pre valve closed
12/12/2012	9:57:28 AM	SiCl4 post valve closed
12/12/2012	9:57:28 AM	Bypass valve closed
12/12/2012	9:57:28 AM	Bubbler valve closed
12/12/2012	9:57:28 AM	Main Vac valve opened
12/12/2012	9:57:28 AM	Helium MFC set to  0.000000
12/12/2012	9:57:28 AM	H2 MFC set to  0.000000
12/12/2012	9:57:28 AM	BCl3 MFC set to  0.000000
12/12/2012	9:57:28 AM	PH3 MFC set to  0.000000
12/12/2012	9:57:28 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:57:28 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:57:28 AM	Tube furnace set to 0
12/12/2012	9:57:58 AM	H2 valve closed
12/12/2012	9:57:58 AM	BCl3 valve closed
12/12/2012	9:57:58 AM	PH3 valve closed
12/12/2012	9:57:58 AM	SiCl4 pre valve closed
12/12/2012	9:57:58 AM	SiCl4 post valve closed
12/12/2012	9:57:58 AM	Bypass valve closed
12/12/2012	9:57:58 AM	Bubbler valve closed
12/12/2012	9:57:58 AM	Helium valve opened
12/12/2012	9:57:58 AM	Main Vac valve opened
12/12/2012	9:57:58 AM	Helium MFC set to  20.000000
12/12/2012	9:57:58 AM	H2 MFC set to  0.000000
12/12/2012	9:57:58 AM	BCl3 MFC set to  0.000000
12/12/2012	9:57:58 AM	PH3 MFC set to  0.000000
12/12/2012	9:57:58 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:57:58 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:57:58 AM	Tube furnace set to 0
12/12/2012	9:58:28 AM	Helium valve closed
12/12/2012	9:58:28 AM	H2 valve closed
12/12/2012	9:58:28 AM	BCl3 valve closed
12/12/2012	9:58:28 AM	PH3 valve closed
12/12/2012	9:58:28 AM	SiCl4 pre valve closed
12/12/2012	9:58:28 AM	SiCl4 post valve closed
12/12/2012	9:58:28 AM	Bypass valve closed
12/12/2012	9:58:28 AM	Bubbler valve closed
12/12/2012	9:58:28 AM	Main Vac valve opened
12/12/2012	9:58:28 AM	Helium MFC set to  0.000000
12/12/2012	9:58:28 AM	H2 MFC set to  0.000000
12/12/2012	9:58:28 AM	BCl3 MFC set to  0.000000
12/12/2012	9:58:28 AM	PH3 MFC set to  0.000000
12/12/2012	9:58:28 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:58:28 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:58:28 AM	Tube furnace set to 0
12/12/2012	9:58:58 AM	H2 valve closed
12/12/2012	9:58:58 AM	BCl3 valve closed
12/12/2012	9:58:58 AM	PH3 valve closed
12/12/2012	9:58:58 AM	SiCl4 pre valve closed
12/12/2012	9:58:58 AM	SiCl4 post valve closed
12/12/2012	9:58:58 AM	Bypass valve closed
12/12/2012	9:58:58 AM	Bubbler valve closed
12/12/2012	9:58:58 AM	Helium valve opened
12/12/2012	9:58:58 AM	Main Vac valve opened
12/12/2012	9:58:58 AM	Helium MFC set to  20.000000
12/12/2012	9:58:58 AM	H2 MFC set to  0.000000
12/12/2012	9:58:58 AM	BCl3 MFC set to  0.000000
12/12/2012	9:58:58 AM	PH3 MFC set to  0.000000
12/12/2012	9:58:58 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:58:58 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:58:59 AM	Tube furnace set to 0
12/12/2012	9:59:29 AM	Helium valve closed
12/12/2012	9:59:29 AM	H2 valve closed
12/12/2012	9:59:29 AM	BCl3 valve closed
12/12/2012	9:59:29 AM	PH3 valve closed
12/12/2012	9:59:29 AM	SiCl4 pre valve closed
12/12/2012	9:59:29 AM	SiCl4 post valve closed
12/12/2012	9:59:29 AM	Bypass valve closed
12/12/2012	9:59:29 AM	Bubbler valve closed
12/12/2012	9:59:29 AM	Main Vac valve opened
12/12/2012	9:59:29 AM	Helium MFC set to  0.000000
12/12/2012	9:59:29 AM	H2 MFC set to  0.000000
12/12/2012	9:59:29 AM	BCl3 MFC set to  0.000000
12/12/2012	9:59:29 AM	PH3 MFC set to  0.000000
12/12/2012	9:59:29 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:59:29 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:59:29 AM	Tube furnace set to 0
12/12/2012	9:59:59 AM	H2 valve closed
12/12/2012	9:59:59 AM	BCl3 valve closed
12/12/2012	9:59:59 AM	PH3 valve closed
12/12/2012	9:59:59 AM	SiCl4 pre valve closed
12/12/2012	9:59:59 AM	SiCl4 post valve closed
12/12/2012	9:59:59 AM	Bypass valve closed
12/12/2012	9:59:59 AM	Bubbler valve closed
12/12/2012	9:59:59 AM	Helium valve opened
12/12/2012	9:59:59 AM	Main Vac valve opened
12/12/2012	9:59:59 AM	Helium MFC set to  20.000000
12/12/2012	9:59:59 AM	H2 MFC set to  0.000000
12/12/2012	9:59:59 AM	BCl3 MFC set to  0.000000
12/12/2012	9:59:59 AM	PH3 MFC set to  0.000000
12/12/2012	9:59:59 AM	SiCl4 MFC set to  0.000000
12/12/2012	9:59:59 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	9:59:59 AM	Tube furnace set to 0
12/12/2012	10:00:29 AM	Helium valve closed
12/12/2012	10:00:29 AM	H2 valve closed
12/12/2012	10:00:29 AM	BCl3 valve closed
12/12/2012	10:00:29 AM	PH3 valve closed
12/12/2012	10:00:29 AM	SiCl4 pre valve closed
12/12/2012	10:00:29 AM	SiCl4 post valve closed
12/12/2012	10:00:29 AM	Bypass valve closed
12/12/2012	10:00:29 AM	Bubbler valve closed
12/12/2012	10:00:29 AM	Main Vac valve opened
12/12/2012	10:00:29 AM	Helium MFC set to  0.000000
12/12/2012	10:00:29 AM	H2 MFC set to  0.000000
12/12/2012	10:00:29 AM	BCl3 MFC set to  0.000000
12/12/2012	10:00:29 AM	PH3 MFC set to  0.000000
12/12/2012	10:00:29 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:00:29 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:00:29 AM	Tube furnace set to 0
12/12/2012	10:00:59 AM	H2 valve closed
12/12/2012	10:00:59 AM	BCl3 valve closed
12/12/2012	10:00:59 AM	PH3 valve closed
12/12/2012	10:00:59 AM	SiCl4 pre valve closed
12/12/2012	10:00:59 AM	SiCl4 post valve closed
12/12/2012	10:00:59 AM	Bypass valve closed
12/12/2012	10:00:59 AM	Bubbler valve closed
12/12/2012	10:00:59 AM	Helium valve opened
12/12/2012	10:00:59 AM	Main Vac valve opened
12/12/2012	10:00:59 AM	Helium MFC set to  20.000000
12/12/2012	10:00:59 AM	H2 MFC set to  0.000000
12/12/2012	10:00:59 AM	BCl3 MFC set to  0.000000
12/12/2012	10:00:59 AM	PH3 MFC set to  0.000000
12/12/2012	10:00:59 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:00:59 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:01:00 AM	Tube furnace set to 0
12/12/2012	10:01:30 AM	Helium valve closed
12/12/2012	10:01:30 AM	H2 valve closed
12/12/2012	10:01:30 AM	BCl3 valve closed
12/12/2012	10:01:30 AM	PH3 valve closed
12/12/2012	10:01:30 AM	SiCl4 pre valve closed
12/12/2012	10:01:30 AM	SiCl4 post valve closed
12/12/2012	10:01:30 AM	Bypass valve closed
12/12/2012	10:01:30 AM	Bubbler valve closed
12/12/2012	10:01:30 AM	Main Vac valve opened
12/12/2012	10:01:30 AM	Helium MFC set to  0.000000
12/12/2012	10:01:30 AM	H2 MFC set to  0.000000
12/12/2012	10:01:30 AM	BCl3 MFC set to  0.000000
12/12/2012	10:01:30 AM	PH3 MFC set to  0.000000
12/12/2012	10:01:30 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:01:30 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:01:30 AM	Tube furnace set to 0
12/12/2012	10:02:00 AM	H2 valve closed
12/12/2012	10:02:00 AM	BCl3 valve closed
12/12/2012	10:02:00 AM	PH3 valve closed
12/12/2012	10:02:00 AM	SiCl4 pre valve closed
12/12/2012	10:02:00 AM	SiCl4 post valve closed
12/12/2012	10:02:00 AM	Bypass valve closed
12/12/2012	10:02:00 AM	Bubbler valve closed
12/12/2012	10:02:00 AM	Helium valve opened
12/12/2012	10:02:00 AM	Main Vac valve opened
12/12/2012	10:02:00 AM	Helium MFC set to  20.000000
12/12/2012	10:02:00 AM	H2 MFC set to  0.000000
12/12/2012	10:02:00 AM	BCl3 MFC set to  0.000000
12/12/2012	10:02:00 AM	PH3 MFC set to  0.000000
12/12/2012	10:02:00 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:02:00 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:02:00 AM	Tube furnace set to 0
12/12/2012	10:02:30 AM	Helium valve closed
12/12/2012	10:02:30 AM	H2 valve closed
12/12/2012	10:02:30 AM	BCl3 valve closed
12/12/2012	10:02:30 AM	PH3 valve closed
12/12/2012	10:02:30 AM	SiCl4 pre valve closed
12/12/2012	10:02:30 AM	SiCl4 post valve closed
12/12/2012	10:02:30 AM	Bypass valve closed
12/12/2012	10:02:30 AM	Bubbler valve closed
12/12/2012	10:02:30 AM	Main Vac valve opened
12/12/2012	10:02:30 AM	Helium MFC set to  0.000000
12/12/2012	10:02:30 AM	H2 MFC set to  0.000000
12/12/2012	10:02:30 AM	BCl3 MFC set to  0.000000
12/12/2012	10:02:30 AM	PH3 MFC set to  0.000000
12/12/2012	10:02:30 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:02:30 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:02:30 AM	Tube furnace set to 0
12/12/2012	10:03:00 AM	H2 valve closed
12/12/2012	10:03:00 AM	BCl3 valve closed
12/12/2012	10:03:00 AM	PH3 valve closed
12/12/2012	10:03:00 AM	SiCl4 pre valve closed
12/12/2012	10:03:00 AM	SiCl4 post valve closed
12/12/2012	10:03:00 AM	Bypass valve closed
12/12/2012	10:03:00 AM	Bubbler valve closed
12/12/2012	10:03:00 AM	Helium valve opened
12/12/2012	10:03:00 AM	Main Vac valve opened
12/12/2012	10:03:00 AM	Helium MFC set to  20.000000
12/12/2012	10:03:00 AM	H2 MFC set to  0.000000
12/12/2012	10:03:00 AM	BCl3 MFC set to  0.000000
12/12/2012	10:03:00 AM	PH3 MFC set to  0.000000
12/12/2012	10:03:00 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:03:00 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:03:01 AM	Tube furnace set to 0
12/12/2012	10:03:31 AM	Helium valve closed
12/12/2012	10:03:31 AM	H2 valve closed
12/12/2012	10:03:31 AM	BCl3 valve closed
12/12/2012	10:03:31 AM	PH3 valve closed
12/12/2012	10:03:31 AM	SiCl4 pre valve closed
12/12/2012	10:03:31 AM	SiCl4 post valve closed
12/12/2012	10:03:31 AM	Bypass valve closed
12/12/2012	10:03:31 AM	Bubbler valve closed
12/12/2012	10:03:31 AM	Main Vac valve opened
12/12/2012	10:03:31 AM	Helium MFC set to  0.000000
12/12/2012	10:03:31 AM	H2 MFC set to  0.000000
12/12/2012	10:03:31 AM	BCl3 MFC set to  0.000000
12/12/2012	10:03:31 AM	PH3 MFC set to  0.000000
12/12/2012	10:03:31 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:03:31 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:03:31 AM	Tube furnace set to 0
12/12/2012	10:04:01 AM	H2 valve closed
12/12/2012	10:04:01 AM	BCl3 valve closed
12/12/2012	10:04:01 AM	PH3 valve closed
12/12/2012	10:04:01 AM	SiCl4 pre valve closed
12/12/2012	10:04:01 AM	SiCl4 post valve closed
12/12/2012	10:04:01 AM	Bypass valve closed
12/12/2012	10:04:01 AM	Bubbler valve closed
12/12/2012	10:04:01 AM	Helium valve opened
12/12/2012	10:04:01 AM	Main Vac valve opened
12/12/2012	10:04:01 AM	Helium MFC set to  20.000000
12/12/2012	10:04:01 AM	H2 MFC set to  0.000000
12/12/2012	10:04:01 AM	BCl3 MFC set to  0.000000
12/12/2012	10:04:01 AM	PH3 MFC set to  0.000000
12/12/2012	10:04:01 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:04:01 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:04:01 AM	Tube furnace set to 0
12/12/2012	10:04:31 AM	Helium valve closed
12/12/2012	10:04:31 AM	H2 valve closed
12/12/2012	10:04:31 AM	BCl3 valve closed
12/12/2012	10:04:31 AM	PH3 valve closed
12/12/2012	10:04:31 AM	SiCl4 pre valve closed
12/12/2012	10:04:31 AM	SiCl4 post valve closed
12/12/2012	10:04:31 AM	Bypass valve closed
12/12/2012	10:04:31 AM	Bubbler valve closed
12/12/2012	10:04:31 AM	Main Vac valve opened
12/12/2012	10:04:31 AM	Helium MFC set to  0.000000
12/12/2012	10:04:31 AM	H2 MFC set to  0.000000
12/12/2012	10:04:31 AM	BCl3 MFC set to  0.000000
12/12/2012	10:04:31 AM	PH3 MFC set to  0.000000
12/12/2012	10:04:31 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:04:31 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:04:31 AM	Tube furnace set to 0
12/12/2012	10:05:01 AM	H2 valve closed
12/12/2012	10:05:01 AM	BCl3 valve closed
12/12/2012	10:05:01 AM	PH3 valve closed
12/12/2012	10:05:01 AM	SiCl4 pre valve closed
12/12/2012	10:05:01 AM	SiCl4 post valve closed
12/12/2012	10:05:01 AM	Bypass valve closed
12/12/2012	10:05:01 AM	Bubbler valve closed
12/12/2012	10:05:01 AM	Helium valve opened
12/12/2012	10:05:01 AM	Main Vac valve opened
12/12/2012	10:05:01 AM	Helium MFC set to  20.000000
12/12/2012	10:05:01 AM	H2 MFC set to  0.000000
12/12/2012	10:05:01 AM	BCl3 MFC set to  0.000000
12/12/2012	10:05:01 AM	PH3 MFC set to  0.000000
12/12/2012	10:05:01 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:05:01 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:05:02 AM	Tube furnace set to 0
12/12/2012	10:05:32 AM	Helium valve closed
12/12/2012	10:05:32 AM	H2 valve closed
12/12/2012	10:05:32 AM	BCl3 valve closed
12/12/2012	10:05:32 AM	PH3 valve closed
12/12/2012	10:05:32 AM	SiCl4 pre valve closed
12/12/2012	10:05:32 AM	SiCl4 post valve closed
12/12/2012	10:05:32 AM	Bypass valve closed
12/12/2012	10:05:32 AM	Bubbler valve closed
12/12/2012	10:05:32 AM	Main Vac valve opened
12/12/2012	10:05:32 AM	Helium MFC set to  0.000000
12/12/2012	10:05:32 AM	H2 MFC set to  0.000000
12/12/2012	10:05:32 AM	BCl3 MFC set to  0.000000
12/12/2012	10:05:32 AM	PH3 MFC set to  0.000000
12/12/2012	10:05:32 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:05:32 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:05:32 AM	Tube furnace set to 0
12/12/2012	10:06:02 AM	H2 valve closed
12/12/2012	10:06:02 AM	BCl3 valve closed
12/12/2012	10:06:02 AM	PH3 valve closed
12/12/2012	10:06:02 AM	SiCl4 pre valve closed
12/12/2012	10:06:02 AM	SiCl4 post valve closed
12/12/2012	10:06:02 AM	Bypass valve closed
12/12/2012	10:06:02 AM	Bubbler valve closed
12/12/2012	10:06:02 AM	Helium valve opened
12/12/2012	10:06:02 AM	Main Vac valve opened
12/12/2012	10:06:02 AM	Helium MFC set to  20.000000
12/12/2012	10:06:02 AM	H2 MFC set to  0.000000
12/12/2012	10:06:02 AM	BCl3 MFC set to  0.000000
12/12/2012	10:06:02 AM	PH3 MFC set to  0.000000
12/12/2012	10:06:02 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:06:02 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:06:02 AM	Tube furnace set to 0
12/12/2012	10:06:32 AM	Helium valve closed
12/12/2012	10:06:32 AM	H2 valve closed
12/12/2012	10:06:32 AM	BCl3 valve closed
12/12/2012	10:06:32 AM	PH3 valve closed
12/12/2012	10:06:32 AM	SiCl4 pre valve closed
12/12/2012	10:06:32 AM	SiCl4 post valve closed
12/12/2012	10:06:32 AM	Bypass valve closed
12/12/2012	10:06:32 AM	Bubbler valve closed
12/12/2012	10:06:32 AM	Main Vac valve opened
12/12/2012	10:06:32 AM	Helium MFC set to  0.000000
12/12/2012	10:06:32 AM	H2 MFC set to  0.000000
12/12/2012	10:06:32 AM	BCl3 MFC set to  0.000000
12/12/2012	10:06:32 AM	PH3 MFC set to  0.000000
12/12/2012	10:06:32 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:06:32 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:06:32 AM	Tube furnace set to 200
12/12/2012	10:07:02 AM	H2 valve closed
12/12/2012	10:07:02 AM	BCl3 valve closed
12/12/2012	10:07:02 AM	PH3 valve closed
12/12/2012	10:07:02 AM	SiCl4 pre valve closed
12/12/2012	10:07:02 AM	SiCl4 post valve closed
12/12/2012	10:07:02 AM	Bypass valve closed
12/12/2012	10:07:02 AM	Bubbler valve closed
12/12/2012	10:07:02 AM	Helium valve opened
12/12/2012	10:07:02 AM	Main Vac valve opened
12/12/2012	10:07:02 AM	Helium MFC set to  20.000000
12/12/2012	10:07:02 AM	H2 MFC set to  0.000000
12/12/2012	10:07:02 AM	BCl3 MFC set to  0.000000
12/12/2012	10:07:02 AM	PH3 MFC set to  0.000000
12/12/2012	10:07:02 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:07:02 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:07:03 AM	Tube furnace set to 200
12/12/2012	10:07:33 AM	Helium valve closed
12/12/2012	10:07:33 AM	H2 valve closed
12/12/2012	10:07:33 AM	BCl3 valve closed
12/12/2012	10:07:33 AM	PH3 valve closed
12/12/2012	10:07:33 AM	SiCl4 pre valve closed
12/12/2012	10:07:33 AM	SiCl4 post valve closed
12/12/2012	10:07:33 AM	Bypass valve closed
12/12/2012	10:07:33 AM	Bubbler valve closed
12/12/2012	10:07:33 AM	Main Vac valve opened
12/12/2012	10:07:33 AM	Helium MFC set to  0.000000
12/12/2012	10:07:33 AM	H2 MFC set to  0.000000
12/12/2012	10:07:33 AM	BCl3 MFC set to  0.000000
12/12/2012	10:07:33 AM	PH3 MFC set to  0.000000
12/12/2012	10:07:33 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:07:33 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:07:33 AM	Tube furnace set to 200
12/12/2012	10:08:03 AM	H2 valve closed
12/12/2012	10:08:03 AM	BCl3 valve closed
12/12/2012	10:08:03 AM	PH3 valve closed
12/12/2012	10:08:03 AM	SiCl4 pre valve closed
12/12/2012	10:08:03 AM	SiCl4 post valve closed
12/12/2012	10:08:03 AM	Bypass valve closed
12/12/2012	10:08:03 AM	Bubbler valve closed
12/12/2012	10:08:03 AM	Helium valve opened
12/12/2012	10:08:03 AM	Main Vac valve opened
12/12/2012	10:08:03 AM	Helium MFC set to  20.000000
12/12/2012	10:08:03 AM	H2 MFC set to  0.000000
12/12/2012	10:08:03 AM	BCl3 MFC set to  0.000000
12/12/2012	10:08:03 AM	PH3 MFC set to  0.000000
12/12/2012	10:08:03 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:08:03 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:08:03 AM	Tube furnace set to 200
12/12/2012	10:08:33 AM	Helium valve closed
12/12/2012	10:08:33 AM	H2 valve closed
12/12/2012	10:08:33 AM	BCl3 valve closed
12/12/2012	10:08:33 AM	PH3 valve closed
12/12/2012	10:08:33 AM	SiCl4 pre valve closed
12/12/2012	10:08:33 AM	SiCl4 post valve closed
12/12/2012	10:08:33 AM	Bypass valve closed
12/12/2012	10:08:33 AM	Bubbler valve closed
12/12/2012	10:08:33 AM	Main Vac valve opened
12/12/2012	10:08:33 AM	Helium MFC set to  0.000000
12/12/2012	10:08:33 AM	H2 MFC set to  0.000000
12/12/2012	10:08:33 AM	BCl3 MFC set to  0.000000
12/12/2012	10:08:33 AM	PH3 MFC set to  0.000000
12/12/2012	10:08:33 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:08:33 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:08:33 AM	Tube furnace set to 200
12/12/2012	10:09:03 AM	H2 valve closed
12/12/2012	10:09:03 AM	BCl3 valve closed
12/12/2012	10:09:03 AM	PH3 valve closed
12/12/2012	10:09:03 AM	SiCl4 pre valve closed
12/12/2012	10:09:03 AM	SiCl4 post valve closed
12/12/2012	10:09:03 AM	Bypass valve closed
12/12/2012	10:09:03 AM	Bubbler valve closed
12/12/2012	10:09:03 AM	Helium valve opened
12/12/2012	10:09:03 AM	Main Vac valve opened
12/12/2012	10:09:03 AM	Helium MFC set to  20.000000
12/12/2012	10:09:03 AM	H2 MFC set to  0.000000
12/12/2012	10:09:03 AM	BCl3 MFC set to  0.000000
12/12/2012	10:09:03 AM	PH3 MFC set to  0.000000
12/12/2012	10:09:03 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:09:03 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:09:04 AM	Tube furnace set to 200
12/12/2012	10:09:34 AM	Helium valve closed
12/12/2012	10:09:34 AM	H2 valve closed
12/12/2012	10:09:34 AM	BCl3 valve closed
12/12/2012	10:09:34 AM	PH3 valve closed
12/12/2012	10:09:34 AM	SiCl4 pre valve closed
12/12/2012	10:09:34 AM	SiCl4 post valve closed
12/12/2012	10:09:34 AM	Bypass valve closed
12/12/2012	10:09:34 AM	Bubbler valve closed
12/12/2012	10:09:34 AM	Main Vac valve opened
12/12/2012	10:09:34 AM	Helium MFC set to  0.000000
12/12/2012	10:09:34 AM	H2 MFC set to  0.000000
12/12/2012	10:09:34 AM	BCl3 MFC set to  0.000000
12/12/2012	10:09:34 AM	PH3 MFC set to  0.000000
12/12/2012	10:09:34 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:09:34 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:09:34 AM	Tube furnace set to 200
12/12/2012	10:10:04 AM	H2 valve closed
12/12/2012	10:10:04 AM	BCl3 valve closed
12/12/2012	10:10:04 AM	PH3 valve closed
12/12/2012	10:10:04 AM	SiCl4 pre valve closed
12/12/2012	10:10:04 AM	SiCl4 post valve closed
12/12/2012	10:10:04 AM	Bypass valve closed
12/12/2012	10:10:04 AM	Bubbler valve closed
12/12/2012	10:10:04 AM	Helium valve opened
12/12/2012	10:10:04 AM	Main Vac valve opened
12/12/2012	10:10:04 AM	Helium MFC set to  20.000000
12/12/2012	10:10:04 AM	H2 MFC set to  0.000000
12/12/2012	10:10:04 AM	BCl3 MFC set to  0.000000
12/12/2012	10:10:04 AM	PH3 MFC set to  0.000000
12/12/2012	10:10:04 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:10:04 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:10:04 AM	Tube furnace set to 200
12/12/2012	10:10:34 AM	Helium valve closed
12/12/2012	10:10:34 AM	H2 valve closed
12/12/2012	10:10:34 AM	BCl3 valve closed
12/12/2012	10:10:34 AM	PH3 valve closed
12/12/2012	10:10:34 AM	SiCl4 pre valve closed
12/12/2012	10:10:34 AM	SiCl4 post valve closed
12/12/2012	10:10:34 AM	Bypass valve closed
12/12/2012	10:10:34 AM	Bubbler valve closed
12/12/2012	10:10:34 AM	Main Vac valve opened
12/12/2012	10:10:34 AM	Helium MFC set to  0.000000
12/12/2012	10:10:34 AM	H2 MFC set to  0.000000
12/12/2012	10:10:34 AM	BCl3 MFC set to  0.000000
12/12/2012	10:10:34 AM	PH3 MFC set to  0.000000
12/12/2012	10:10:34 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:10:34 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:10:34 AM	Tube furnace set to 200
12/12/2012	10:11:04 AM	H2 valve closed
12/12/2012	10:11:04 AM	BCl3 valve closed
12/12/2012	10:11:04 AM	PH3 valve closed
12/12/2012	10:11:04 AM	SiCl4 pre valve closed
12/12/2012	10:11:04 AM	SiCl4 post valve closed
12/12/2012	10:11:04 AM	Bypass valve closed
12/12/2012	10:11:04 AM	Bubbler valve closed
12/12/2012	10:11:04 AM	Helium valve opened
12/12/2012	10:11:04 AM	Main Vac valve opened
12/12/2012	10:11:04 AM	Helium MFC set to  20.000000
12/12/2012	10:11:04 AM	H2 MFC set to  0.000000
12/12/2012	10:11:04 AM	BCl3 MFC set to  0.000000
12/12/2012	10:11:04 AM	PH3 MFC set to  0.000000
12/12/2012	10:11:04 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:11:04 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:11:05 AM	Tube furnace set to 200
12/12/2012	10:11:35 AM	Helium valve closed
12/12/2012	10:11:35 AM	H2 valve closed
12/12/2012	10:11:35 AM	BCl3 valve closed
12/12/2012	10:11:35 AM	PH3 valve closed
12/12/2012	10:11:35 AM	SiCl4 pre valve closed
12/12/2012	10:11:35 AM	SiCl4 post valve closed
12/12/2012	10:11:35 AM	Bypass valve closed
12/12/2012	10:11:35 AM	Bubbler valve closed
12/12/2012	10:11:35 AM	Main Vac valve opened
12/12/2012	10:11:35 AM	Helium MFC set to  0.000000
12/12/2012	10:11:35 AM	H2 MFC set to  0.000000
12/12/2012	10:11:35 AM	BCl3 MFC set to  0.000000
12/12/2012	10:11:35 AM	PH3 MFC set to  0.000000
12/12/2012	10:11:35 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:11:35 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:11:35 AM	Tube furnace set to 200
12/12/2012	10:12:05 AM	H2 valve closed
12/12/2012	10:12:05 AM	BCl3 valve closed
12/12/2012	10:12:05 AM	PH3 valve closed
12/12/2012	10:12:05 AM	SiCl4 pre valve closed
12/12/2012	10:12:05 AM	SiCl4 post valve closed
12/12/2012	10:12:05 AM	Bypass valve closed
12/12/2012	10:12:05 AM	Bubbler valve closed
12/12/2012	10:12:05 AM	Helium valve opened
12/12/2012	10:12:05 AM	Main Vac valve opened
12/12/2012	10:12:05 AM	Helium MFC set to  20.000000
12/12/2012	10:12:05 AM	H2 MFC set to  0.000000
12/12/2012	10:12:05 AM	BCl3 MFC set to  0.000000
12/12/2012	10:12:05 AM	PH3 MFC set to  0.000000
12/12/2012	10:12:05 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:12:05 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:12:05 AM	Tube furnace set to 200
12/12/2012	10:12:35 AM	Helium valve closed
12/12/2012	10:12:35 AM	H2 valve closed
12/12/2012	10:12:35 AM	BCl3 valve closed
12/12/2012	10:12:35 AM	PH3 valve closed
12/12/2012	10:12:35 AM	SiCl4 pre valve closed
12/12/2012	10:12:35 AM	SiCl4 post valve closed
12/12/2012	10:12:35 AM	Bypass valve closed
12/12/2012	10:12:35 AM	Bubbler valve closed
12/12/2012	10:12:35 AM	Main Vac valve opened
12/12/2012	10:12:35 AM	Helium MFC set to  0.000000
12/12/2012	10:12:35 AM	H2 MFC set to  0.000000
12/12/2012	10:12:35 AM	BCl3 MFC set to  0.000000
12/12/2012	10:12:35 AM	PH3 MFC set to  0.000000
12/12/2012	10:12:35 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:12:35 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:12:35 AM	Tube furnace set to 0
12/12/2012	10:12:36 AM	Run finished at 10:12 AM
12/12/2012	10:13:50 AM	Main Vac valve closed
12/12/2012	10:14:04 AM	Main Vac valve opened
12/12/2012	10:16:02 AM	Helium MFC set to  10.000000
12/12/2012	10:16:03 AM	Helium valve opened
12/12/2012	10:16:23 AM	Helium MFC set to  0.000000
12/12/2012	10:16:23 AM	Helium valve closed
12/12/2012	10:21:00 AM	Recipe started at 10:20 AM
12/12/2012	10:21:00 AM	Helium valve closed
12/12/2012	10:21:00 AM	H2 valve closed
12/12/2012	10:21:00 AM	BCl3 valve closed
12/12/2012	10:21:00 AM	PH3 valve closed
12/12/2012	10:21:00 AM	SiCl4 pre valve closed
12/12/2012	10:21:00 AM	SiCl4 post valve closed
12/12/2012	10:21:00 AM	Bypass valve closed
12/12/2012	10:21:00 AM	Bubbler valve closed
12/12/2012	10:21:00 AM	Main Vac valve opened
12/12/2012	10:21:00 AM	Helium MFC set to  0.000000
12/12/2012	10:21:00 AM	H2 MFC set to  0.000000
12/12/2012	10:21:00 AM	BCl3 MFC set to  0.000000
12/12/2012	10:21:00 AM	PH3 MFC set to  0.000000
12/12/2012	10:21:00 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:21:00 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:21:00 AM	Tube furnace set to 0
12/12/2012	10:21:30 AM	H2 valve closed
12/12/2012	10:21:30 AM	BCl3 valve closed
12/12/2012	10:21:30 AM	PH3 valve closed
12/12/2012	10:21:30 AM	SiCl4 pre valve closed
12/12/2012	10:21:30 AM	SiCl4 post valve closed
12/12/2012	10:21:30 AM	Bypass valve closed
12/12/2012	10:21:30 AM	Bubbler valve closed
12/12/2012	10:21:30 AM	Helium valve opened
12/12/2012	10:21:30 AM	Main Vac valve opened
12/12/2012	10:21:30 AM	Helium MFC set to  20.000000
12/12/2012	10:21:30 AM	H2 MFC set to  0.000000
12/12/2012	10:21:30 AM	BCl3 MFC set to  0.000000
12/12/2012	10:21:30 AM	PH3 MFC set to  0.000000
12/12/2012	10:21:30 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:21:30 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:21:31 AM	Tube furnace set to 0
12/12/2012	10:22:01 AM	Helium valve closed
12/12/2012	10:22:01 AM	H2 valve closed
12/12/2012	10:22:01 AM	BCl3 valve closed
12/12/2012	10:22:01 AM	PH3 valve closed
12/12/2012	10:22:01 AM	SiCl4 pre valve closed
12/12/2012	10:22:01 AM	SiCl4 post valve closed
12/12/2012	10:22:01 AM	Bypass valve closed
12/12/2012	10:22:01 AM	Bubbler valve closed
12/12/2012	10:22:01 AM	Main Vac valve opened
12/12/2012	10:22:01 AM	Helium MFC set to  0.000000
12/12/2012	10:22:01 AM	H2 MFC set to  0.000000
12/12/2012	10:22:01 AM	BCl3 MFC set to  0.000000
12/12/2012	10:22:01 AM	PH3 MFC set to  0.000000
12/12/2012	10:22:01 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:22:01 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:22:01 AM	Tube furnace set to 0
12/12/2012	10:22:31 AM	H2 valve closed
12/12/2012	10:22:31 AM	BCl3 valve closed
12/12/2012	10:22:31 AM	PH3 valve closed
12/12/2012	10:22:31 AM	SiCl4 pre valve closed
12/12/2012	10:22:31 AM	SiCl4 post valve closed
12/12/2012	10:22:31 AM	Bypass valve closed
12/12/2012	10:22:31 AM	Bubbler valve closed
12/12/2012	10:22:31 AM	Helium valve opened
12/12/2012	10:22:31 AM	Main Vac valve opened
12/12/2012	10:22:31 AM	Helium MFC set to  20.000000
12/12/2012	10:22:31 AM	H2 MFC set to  0.000000
12/12/2012	10:22:31 AM	BCl3 MFC set to  0.000000
12/12/2012	10:22:31 AM	PH3 MFC set to  0.000000
12/12/2012	10:22:31 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:22:31 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:22:31 AM	Tube furnace set to 0
12/12/2012	10:23:01 AM	Helium valve closed
12/12/2012	10:23:01 AM	H2 valve closed
12/12/2012	10:23:01 AM	BCl3 valve closed
12/12/2012	10:23:01 AM	PH3 valve closed
12/12/2012	10:23:01 AM	SiCl4 pre valve closed
12/12/2012	10:23:01 AM	SiCl4 post valve closed
12/12/2012	10:23:01 AM	Bypass valve closed
12/12/2012	10:23:01 AM	Bubbler valve closed
12/12/2012	10:23:01 AM	Main Vac valve opened
12/12/2012	10:23:01 AM	Helium MFC set to  0.000000
12/12/2012	10:23:01 AM	H2 MFC set to  0.000000
12/12/2012	10:23:01 AM	BCl3 MFC set to  0.000000
12/12/2012	10:23:01 AM	PH3 MFC set to  0.000000
12/12/2012	10:23:01 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:23:01 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:23:01 AM	Tube furnace set to 0
12/12/2012	10:23:31 AM	H2 valve closed
12/12/2012	10:23:31 AM	BCl3 valve closed
12/12/2012	10:23:31 AM	PH3 valve closed
12/12/2012	10:23:31 AM	SiCl4 pre valve closed
12/12/2012	10:23:31 AM	SiCl4 post valve closed
12/12/2012	10:23:31 AM	Bypass valve closed
12/12/2012	10:23:31 AM	Bubbler valve closed
12/12/2012	10:23:31 AM	Helium valve opened
12/12/2012	10:23:31 AM	Main Vac valve opened
12/12/2012	10:23:31 AM	Helium MFC set to  20.000000
12/12/2012	10:23:31 AM	H2 MFC set to  0.000000
12/12/2012	10:23:31 AM	BCl3 MFC set to  0.000000
12/12/2012	10:23:31 AM	PH3 MFC set to  0.000000
12/12/2012	10:23:31 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:23:31 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:23:31 AM	Tube furnace set to 0
12/12/2012	10:24:02 AM	Helium valve closed
12/12/2012	10:24:02 AM	H2 valve closed
12/12/2012	10:24:02 AM	BCl3 valve closed
12/12/2012	10:24:02 AM	PH3 valve closed
12/12/2012	10:24:02 AM	SiCl4 pre valve closed
12/12/2012	10:24:02 AM	SiCl4 post valve closed
12/12/2012	10:24:02 AM	Bypass valve closed
12/12/2012	10:24:02 AM	Bubbler valve closed
12/12/2012	10:24:02 AM	Main Vac valve opened
12/12/2012	10:24:02 AM	Helium MFC set to  0.000000
12/12/2012	10:24:02 AM	H2 MFC set to  0.000000
12/12/2012	10:24:02 AM	BCl3 MFC set to  0.000000
12/12/2012	10:24:02 AM	PH3 MFC set to  0.000000
12/12/2012	10:24:02 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:24:02 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:24:02 AM	Tube furnace set to 0
12/12/2012	10:24:32 AM	H2 valve closed
12/12/2012	10:24:32 AM	BCl3 valve closed
12/12/2012	10:24:32 AM	PH3 valve closed
12/12/2012	10:24:32 AM	SiCl4 pre valve closed
12/12/2012	10:24:32 AM	SiCl4 post valve closed
12/12/2012	10:24:32 AM	Bypass valve closed
12/12/2012	10:24:32 AM	Bubbler valve closed
12/12/2012	10:24:32 AM	Helium valve opened
12/12/2012	10:24:32 AM	Main Vac valve opened
12/12/2012	10:24:32 AM	Helium MFC set to  20.000000
12/12/2012	10:24:32 AM	H2 MFC set to  0.000000
12/12/2012	10:24:32 AM	BCl3 MFC set to  0.000000
12/12/2012	10:24:32 AM	PH3 MFC set to  0.000000
12/12/2012	10:24:32 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:24:32 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:24:32 AM	Tube furnace set to 0
12/12/2012	10:25:02 AM	Helium valve closed
12/12/2012	10:25:02 AM	H2 valve closed
12/12/2012	10:25:02 AM	BCl3 valve closed
12/12/2012	10:25:02 AM	PH3 valve closed
12/12/2012	10:25:02 AM	SiCl4 pre valve closed
12/12/2012	10:25:02 AM	SiCl4 post valve closed
12/12/2012	10:25:02 AM	Bypass valve closed
12/12/2012	10:25:02 AM	Bubbler valve closed
12/12/2012	10:25:02 AM	Main Vac valve opened
12/12/2012	10:25:02 AM	Helium MFC set to  0.000000
12/12/2012	10:25:02 AM	H2 MFC set to  0.000000
12/12/2012	10:25:02 AM	BCl3 MFC set to  0.000000
12/12/2012	10:25:02 AM	PH3 MFC set to  0.000000
12/12/2012	10:25:02 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:25:02 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:25:02 AM	Tube furnace set to 0
12/12/2012	10:25:32 AM	H2 valve closed
12/12/2012	10:25:32 AM	BCl3 valve closed
12/12/2012	10:25:32 AM	PH3 valve closed
12/12/2012	10:25:32 AM	SiCl4 pre valve closed
12/12/2012	10:25:32 AM	SiCl4 post valve closed
12/12/2012	10:25:32 AM	Bypass valve closed
12/12/2012	10:25:32 AM	Bubbler valve closed
12/12/2012	10:25:32 AM	Helium valve opened
12/12/2012	10:25:32 AM	Main Vac valve opened
12/12/2012	10:25:32 AM	Helium MFC set to  20.000000
12/12/2012	10:25:32 AM	H2 MFC set to  0.000000
12/12/2012	10:25:32 AM	BCl3 MFC set to  0.000000
12/12/2012	10:25:32 AM	PH3 MFC set to  0.000000
12/12/2012	10:25:32 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:25:32 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:25:32 AM	Tube furnace set to 0
12/12/2012	10:26:03 AM	Helium valve closed
12/12/2012	10:26:03 AM	H2 valve closed
12/12/2012	10:26:03 AM	BCl3 valve closed
12/12/2012	10:26:03 AM	PH3 valve closed
12/12/2012	10:26:03 AM	SiCl4 pre valve closed
12/12/2012	10:26:03 AM	SiCl4 post valve closed
12/12/2012	10:26:03 AM	Bypass valve closed
12/12/2012	10:26:03 AM	Bubbler valve closed
12/12/2012	10:26:03 AM	Main Vac valve opened
12/12/2012	10:26:03 AM	Helium MFC set to  0.000000
12/12/2012	10:26:03 AM	H2 MFC set to  0.000000
12/12/2012	10:26:03 AM	BCl3 MFC set to  0.000000
12/12/2012	10:26:03 AM	PH3 MFC set to  0.000000
12/12/2012	10:26:03 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:26:03 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:26:03 AM	Tube furnace set to 0
12/12/2012	10:26:33 AM	H2 valve closed
12/12/2012	10:26:33 AM	BCl3 valve closed
12/12/2012	10:26:33 AM	PH3 valve closed
12/12/2012	10:26:33 AM	SiCl4 pre valve closed
12/12/2012	10:26:33 AM	SiCl4 post valve closed
12/12/2012	10:26:33 AM	Bypass valve closed
12/12/2012	10:26:33 AM	Bubbler valve closed
12/12/2012	10:26:33 AM	Helium valve opened
12/12/2012	10:26:33 AM	Main Vac valve opened
12/12/2012	10:26:33 AM	Helium MFC set to  20.000000
12/12/2012	10:26:33 AM	H2 MFC set to  0.000000
12/12/2012	10:26:33 AM	BCl3 MFC set to  0.000000
12/12/2012	10:26:33 AM	PH3 MFC set to  0.000000
12/12/2012	10:26:33 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:26:33 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:26:33 AM	Tube furnace set to 0
12/12/2012	10:27:03 AM	Helium valve closed
12/12/2012	10:27:03 AM	H2 valve closed
12/12/2012	10:27:03 AM	BCl3 valve closed
12/12/2012	10:27:03 AM	PH3 valve closed
12/12/2012	10:27:03 AM	SiCl4 pre valve closed
12/12/2012	10:27:03 AM	SiCl4 post valve closed
12/12/2012	10:27:03 AM	Bypass valve closed
12/12/2012	10:27:03 AM	Bubbler valve closed
12/12/2012	10:27:03 AM	Main Vac valve opened
12/12/2012	10:27:03 AM	Helium MFC set to  0.000000
12/12/2012	10:27:03 AM	H2 MFC set to  0.000000
12/12/2012	10:27:03 AM	BCl3 MFC set to  0.000000
12/12/2012	10:27:03 AM	PH3 MFC set to  0.000000
12/12/2012	10:27:03 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:27:03 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:27:03 AM	Tube furnace set to 0
12/12/2012	10:27:33 AM	H2 valve closed
12/12/2012	10:27:33 AM	BCl3 valve closed
12/12/2012	10:27:33 AM	PH3 valve closed
12/12/2012	10:27:33 AM	SiCl4 pre valve closed
12/12/2012	10:27:33 AM	SiCl4 post valve closed
12/12/2012	10:27:33 AM	Bypass valve closed
12/12/2012	10:27:33 AM	Bubbler valve closed
12/12/2012	10:27:33 AM	Helium valve opened
12/12/2012	10:27:33 AM	Main Vac valve opened
12/12/2012	10:27:33 AM	Helium MFC set to  20.000000
12/12/2012	10:27:33 AM	H2 MFC set to  0.000000
12/12/2012	10:27:33 AM	BCl3 MFC set to  0.000000
12/12/2012	10:27:33 AM	PH3 MFC set to  0.000000
12/12/2012	10:27:33 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:27:33 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:27:33 AM	Tube furnace set to 0
12/12/2012	10:28:03 AM	Helium valve closed
12/12/2012	10:28:03 AM	H2 valve closed
12/12/2012	10:28:03 AM	BCl3 valve closed
12/12/2012	10:28:03 AM	PH3 valve closed
12/12/2012	10:28:04 AM	SiCl4 pre valve closed
12/12/2012	10:28:04 AM	SiCl4 post valve closed
12/12/2012	10:28:04 AM	Bypass valve closed
12/12/2012	10:28:04 AM	Bubbler valve closed
12/12/2012	10:28:04 AM	Main Vac valve opened
12/12/2012	10:28:04 AM	Helium MFC set to  0.000000
12/12/2012	10:28:04 AM	H2 MFC set to  0.000000
12/12/2012	10:28:04 AM	BCl3 MFC set to  0.000000
12/12/2012	10:28:04 AM	PH3 MFC set to  0.000000
12/12/2012	10:28:04 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:28:04 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:28:04 AM	Tube furnace set to 0
12/12/2012	10:28:34 AM	H2 valve closed
12/12/2012	10:28:34 AM	BCl3 valve closed
12/12/2012	10:28:34 AM	PH3 valve closed
12/12/2012	10:28:34 AM	SiCl4 pre valve closed
12/12/2012	10:28:34 AM	SiCl4 post valve closed
12/12/2012	10:28:34 AM	Bypass valve closed
12/12/2012	10:28:34 AM	Bubbler valve closed
12/12/2012	10:28:34 AM	Helium valve opened
12/12/2012	10:28:34 AM	Main Vac valve opened
12/12/2012	10:28:34 AM	Helium MFC set to  20.000000
12/12/2012	10:28:34 AM	H2 MFC set to  0.000000
12/12/2012	10:28:34 AM	BCl3 MFC set to  0.000000
12/12/2012	10:28:34 AM	PH3 MFC set to  0.000000
12/12/2012	10:28:34 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:28:34 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:28:34 AM	Tube furnace set to 0
12/12/2012	10:29:04 AM	Helium valve closed
12/12/2012	10:29:04 AM	H2 valve closed
12/12/2012	10:29:04 AM	BCl3 valve closed
12/12/2012	10:29:04 AM	PH3 valve closed
12/12/2012	10:29:04 AM	SiCl4 pre valve closed
12/12/2012	10:29:04 AM	SiCl4 post valve closed
12/12/2012	10:29:04 AM	Bypass valve closed
12/12/2012	10:29:04 AM	Bubbler valve closed
12/12/2012	10:29:04 AM	Main Vac valve opened
12/12/2012	10:29:04 AM	Helium MFC set to  0.000000
12/12/2012	10:29:04 AM	H2 MFC set to  0.000000
12/12/2012	10:29:04 AM	BCl3 MFC set to  0.000000
12/12/2012	10:29:04 AM	PH3 MFC set to  0.000000
12/12/2012	10:29:04 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:29:04 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:29:04 AM	Tube furnace set to 0
12/12/2012	10:29:34 AM	H2 valve closed
12/12/2012	10:29:34 AM	BCl3 valve closed
12/12/2012	10:29:34 AM	PH3 valve closed
12/12/2012	10:29:34 AM	SiCl4 pre valve closed
12/12/2012	10:29:34 AM	SiCl4 post valve closed
12/12/2012	10:29:34 AM	Bypass valve closed
12/12/2012	10:29:34 AM	Bubbler valve closed
12/12/2012	10:29:34 AM	Helium valve opened
12/12/2012	10:29:34 AM	Main Vac valve opened
12/12/2012	10:29:34 AM	Helium MFC set to  20.000000
12/12/2012	10:29:34 AM	H2 MFC set to  0.000000
12/12/2012	10:29:34 AM	BCl3 MFC set to  0.000000
12/12/2012	10:29:34 AM	PH3 MFC set to  0.000000
12/12/2012	10:29:34 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:29:34 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:29:34 AM	Tube furnace set to 0
12/12/2012	10:30:04 AM	Helium valve closed
12/12/2012	10:30:04 AM	H2 valve closed
12/12/2012	10:30:04 AM	BCl3 valve closed
12/12/2012	10:30:04 AM	PH3 valve closed
12/12/2012	10:30:04 AM	SiCl4 pre valve closed
12/12/2012	10:30:04 AM	SiCl4 post valve closed
12/12/2012	10:30:04 AM	Bypass valve closed
12/12/2012	10:30:04 AM	Bubbler valve closed
12/12/2012	10:30:05 AM	Main Vac valve opened
12/12/2012	10:30:05 AM	Helium MFC set to  0.000000
12/12/2012	10:30:05 AM	H2 MFC set to  0.000000
12/12/2012	10:30:05 AM	BCl3 MFC set to  0.000000
12/12/2012	10:30:05 AM	PH3 MFC set to  0.000000
12/12/2012	10:30:05 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:30:05 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:30:05 AM	Tube furnace set to 200
12/12/2012	10:30:35 AM	H2 valve closed
12/12/2012	10:30:35 AM	BCl3 valve closed
12/12/2012	10:30:35 AM	PH3 valve closed
12/12/2012	10:30:35 AM	SiCl4 pre valve closed
12/12/2012	10:30:35 AM	SiCl4 post valve closed
12/12/2012	10:30:35 AM	Bypass valve closed
12/12/2012	10:30:35 AM	Bubbler valve closed
12/12/2012	10:30:35 AM	Helium valve opened
12/12/2012	10:30:35 AM	Main Vac valve opened
12/12/2012	10:30:35 AM	Helium MFC set to  20.000000
12/12/2012	10:30:35 AM	H2 MFC set to  0.000000
12/12/2012	10:30:35 AM	BCl3 MFC set to  0.000000
12/12/2012	10:30:35 AM	PH3 MFC set to  0.000000
12/12/2012	10:30:35 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:30:35 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:30:35 AM	Tube furnace set to 200
12/12/2012	10:31:05 AM	Helium valve closed
12/12/2012	10:31:05 AM	H2 valve closed
12/12/2012	10:31:05 AM	BCl3 valve closed
12/12/2012	10:31:05 AM	PH3 valve closed
12/12/2012	10:31:05 AM	SiCl4 pre valve closed
12/12/2012	10:31:05 AM	SiCl4 post valve closed
12/12/2012	10:31:05 AM	Bypass valve closed
12/12/2012	10:31:05 AM	Bubbler valve closed
12/12/2012	10:31:05 AM	Main Vac valve opened
12/12/2012	10:31:05 AM	Helium MFC set to  0.000000
12/12/2012	10:31:05 AM	H2 MFC set to  0.000000
12/12/2012	10:31:05 AM	BCl3 MFC set to  0.000000
12/12/2012	10:31:05 AM	PH3 MFC set to  0.000000
12/12/2012	10:31:05 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:31:05 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:31:05 AM	Tube furnace set to 200
12/12/2012	10:31:35 AM	H2 valve closed
12/12/2012	10:31:35 AM	BCl3 valve closed
12/12/2012	10:31:35 AM	PH3 valve closed
12/12/2012	10:31:35 AM	SiCl4 pre valve closed
12/12/2012	10:31:35 AM	SiCl4 post valve closed
12/12/2012	10:31:35 AM	Bypass valve closed
12/12/2012	10:31:35 AM	Bubbler valve closed
12/12/2012	10:31:35 AM	Helium valve opened
12/12/2012	10:31:35 AM	Main Vac valve opened
12/12/2012	10:31:35 AM	Helium MFC set to  20.000000
12/12/2012	10:31:35 AM	H2 MFC set to  0.000000
12/12/2012	10:31:35 AM	BCl3 MFC set to  0.000000
12/12/2012	10:31:35 AM	PH3 MFC set to  0.000000
12/12/2012	10:31:35 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:31:35 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:31:35 AM	Tube furnace set to 200
12/12/2012	10:31:54 AM	Run aborted at 10:31 AM
12/12/2012	10:31:54 AM	Helium valve closed
12/12/2012	10:31:54 AM	H2 valve closed
12/12/2012	10:31:54 AM	BCl3 valve closed
12/12/2012	10:31:54 AM	PH3 valve closed
12/12/2012	10:31:54 AM	SiCl4 pre valve closed
12/12/2012	10:31:54 AM	SiCl4 post valve closed
12/12/2012	10:31:54 AM	Bypass valve closed
12/12/2012	10:31:54 AM	Main Vac valve closed
12/12/2012	10:31:54 AM	Bubbler valve closed
12/12/2012	10:31:54 AM	Helium MFC set to  0.000000
12/12/2012	10:31:54 AM	H2 MFC set to  0.000000
12/12/2012	10:31:54 AM	BCl3 MFC set to  0.000000
12/12/2012	10:31:54 AM	PH3 MFC set to  0.000000
12/12/2012	10:31:54 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:31:55 AM	Tube furnace set to 0
12/12/2012	10:31:58 AM	Main Vac valve opened
12/12/2012	10:32:16 AM	Main Vac valve closed
12/12/2012	10:32:27 AM	Main Vac valve opened
12/12/2012	10:33:20 AM	Helium MFC set to  10.000000
12/12/2012	10:33:21 AM	Helium valve opened
12/12/2012	10:33:24 AM	Helium valve closed
12/12/2012	10:33:27 AM	Helium MFC set to  0.000000
12/12/2012	10:34:13 AM	Recipe started at 10:34 AM
12/12/2012	10:34:13 AM	Helium valve closed
12/12/2012	10:34:13 AM	H2 valve closed
12/12/2012	10:34:13 AM	BCl3 valve closed
12/12/2012	10:34:13 AM	PH3 valve closed
12/12/2012	10:34:13 AM	SiCl4 pre valve closed
12/12/2012	10:34:13 AM	SiCl4 post valve closed
12/12/2012	10:34:13 AM	Main Vac valve closed
12/12/2012	10:34:13 AM	Bypass valve closed
12/12/2012	10:34:13 AM	Bubbler valve closed
12/12/2012	10:34:13 AM	Helium MFC set to  0.000000
12/12/2012	10:34:13 AM	H2 MFC set to  0.000000
12/12/2012	10:34:13 AM	BCl3 MFC set to  0.000000
12/12/2012	10:34:13 AM	PH3 MFC set to  0.000000
12/12/2012	10:34:13 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:34:13 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:34:13 AM	Tube furnace set to 0
12/12/2012	10:34:16 AM	Helium valve closed
12/12/2012	10:34:16 AM	BCl3 valve closed
12/12/2012	10:34:16 AM	PH3 valve closed
12/12/2012	10:34:16 AM	SiCl4 pre valve closed
12/12/2012	10:34:16 AM	SiCl4 post valve closed
12/12/2012	10:34:16 AM	Main Vac valve closed
12/12/2012	10:34:16 AM	Bypass valve closed
12/12/2012	10:34:16 AM	Bubbler valve closed
12/12/2012	10:34:16 AM	H2 valve opened
12/12/2012	10:34:16 AM	Helium MFC set to  0.000000
12/12/2012	10:34:16 AM	H2 MFC set to  500.000000
12/12/2012	10:34:16 AM	BCl3 MFC set to  0.000000
12/12/2012	10:34:16 AM	PH3 MFC set to  0.000000
12/12/2012	10:34:16 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:34:16 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:34:16 AM	Tube furnace set to 0
12/12/2012	10:35:28 AM	Helium valve closed
12/12/2012	10:35:28 AM	BCl3 valve closed
12/12/2012	10:35:28 AM	PH3 valve closed
12/12/2012	10:35:28 AM	SiCl4 pre valve closed
12/12/2012	10:35:28 AM	SiCl4 post valve closed
12/12/2012	10:35:28 AM	Main Vac valve closed
12/12/2012	10:35:28 AM	Bypass valve closed
12/12/2012	10:35:28 AM	H2 valve opened
12/12/2012	10:35:28 AM	Bubbler valve opened
12/12/2012	10:35:28 AM	Helium MFC set to  0.000000
12/12/2012	10:35:28 AM	H2 MFC set to  500.000000
12/12/2012	10:35:28 AM	BCl3 MFC set to  0.000000
12/12/2012	10:35:28 AM	PH3 MFC set to  0.000000
12/12/2012	10:35:28 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:35:28 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:35:28 AM	Tube furnace set to 0
12/12/2012	10:35:29 AM	Helium valve closed
12/12/2012	10:35:29 AM	BCl3 valve closed
12/12/2012	10:35:29 AM	PH3 valve closed
12/12/2012	10:35:29 AM	SiCl4 pre valve closed
12/12/2012	10:35:29 AM	SiCl4 post valve closed
12/12/2012	10:35:29 AM	Main Vac valve closed
12/12/2012	10:35:29 AM	Bypass valve closed
12/12/2012	10:35:29 AM	H2 valve opened
12/12/2012	10:35:29 AM	Bubbler valve opened
12/12/2012	10:35:29 AM	Helium MFC set to  0.000000
12/12/2012	10:35:29 AM	H2 MFC set to  500.000000
12/12/2012	10:35:29 AM	BCl3 MFC set to  0.000000
12/12/2012	10:35:29 AM	PH3 MFC set to  0.000000
12/12/2012	10:35:29 AM	SiCl4 MFC set to  0.000000
12/12/2012	10:35:29 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:35:29 AM	Tube furnace set to 1000
12/12/2012	10:55:29 AM	Helium valve closed
12/12/2012	10:55:29 AM	PH3 valve closed
12/12/2012	10:55:29 AM	Main Vac valve closed
12/12/2012	10:55:29 AM	Bypass valve closed
12/12/2012	10:55:29 AM	H2 valve opened
12/12/2012	10:55:29 AM	BCl3 valve opened
12/12/2012	10:55:29 AM	SiCl4 pre valve opened
12/12/2012	10:55:29 AM	SiCl4 post valve opened
12/12/2012	10:55:29 AM	Bubbler valve opened
12/12/2012	10:55:29 AM	Helium MFC set to  0.000000
12/12/2012	10:55:29 AM	H2 MFC set to  450.000000
12/12/2012	10:55:29 AM	BCl3 MFC set to  20.000000
12/12/2012	10:55:29 AM	PH3 MFC set to  0.000000
12/12/2012	10:55:29 AM	SiCl4 MFC set to  50.000000
12/12/2012	10:55:29 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	10:55:30 AM	Tube furnace set to 1000
12/12/2012	11:00:29 AM	Helium valve closed
12/12/2012	11:00:29 AM	PH3 valve closed
12/12/2012	11:00:29 AM	Main Vac valve closed
12/12/2012	11:00:29 AM	Bypass valve closed
12/12/2012	11:00:30 AM	H2 valve opened
12/12/2012	11:00:30 AM	BCl3 valve opened
12/12/2012	11:00:30 AM	SiCl4 pre valve opened
12/12/2012	11:00:30 AM	SiCl4 post valve opened
12/12/2012	11:00:30 AM	Bubbler valve opened
12/12/2012	11:00:30 AM	Helium MFC set to  0.000000
12/12/2012	11:00:30 AM	H2 MFC set to  450.000000
12/12/2012	11:00:30 AM	BCl3 MFC set to  0.750000
12/12/2012	11:00:30 AM	PH3 MFC set to  0.000000
12/12/2012	11:00:30 AM	SiCl4 MFC set to  50.000000
12/12/2012	11:00:30 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	11:00:30 AM	Tube furnace set to 1000
12/12/2012	11:30:30 AM	Helium valve closed
12/12/2012	11:30:30 AM	BCl3 valve closed
12/12/2012	11:30:30 AM	Main Vac valve closed
12/12/2012	11:30:30 AM	Bypass valve closed
12/12/2012	11:30:30 AM	H2 valve opened
12/12/2012	11:30:30 AM	PH3 valve opened
12/12/2012	11:30:30 AM	SiCl4 pre valve opened
12/12/2012	11:30:30 AM	SiCl4 post valve opened
12/12/2012	11:30:30 AM	Bubbler valve opened
12/12/2012	11:30:30 AM	Helium MFC set to  0.000000
12/12/2012	11:30:30 AM	H2 MFC set to  450.000000
12/12/2012	11:30:30 AM	BCl3 MFC set to  0.000000
12/12/2012	11:30:30 AM	PH3 MFC set to  3.000000
12/12/2012	11:30:30 AM	SiCl4 MFC set to  50.000000
12/12/2012	11:30:30 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	11:30:30 AM	Tube furnace set to 1000
12/12/2012	11:30:50 AM	Helium valve closed
12/12/2012	11:30:50 AM	BCl3 valve closed
12/12/2012	11:30:50 AM	Main Vac valve closed
12/12/2012	11:30:50 AM	Bypass valve closed
12/12/2012	11:30:50 AM	H2 valve opened
12/12/2012	11:30:50 AM	PH3 valve opened
12/12/2012	11:30:50 AM	SiCl4 pre valve opened
12/12/2012	11:30:50 AM	SiCl4 post valve opened
12/12/2012	11:30:50 AM	Bubbler valve opened
12/12/2012	11:30:50 AM	Helium MFC set to  0.000000
12/12/2012	11:30:50 AM	H2 MFC set to  450.000000
12/12/2012	11:30:50 AM	BCl3 MFC set to  0.000000
12/12/2012	11:30:50 AM	PH3 MFC set to  20.000000
12/12/2012	11:30:50 AM	SiCl4 MFC set to  50.000000
12/12/2012	11:30:50 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	11:30:50 AM	Tube furnace set to 1000
12/12/2012	11:31:10 AM	Helium valve closed
12/12/2012	11:31:10 AM	BCl3 valve closed
12/12/2012	11:31:10 AM	PH3 valve closed
12/12/2012	11:31:10 AM	SiCl4 pre valve closed
12/12/2012	11:31:10 AM	SiCl4 post valve closed
12/12/2012	11:31:10 AM	Main Vac valve closed
12/12/2012	11:31:10 AM	Bypass valve closed
12/12/2012	11:31:10 AM	H2 valve opened
12/12/2012	11:31:10 AM	Bubbler valve opened
12/12/2012	11:31:10 AM	Helium MFC set to  0.000000
12/12/2012	11:31:10 AM	H2 MFC set to  500.000000
12/12/2012	11:31:10 AM	BCl3 MFC set to  0.000000
12/12/2012	11:31:10 AM	PH3 MFC set to  0.000000
12/12/2012	11:31:10 AM	SiCl4 MFC set to  0.000000
12/12/2012	11:31:10 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	11:31:10 AM	Tube furnace set to 950
12/12/2012	11:33:10 AM	Helium valve closed
12/12/2012	11:33:10 AM	BCl3 valve closed
12/12/2012	11:33:10 AM	PH3 valve closed
12/12/2012	11:33:10 AM	SiCl4 pre valve closed
12/12/2012	11:33:10 AM	SiCl4 post valve closed
12/12/2012	11:33:10 AM	Main Vac valve closed
12/12/2012	11:33:10 AM	Bypass valve closed
12/12/2012	11:33:10 AM	H2 valve opened
12/12/2012	11:33:10 AM	Bubbler valve opened
12/12/2012	11:33:10 AM	Helium MFC set to  0.000000
12/12/2012	11:33:10 AM	H2 MFC set to  500.000000
12/12/2012	11:33:10 AM	BCl3 MFC set to  0.000000
12/12/2012	11:33:10 AM	PH3 MFC set to  0.000000
12/12/2012	11:33:10 AM	SiCl4 MFC set to  0.000000
12/12/2012	11:33:10 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	11:33:11 AM	Tube furnace set to 900
12/12/2012	11:35:11 AM	Helium valve closed
12/12/2012	11:35:11 AM	BCl3 valve closed
12/12/2012	11:35:11 AM	PH3 valve closed
12/12/2012	11:35:11 AM	SiCl4 pre valve closed
12/12/2012	11:35:11 AM	SiCl4 post valve closed
12/12/2012	11:35:11 AM	Main Vac valve closed
12/12/2012	11:35:11 AM	Bypass valve closed
12/12/2012	11:35:11 AM	H2 valve opened
12/12/2012	11:35:11 AM	Bubbler valve opened
12/12/2012	11:35:11 AM	Helium MFC set to  0.000000
12/12/2012	11:35:11 AM	H2 MFC set to  500.000000
12/12/2012	11:35:11 AM	BCl3 MFC set to  0.000000
12/12/2012	11:35:11 AM	PH3 MFC set to  0.000000
12/12/2012	11:35:11 AM	SiCl4 MFC set to  0.000000
12/12/2012	11:35:11 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	11:35:11 AM	Tube furnace set to 850
12/12/2012	11:37:11 AM	H2 valve closed
12/12/2012	11:37:11 AM	BCl3 valve closed
12/12/2012	11:37:11 AM	PH3 valve closed
12/12/2012	11:37:11 AM	SiCl4 pre valve closed
12/12/2012	11:37:11 AM	SiCl4 post valve closed
12/12/2012	11:37:11 AM	Main Vac valve closed
12/12/2012	11:37:11 AM	Bypass valve closed
12/12/2012	11:37:11 AM	Helium valve opened
12/12/2012	11:37:11 AM	Bubbler valve opened
12/12/2012	11:37:11 AM	Helium MFC set to  500.000000
12/12/2012	11:37:11 AM	H2 MFC set to  0.000000
12/12/2012	11:37:11 AM	BCl3 MFC set to  0.000000
12/12/2012	11:37:11 AM	PH3 MFC set to  0.000000
12/12/2012	11:37:11 AM	SiCl4 MFC set to  0.000000
12/12/2012	11:37:11 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	11:37:11 AM	Tube furnace set to 800
12/12/2012	11:39:11 AM	H2 valve closed
12/12/2012	11:39:11 AM	BCl3 valve closed
12/12/2012	11:39:11 AM	PH3 valve closed
12/12/2012	11:39:11 AM	SiCl4 pre valve closed
12/12/2012	11:39:11 AM	SiCl4 post valve closed
12/12/2012	11:39:11 AM	Main Vac valve closed
12/12/2012	11:39:11 AM	Bypass valve closed
12/12/2012	11:39:11 AM	Helium valve opened
12/12/2012	11:39:11 AM	Bubbler valve opened
12/12/2012	11:39:11 AM	Helium MFC set to  500.000000
12/12/2012	11:39:11 AM	H2 MFC set to  0.000000
12/12/2012	11:39:11 AM	BCl3 MFC set to  0.000000
12/12/2012	11:39:11 AM	PH3 MFC set to  0.000000
12/12/2012	11:39:11 AM	SiCl4 MFC set to  0.000000
12/12/2012	11:39:11 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	11:39:11 AM	Tube furnace set to 750
12/12/2012	11:41:11 AM	H2 valve closed
12/12/2012	11:41:11 AM	BCl3 valve closed
12/12/2012	11:41:11 AM	PH3 valve closed
12/12/2012	11:41:11 AM	SiCl4 pre valve closed
12/12/2012	11:41:11 AM	SiCl4 post valve closed
12/12/2012	11:41:11 AM	Main Vac valve closed
12/12/2012	11:41:11 AM	Bypass valve closed
12/12/2012	11:41:11 AM	Helium valve opened
12/12/2012	11:41:11 AM	Bubbler valve opened
12/12/2012	11:41:11 AM	Helium MFC set to  500.000000
12/12/2012	11:41:11 AM	H2 MFC set to  0.000000
12/12/2012	11:41:11 AM	BCl3 MFC set to  0.000000
12/12/2012	11:41:11 AM	PH3 MFC set to  0.000000
12/12/2012	11:41:11 AM	SiCl4 MFC set to  0.000000
12/12/2012	11:41:11 AM	Bypass solenoid MFC set to  0.000000
12/12/2012	11:41:12 AM	Tube furnace set to 0
12/12/2012	12:01:12 PM	Helium valve closed
12/12/2012	12:01:12 PM	H2 valve closed
12/12/2012	12:01:12 PM	BCl3 valve closed
12/12/2012	12:01:12 PM	PH3 valve closed
12/12/2012	12:01:12 PM	SiCl4 pre valve closed
12/12/2012	12:01:12 PM	SiCl4 post valve closed
12/12/2012	12:01:12 PM	Main Vac valve closed
12/12/2012	12:01:12 PM	Bypass valve closed
12/12/2012	12:01:12 PM	Bubbler valve closed
12/12/2012	12:01:12 PM	Helium MFC set to  0.000000
12/12/2012	12:01:12 PM	H2 MFC set to  0.000000
12/12/2012	12:01:12 PM	BCl3 MFC set to  0.000000
12/12/2012	12:01:12 PM	PH3 MFC set to  0.000000
12/12/2012	12:01:12 PM	SiCl4 MFC set to  0.000000
12/12/2012	12:01:12 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	12:01:12 PM	Tube furnace set to 0
12/12/2012	12:01:13 PM	Helium valve closed
12/12/2012	12:01:13 PM	H2 valve closed
12/12/2012	12:01:13 PM	BCl3 valve closed
12/12/2012	12:01:13 PM	PH3 valve closed
12/12/2012	12:01:13 PM	SiCl4 pre valve closed
12/12/2012	12:01:13 PM	SiCl4 post valve closed
12/12/2012	12:01:13 PM	Main Vac valve closed
12/12/2012	12:01:13 PM	Bubbler valve closed
12/12/2012	12:01:13 PM	Bypass valve opened
12/12/2012	12:01:13 PM	Helium MFC set to  0.000000
12/12/2012	12:01:13 PM	H2 MFC set to  0.000000
12/12/2012	12:01:13 PM	BCl3 MFC set to  0.000000
12/12/2012	12:01:13 PM	PH3 MFC set to  0.000000
12/12/2012	12:01:13 PM	SiCl4 MFC set to  0.000000
12/12/2012	12:01:13 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	12:01:13 PM	Tube furnace set to 0
12/12/2012	12:02:10 PM	Helium valve closed
12/12/2012	12:02:10 PM	H2 valve closed
12/12/2012	12:02:10 PM	BCl3 valve closed
12/12/2012	12:02:10 PM	PH3 valve closed
12/12/2012	12:02:10 PM	SiCl4 pre valve closed
12/12/2012	12:02:10 PM	SiCl4 post valve closed
12/12/2012	12:02:10 PM	Main Vac valve closed
12/12/2012	12:02:10 PM	Bubbler valve closed
12/12/2012	12:02:10 PM	Bypass valve opened
12/12/2012	12:02:10 PM	Helium MFC set to  0.000000
12/12/2012	12:02:10 PM	H2 MFC set to  0.000000
12/12/2012	12:02:10 PM	BCl3 MFC set to  0.000000
12/12/2012	12:02:10 PM	PH3 MFC set to  0.000000
12/12/2012	12:02:10 PM	SiCl4 MFC set to  0.000000
12/12/2012	12:02:10 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	12:02:10 PM	Tube furnace set to 0
12/12/2012	12:03:10 PM	Helium valve closed
12/12/2012	12:03:10 PM	H2 valve closed
12/12/2012	12:03:10 PM	BCl3 valve closed
12/12/2012	12:03:10 PM	PH3 valve closed
12/12/2012	12:03:10 PM	SiCl4 pre valve closed
12/12/2012	12:03:10 PM	SiCl4 post valve closed
12/12/2012	12:03:10 PM	Bypass valve closed
12/12/2012	12:03:10 PM	Bubbler valve closed
12/12/2012	12:03:10 PM	Main Vac valve opened
12/12/2012	12:03:10 PM	Helium MFC set to  0.000000
12/12/2012	12:03:10 PM	H2 MFC set to  0.000000
12/12/2012	12:03:10 PM	BCl3 MFC set to  0.000000
12/12/2012	12:03:10 PM	PH3 MFC set to  0.000000
12/12/2012	12:03:10 PM	SiCl4 MFC set to  0.000000
12/12/2012	12:03:10 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	12:03:11 PM	Tube furnace set to 0
12/12/2012	12:03:12 PM	Run finished at 12:03 PM
12/12/2012	12:47:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/12/2012	12:47:07 PM	Recipe started at 12:47 PM
12/12/2012	12:47:07 PM	Helium valve closed
12/12/2012	12:47:07 PM	H2 valve closed
12/12/2012	12:47:07 PM	BCl3 valve closed
12/12/2012	12:47:07 PM	PH3 valve closed
12/12/2012	12:47:07 PM	SiCl4 pre valve closed
12/12/2012	12:47:07 PM	SiCl4 post valve closed
12/12/2012	12:47:07 PM	Main Vac valve closed
12/12/2012	12:47:07 PM	Bypass valve closed
12/12/2012	12:47:07 PM	Bubbler valve closed
12/12/2012	12:47:07 PM	Helium MFC set to  0.000000
12/12/2012	12:47:07 PM	H2 MFC set to  0.000000
12/12/2012	12:47:07 PM	BCl3 MFC set to  0.000000
12/12/2012	12:47:07 PM	PH3 MFC set to  0.000000
12/12/2012	12:47:07 PM	SiCl4 MFC set to  0.000000
12/12/2012	12:47:07 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	12:47:07 PM	Tube furnace set to 0
12/12/2012	12:47:10 PM	H2 valve closed
12/12/2012	12:47:10 PM	BCl3 valve closed
12/12/2012	12:47:10 PM	PH3 valve closed
12/12/2012	12:47:10 PM	SiCl4 pre valve closed
12/12/2012	12:47:10 PM	SiCl4 post valve closed
12/12/2012	12:47:10 PM	Main Vac valve closed
12/12/2012	12:47:10 PM	Bypass valve closed
12/12/2012	12:47:10 PM	Bubbler valve closed
12/12/2012	12:47:10 PM	Helium valve opened
12/12/2012	12:47:10 PM	Helium MFC set to  500.000000
12/12/2012	12:47:10 PM	H2 MFC set to  0.000000
12/12/2012	12:47:10 PM	BCl3 MFC set to  0.000000
12/12/2012	12:47:10 PM	PH3 MFC set to  0.000000
12/12/2012	12:47:10 PM	SiCl4 MFC set to  0.000000
12/12/2012	12:47:10 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	12:47:10 PM	Tube furnace set to 0
12/12/2012	12:48:20 PM	Helium valve closed
12/12/2012	12:48:20 PM	H2 valve closed
12/12/2012	12:48:20 PM	BCl3 valve closed
12/12/2012	12:48:20 PM	PH3 valve closed
12/12/2012	12:48:20 PM	SiCl4 pre valve closed
12/12/2012	12:48:20 PM	SiCl4 post valve closed
12/12/2012	12:48:20 PM	Main Vac valve closed
12/12/2012	12:48:20 PM	Bypass valve closed
12/12/2012	12:48:20 PM	Bubbler valve closed
12/12/2012	12:48:20 PM	Helium MFC set to  0.000000
12/12/2012	12:48:20 PM	H2 MFC set to  0.000000
12/12/2012	12:48:20 PM	BCl3 MFC set to  0.000000
12/12/2012	12:48:20 PM	PH3 MFC set to  0.000000
12/12/2012	12:48:20 PM	SiCl4 MFC set to  0.000000
12/12/2012	12:48:20 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	12:48:20 PM	Tube furnace set to 0
12/12/2012	12:48:21 PM	Run finished at 12:48 PM
12/12/2012	12:48:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/12/2012	12:57:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/12/2012	12:57:27 PM	Recipe started at 12:57 PM
12/12/2012	12:57:27 PM	Helium valve closed
12/12/2012	12:57:27 PM	H2 valve closed
12/12/2012	12:57:27 PM	BCl3 valve closed
12/12/2012	12:57:27 PM	PH3 valve closed
12/12/2012	12:57:27 PM	SiCl4 pre valve closed
12/12/2012	12:57:27 PM	SiCl4 post valve closed
12/12/2012	12:57:27 PM	Main Vac valve closed
12/12/2012	12:57:27 PM	Bubbler valve closed
12/12/2012	12:57:27 PM	Bypass valve opened
12/12/2012	12:57:27 PM	Helium MFC set to  0.000000
12/12/2012	12:57:27 PM	H2 MFC set to  0.000000
12/12/2012	12:57:27 PM	BCl3 MFC set to  0.000000
12/12/2012	12:57:27 PM	PH3 MFC set to  0.000000
12/12/2012	12:57:27 PM	SiCl4 MFC set to  0.000000
12/12/2012	12:57:27 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	12:57:27 PM	Tube furnace set to 0
12/12/2012	12:58:54 PM	Helium valve closed
12/12/2012	12:58:54 PM	H2 valve closed
12/12/2012	12:58:54 PM	BCl3 valve closed
12/12/2012	12:58:54 PM	PH3 valve closed
12/12/2012	12:58:54 PM	SiCl4 pre valve closed
12/12/2012	12:58:54 PM	SiCl4 post valve closed
12/12/2012	12:58:54 PM	Main Vac valve closed
12/12/2012	12:58:54 PM	Bubbler valve closed
12/12/2012	12:58:54 PM	Bypass valve opened
12/12/2012	12:58:54 PM	Helium MFC set to  0.000000
12/12/2012	12:58:54 PM	H2 MFC set to  0.000000
12/12/2012	12:58:54 PM	BCl3 MFC set to  0.000000
12/12/2012	12:58:54 PM	PH3 MFC set to  0.000000
12/12/2012	12:58:54 PM	SiCl4 MFC set to  0.000000
12/12/2012	12:58:54 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	12:58:54 PM	Tube furnace set to 0
12/12/2012	12:59:54 PM	Helium valve closed
12/12/2012	12:59:54 PM	H2 valve closed
12/12/2012	12:59:54 PM	BCl3 valve closed
12/12/2012	12:59:54 PM	PH3 valve closed
12/12/2012	12:59:54 PM	SiCl4 pre valve closed
12/12/2012	12:59:54 PM	SiCl4 post valve closed
12/12/2012	12:59:54 PM	Bypass valve closed
12/12/2012	12:59:54 PM	Bubbler valve closed
12/12/2012	12:59:54 PM	Main Vac valve opened
12/12/2012	12:59:54 PM	Helium MFC set to  0.000000
12/12/2012	12:59:54 PM	H2 MFC set to  0.000000
12/12/2012	12:59:54 PM	BCl3 MFC set to  0.000000
12/12/2012	12:59:54 PM	PH3 MFC set to  0.000000
12/12/2012	12:59:54 PM	SiCl4 MFC set to  0.000000
12/12/2012	12:59:54 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	12:59:54 PM	Tube furnace set to 0
12/12/2012	12:59:55 PM	Run finished at 12:59 PM
12/12/2012	12:59:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/12/2012	1:00:30 PM	Tube furnace set to 150
12/12/2012	1:31:02 PM	Recipe started at 1:30 PM
12/12/2012	1:31:02 PM	Helium valve closed
12/12/2012	1:31:02 PM	H2 valve closed
12/12/2012	1:31:02 PM	BCl3 valve closed
12/12/2012	1:31:02 PM	PH3 valve closed
12/12/2012	1:31:02 PM	SiCl4 pre valve closed
12/12/2012	1:31:02 PM	SiCl4 post valve closed
12/12/2012	1:31:02 PM	Bypass valve closed
12/12/2012	1:31:02 PM	Bubbler valve closed
12/12/2012	1:31:02 PM	Main Vac valve opened
12/12/2012	1:31:02 PM	Helium MFC set to  0.000000
12/12/2012	1:31:02 PM	H2 MFC set to  0.000000
12/12/2012	1:31:02 PM	BCl3 MFC set to  0.000000
12/12/2012	1:31:02 PM	PH3 MFC set to  0.000000
12/12/2012	1:31:02 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:31:02 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:31:02 PM	Tube furnace set to 0
12/12/2012	1:31:32 PM	H2 valve closed
12/12/2012	1:31:32 PM	BCl3 valve closed
12/12/2012	1:31:32 PM	PH3 valve closed
12/12/2012	1:31:32 PM	SiCl4 pre valve closed
12/12/2012	1:31:32 PM	SiCl4 post valve closed
12/12/2012	1:31:32 PM	Bypass valve closed
12/12/2012	1:31:32 PM	Bubbler valve closed
12/12/2012	1:31:32 PM	Helium valve opened
12/12/2012	1:31:32 PM	Main Vac valve opened
12/12/2012	1:31:32 PM	Helium MFC set to  20.000000
12/12/2012	1:31:32 PM	H2 MFC set to  0.000000
12/12/2012	1:31:32 PM	BCl3 MFC set to  0.000000
12/12/2012	1:31:32 PM	PH3 MFC set to  0.000000
12/12/2012	1:31:32 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:31:32 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:31:33 PM	Tube furnace set to 0
12/12/2012	1:32:03 PM	Helium valve closed
12/12/2012	1:32:03 PM	H2 valve closed
12/12/2012	1:32:03 PM	BCl3 valve closed
12/12/2012	1:32:03 PM	PH3 valve closed
12/12/2012	1:32:03 PM	SiCl4 pre valve closed
12/12/2012	1:32:03 PM	SiCl4 post valve closed
12/12/2012	1:32:03 PM	Bypass valve closed
12/12/2012	1:32:03 PM	Bubbler valve closed
12/12/2012	1:32:03 PM	Main Vac valve opened
12/12/2012	1:32:03 PM	Helium MFC set to  0.000000
12/12/2012	1:32:03 PM	H2 MFC set to  0.000000
12/12/2012	1:32:03 PM	BCl3 MFC set to  0.000000
12/12/2012	1:32:03 PM	PH3 MFC set to  0.000000
12/12/2012	1:32:03 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:32:03 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:32:03 PM	Tube furnace set to 0
12/12/2012	1:32:33 PM	H2 valve closed
12/12/2012	1:32:33 PM	BCl3 valve closed
12/12/2012	1:32:33 PM	PH3 valve closed
12/12/2012	1:32:33 PM	SiCl4 pre valve closed
12/12/2012	1:32:33 PM	SiCl4 post valve closed
12/12/2012	1:32:33 PM	Bypass valve closed
12/12/2012	1:32:33 PM	Bubbler valve closed
12/12/2012	1:32:33 PM	Helium valve opened
12/12/2012	1:32:33 PM	Main Vac valve opened
12/12/2012	1:32:33 PM	Helium MFC set to  20.000000
12/12/2012	1:32:33 PM	H2 MFC set to  0.000000
12/12/2012	1:32:33 PM	BCl3 MFC set to  0.000000
12/12/2012	1:32:33 PM	PH3 MFC set to  0.000000
12/12/2012	1:32:33 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:32:33 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:32:33 PM	Tube furnace set to 0
12/12/2012	1:33:03 PM	Helium valve closed
12/12/2012	1:33:03 PM	H2 valve closed
12/12/2012	1:33:03 PM	BCl3 valve closed
12/12/2012	1:33:03 PM	PH3 valve closed
12/12/2012	1:33:03 PM	SiCl4 pre valve closed
12/12/2012	1:33:03 PM	SiCl4 post valve closed
12/12/2012	1:33:03 PM	Bypass valve closed
12/12/2012	1:33:03 PM	Bubbler valve closed
12/12/2012	1:33:03 PM	Main Vac valve opened
12/12/2012	1:33:03 PM	Helium MFC set to  0.000000
12/12/2012	1:33:03 PM	H2 MFC set to  0.000000
12/12/2012	1:33:03 PM	BCl3 MFC set to  0.000000
12/12/2012	1:33:03 PM	PH3 MFC set to  0.000000
12/12/2012	1:33:03 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:33:03 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:33:03 PM	Tube furnace set to 0
12/12/2012	1:33:33 PM	H2 valve closed
12/12/2012	1:33:33 PM	BCl3 valve closed
12/12/2012	1:33:33 PM	PH3 valve closed
12/12/2012	1:33:33 PM	SiCl4 pre valve closed
12/12/2012	1:33:33 PM	SiCl4 post valve closed
12/12/2012	1:33:33 PM	Bypass valve closed
12/12/2012	1:33:33 PM	Bubbler valve closed
12/12/2012	1:33:33 PM	Helium valve opened
12/12/2012	1:33:33 PM	Main Vac valve opened
12/12/2012	1:33:33 PM	Helium MFC set to  20.000000
12/12/2012	1:33:33 PM	H2 MFC set to  0.000000
12/12/2012	1:33:33 PM	BCl3 MFC set to  0.000000
12/12/2012	1:33:33 PM	PH3 MFC set to  0.000000
12/12/2012	1:33:33 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:33:33 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:33:34 PM	Tube furnace set to 0
12/12/2012	1:34:04 PM	Helium valve closed
12/12/2012	1:34:04 PM	H2 valve closed
12/12/2012	1:34:04 PM	BCl3 valve closed
12/12/2012	1:34:04 PM	PH3 valve closed
12/12/2012	1:34:04 PM	SiCl4 pre valve closed
12/12/2012	1:34:04 PM	SiCl4 post valve closed
12/12/2012	1:34:04 PM	Bypass valve closed
12/12/2012	1:34:04 PM	Bubbler valve closed
12/12/2012	1:34:04 PM	Main Vac valve opened
12/12/2012	1:34:04 PM	Helium MFC set to  0.000000
12/12/2012	1:34:04 PM	H2 MFC set to  0.000000
12/12/2012	1:34:04 PM	BCl3 MFC set to  0.000000
12/12/2012	1:34:04 PM	PH3 MFC set to  0.000000
12/12/2012	1:34:04 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:34:04 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:34:04 PM	Tube furnace set to 0
12/12/2012	1:34:34 PM	H2 valve closed
12/12/2012	1:34:34 PM	BCl3 valve closed
12/12/2012	1:34:34 PM	PH3 valve closed
12/12/2012	1:34:34 PM	SiCl4 pre valve closed
12/12/2012	1:34:34 PM	SiCl4 post valve closed
12/12/2012	1:34:34 PM	Bypass valve closed
12/12/2012	1:34:34 PM	Bubbler valve closed
12/12/2012	1:34:34 PM	Helium valve opened
12/12/2012	1:34:34 PM	Main Vac valve opened
12/12/2012	1:34:34 PM	Helium MFC set to  20.000000
12/12/2012	1:34:34 PM	H2 MFC set to  0.000000
12/12/2012	1:34:34 PM	BCl3 MFC set to  0.000000
12/12/2012	1:34:34 PM	PH3 MFC set to  0.000000
12/12/2012	1:34:34 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:34:34 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:34:34 PM	Tube furnace set to 0
12/12/2012	1:35:04 PM	Helium valve closed
12/12/2012	1:35:04 PM	H2 valve closed
12/12/2012	1:35:04 PM	BCl3 valve closed
12/12/2012	1:35:04 PM	PH3 valve closed
12/12/2012	1:35:04 PM	SiCl4 pre valve closed
12/12/2012	1:35:04 PM	SiCl4 post valve closed
12/12/2012	1:35:04 PM	Bypass valve closed
12/12/2012	1:35:04 PM	Bubbler valve closed
12/12/2012	1:35:04 PM	Main Vac valve opened
12/12/2012	1:35:04 PM	Helium MFC set to  0.000000
12/12/2012	1:35:04 PM	H2 MFC set to  0.000000
12/12/2012	1:35:04 PM	BCl3 MFC set to  0.000000
12/12/2012	1:35:04 PM	PH3 MFC set to  0.000000
12/12/2012	1:35:04 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:35:04 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:35:04 PM	Tube furnace set to 0
12/12/2012	1:35:34 PM	H2 valve closed
12/12/2012	1:35:34 PM	BCl3 valve closed
12/12/2012	1:35:34 PM	PH3 valve closed
12/12/2012	1:35:34 PM	SiCl4 pre valve closed
12/12/2012	1:35:34 PM	SiCl4 post valve closed
12/12/2012	1:35:34 PM	Bypass valve closed
12/12/2012	1:35:34 PM	Bubbler valve closed
12/12/2012	1:35:34 PM	Helium valve opened
12/12/2012	1:35:34 PM	Main Vac valve opened
12/12/2012	1:35:34 PM	Helium MFC set to  20.000000
12/12/2012	1:35:34 PM	H2 MFC set to  0.000000
12/12/2012	1:35:34 PM	BCl3 MFC set to  0.000000
12/12/2012	1:35:34 PM	PH3 MFC set to  0.000000
12/12/2012	1:35:34 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:35:34 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:35:35 PM	Tube furnace set to 0
12/12/2012	1:36:05 PM	Helium valve closed
12/12/2012	1:36:05 PM	H2 valve closed
12/12/2012	1:36:05 PM	BCl3 valve closed
12/12/2012	1:36:05 PM	PH3 valve closed
12/12/2012	1:36:05 PM	SiCl4 pre valve closed
12/12/2012	1:36:05 PM	SiCl4 post valve closed
12/12/2012	1:36:05 PM	Bypass valve closed
12/12/2012	1:36:05 PM	Bubbler valve closed
12/12/2012	1:36:05 PM	Main Vac valve opened
12/12/2012	1:36:05 PM	Helium MFC set to  0.000000
12/12/2012	1:36:05 PM	H2 MFC set to  0.000000
12/12/2012	1:36:05 PM	BCl3 MFC set to  0.000000
12/12/2012	1:36:05 PM	PH3 MFC set to  0.000000
12/12/2012	1:36:05 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:36:05 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:36:05 PM	Tube furnace set to 0
12/12/2012	1:36:35 PM	H2 valve closed
12/12/2012	1:36:35 PM	BCl3 valve closed
12/12/2012	1:36:35 PM	PH3 valve closed
12/12/2012	1:36:35 PM	SiCl4 pre valve closed
12/12/2012	1:36:35 PM	SiCl4 post valve closed
12/12/2012	1:36:35 PM	Bypass valve closed
12/12/2012	1:36:35 PM	Bubbler valve closed
12/12/2012	1:36:35 PM	Helium valve opened
12/12/2012	1:36:35 PM	Main Vac valve opened
12/12/2012	1:36:35 PM	Helium MFC set to  20.000000
12/12/2012	1:36:35 PM	H2 MFC set to  0.000000
12/12/2012	1:36:35 PM	BCl3 MFC set to  0.000000
12/12/2012	1:36:35 PM	PH3 MFC set to  0.000000
12/12/2012	1:36:35 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:36:35 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:36:35 PM	Tube furnace set to 0
12/12/2012	1:37:05 PM	Helium valve closed
12/12/2012	1:37:05 PM	H2 valve closed
12/12/2012	1:37:05 PM	BCl3 valve closed
12/12/2012	1:37:05 PM	PH3 valve closed
12/12/2012	1:37:05 PM	SiCl4 pre valve closed
12/12/2012	1:37:05 PM	SiCl4 post valve closed
12/12/2012	1:37:05 PM	Bypass valve closed
12/12/2012	1:37:05 PM	Bubbler valve closed
12/12/2012	1:37:05 PM	Main Vac valve opened
12/12/2012	1:37:05 PM	Helium MFC set to  0.000000
12/12/2012	1:37:05 PM	H2 MFC set to  0.000000
12/12/2012	1:37:05 PM	BCl3 MFC set to  0.000000
12/12/2012	1:37:05 PM	PH3 MFC set to  0.000000
12/12/2012	1:37:05 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:37:05 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:37:05 PM	Tube furnace set to 0
12/12/2012	1:37:35 PM	H2 valve closed
12/12/2012	1:37:35 PM	BCl3 valve closed
12/12/2012	1:37:35 PM	PH3 valve closed
12/12/2012	1:37:35 PM	SiCl4 pre valve closed
12/12/2012	1:37:35 PM	SiCl4 post valve closed
12/12/2012	1:37:35 PM	Bypass valve closed
12/12/2012	1:37:35 PM	Bubbler valve closed
12/12/2012	1:37:35 PM	Helium valve opened
12/12/2012	1:37:35 PM	Main Vac valve opened
12/12/2012	1:37:35 PM	Helium MFC set to  20.000000
12/12/2012	1:37:35 PM	H2 MFC set to  0.000000
12/12/2012	1:37:35 PM	BCl3 MFC set to  0.000000
12/12/2012	1:37:35 PM	PH3 MFC set to  0.000000
12/12/2012	1:37:35 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:37:35 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:37:36 PM	Tube furnace set to 0
12/12/2012	1:38:06 PM	Helium valve closed
12/12/2012	1:38:06 PM	H2 valve closed
12/12/2012	1:38:06 PM	BCl3 valve closed
12/12/2012	1:38:06 PM	PH3 valve closed
12/12/2012	1:38:06 PM	SiCl4 pre valve closed
12/12/2012	1:38:06 PM	SiCl4 post valve closed
12/12/2012	1:38:06 PM	Bypass valve closed
12/12/2012	1:38:06 PM	Bubbler valve closed
12/12/2012	1:38:06 PM	Main Vac valve opened
12/12/2012	1:38:06 PM	Helium MFC set to  0.000000
12/12/2012	1:38:06 PM	H2 MFC set to  0.000000
12/12/2012	1:38:06 PM	BCl3 MFC set to  0.000000
12/12/2012	1:38:06 PM	PH3 MFC set to  0.000000
12/12/2012	1:38:06 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:38:06 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:38:06 PM	Tube furnace set to 0
12/12/2012	1:38:36 PM	H2 valve closed
12/12/2012	1:38:36 PM	BCl3 valve closed
12/12/2012	1:38:36 PM	PH3 valve closed
12/12/2012	1:38:36 PM	SiCl4 pre valve closed
12/12/2012	1:38:36 PM	SiCl4 post valve closed
12/12/2012	1:38:36 PM	Bypass valve closed
12/12/2012	1:38:36 PM	Bubbler valve closed
12/12/2012	1:38:36 PM	Helium valve opened
12/12/2012	1:38:36 PM	Main Vac valve opened
12/12/2012	1:38:36 PM	Helium MFC set to  20.000000
12/12/2012	1:38:36 PM	H2 MFC set to  0.000000
12/12/2012	1:38:36 PM	BCl3 MFC set to  0.000000
12/12/2012	1:38:36 PM	PH3 MFC set to  0.000000
12/12/2012	1:38:36 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:38:36 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:38:36 PM	Tube furnace set to 0
12/12/2012	1:39:06 PM	Helium valve closed
12/12/2012	1:39:06 PM	H2 valve closed
12/12/2012	1:39:06 PM	BCl3 valve closed
12/12/2012	1:39:06 PM	PH3 valve closed
12/12/2012	1:39:06 PM	SiCl4 pre valve closed
12/12/2012	1:39:06 PM	SiCl4 post valve closed
12/12/2012	1:39:06 PM	Bypass valve closed
12/12/2012	1:39:06 PM	Bubbler valve closed
12/12/2012	1:39:06 PM	Main Vac valve opened
12/12/2012	1:39:06 PM	Helium MFC set to  0.000000
12/12/2012	1:39:06 PM	H2 MFC set to  0.000000
12/12/2012	1:39:06 PM	BCl3 MFC set to  0.000000
12/12/2012	1:39:06 PM	PH3 MFC set to  0.000000
12/12/2012	1:39:06 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:39:06 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:39:06 PM	Tube furnace set to 0
12/12/2012	1:39:36 PM	H2 valve closed
12/12/2012	1:39:36 PM	BCl3 valve closed
12/12/2012	1:39:36 PM	PH3 valve closed
12/12/2012	1:39:36 PM	SiCl4 pre valve closed
12/12/2012	1:39:36 PM	SiCl4 post valve closed
12/12/2012	1:39:36 PM	Bypass valve closed
12/12/2012	1:39:36 PM	Bubbler valve closed
12/12/2012	1:39:36 PM	Helium valve opened
12/12/2012	1:39:36 PM	Main Vac valve opened
12/12/2012	1:39:36 PM	Helium MFC set to  20.000000
12/12/2012	1:39:36 PM	H2 MFC set to  0.000000
12/12/2012	1:39:36 PM	BCl3 MFC set to  0.000000
12/12/2012	1:39:36 PM	PH3 MFC set to  0.000000
12/12/2012	1:39:36 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:39:36 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:39:37 PM	Tube furnace set to 0
12/12/2012	1:40:07 PM	Helium valve closed
12/12/2012	1:40:07 PM	H2 valve closed
12/12/2012	1:40:07 PM	BCl3 valve closed
12/12/2012	1:40:07 PM	PH3 valve closed
12/12/2012	1:40:07 PM	SiCl4 pre valve closed
12/12/2012	1:40:07 PM	SiCl4 post valve closed
12/12/2012	1:40:07 PM	Bypass valve closed
12/12/2012	1:40:07 PM	Bubbler valve closed
12/12/2012	1:40:07 PM	Main Vac valve opened
12/12/2012	1:40:07 PM	Helium MFC set to  0.000000
12/12/2012	1:40:07 PM	H2 MFC set to  0.000000
12/12/2012	1:40:07 PM	BCl3 MFC set to  0.000000
12/12/2012	1:40:07 PM	PH3 MFC set to  0.000000
12/12/2012	1:40:07 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:40:07 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:40:07 PM	Tube furnace set to 200
12/12/2012	1:40:37 PM	H2 valve closed
12/12/2012	1:40:37 PM	BCl3 valve closed
12/12/2012	1:40:37 PM	PH3 valve closed
12/12/2012	1:40:37 PM	SiCl4 pre valve closed
12/12/2012	1:40:37 PM	SiCl4 post valve closed
12/12/2012	1:40:37 PM	Bypass valve closed
12/12/2012	1:40:37 PM	Bubbler valve closed
12/12/2012	1:40:37 PM	Helium valve opened
12/12/2012	1:40:37 PM	Main Vac valve opened
12/12/2012	1:40:37 PM	Helium MFC set to  20.000000
12/12/2012	1:40:37 PM	H2 MFC set to  0.000000
12/12/2012	1:40:37 PM	BCl3 MFC set to  0.000000
12/12/2012	1:40:37 PM	PH3 MFC set to  0.000000
12/12/2012	1:40:37 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:40:37 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:40:37 PM	Tube furnace set to 200
12/12/2012	1:41:07 PM	Helium valve closed
12/12/2012	1:41:07 PM	H2 valve closed
12/12/2012	1:41:07 PM	BCl3 valve closed
12/12/2012	1:41:07 PM	PH3 valve closed
12/12/2012	1:41:07 PM	SiCl4 pre valve closed
12/12/2012	1:41:07 PM	SiCl4 post valve closed
12/12/2012	1:41:07 PM	Bypass valve closed
12/12/2012	1:41:07 PM	Bubbler valve closed
12/12/2012	1:41:07 PM	Main Vac valve opened
12/12/2012	1:41:07 PM	Helium MFC set to  0.000000
12/12/2012	1:41:07 PM	H2 MFC set to  0.000000
12/12/2012	1:41:07 PM	BCl3 MFC set to  0.000000
12/12/2012	1:41:07 PM	PH3 MFC set to  0.000000
12/12/2012	1:41:07 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:41:07 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:41:07 PM	Tube furnace set to 200
12/12/2012	1:41:37 PM	H2 valve closed
12/12/2012	1:41:37 PM	BCl3 valve closed
12/12/2012	1:41:37 PM	PH3 valve closed
12/12/2012	1:41:37 PM	SiCl4 pre valve closed
12/12/2012	1:41:37 PM	SiCl4 post valve closed
12/12/2012	1:41:37 PM	Bypass valve closed
12/12/2012	1:41:37 PM	Bubbler valve closed
12/12/2012	1:41:37 PM	Helium valve opened
12/12/2012	1:41:37 PM	Main Vac valve opened
12/12/2012	1:41:37 PM	Helium MFC set to  20.000000
12/12/2012	1:41:37 PM	H2 MFC set to  0.000000
12/12/2012	1:41:37 PM	BCl3 MFC set to  0.000000
12/12/2012	1:41:37 PM	PH3 MFC set to  0.000000
12/12/2012	1:41:37 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:41:37 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:41:38 PM	Tube furnace set to 200
12/12/2012	1:42:08 PM	Helium valve closed
12/12/2012	1:42:08 PM	H2 valve closed
12/12/2012	1:42:08 PM	BCl3 valve closed
12/12/2012	1:42:08 PM	PH3 valve closed
12/12/2012	1:42:08 PM	SiCl4 pre valve closed
12/12/2012	1:42:08 PM	SiCl4 post valve closed
12/12/2012	1:42:08 PM	Bypass valve closed
12/12/2012	1:42:08 PM	Bubbler valve closed
12/12/2012	1:42:08 PM	Main Vac valve opened
12/12/2012	1:42:08 PM	Helium MFC set to  0.000000
12/12/2012	1:42:08 PM	H2 MFC set to  0.000000
12/12/2012	1:42:08 PM	BCl3 MFC set to  0.000000
12/12/2012	1:42:08 PM	PH3 MFC set to  0.000000
12/12/2012	1:42:08 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:42:08 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:42:08 PM	Tube furnace set to 200
12/12/2012	1:42:38 PM	H2 valve closed
12/12/2012	1:42:38 PM	BCl3 valve closed
12/12/2012	1:42:38 PM	PH3 valve closed
12/12/2012	1:42:38 PM	SiCl4 pre valve closed
12/12/2012	1:42:38 PM	SiCl4 post valve closed
12/12/2012	1:42:38 PM	Bypass valve closed
12/12/2012	1:42:38 PM	Bubbler valve closed
12/12/2012	1:42:38 PM	Helium valve opened
12/12/2012	1:42:38 PM	Main Vac valve opened
12/12/2012	1:42:38 PM	Helium MFC set to  20.000000
12/12/2012	1:42:38 PM	H2 MFC set to  0.000000
12/12/2012	1:42:38 PM	BCl3 MFC set to  0.000000
12/12/2012	1:42:38 PM	PH3 MFC set to  0.000000
12/12/2012	1:42:38 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:42:38 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:42:38 PM	Tube furnace set to 200
12/12/2012	1:43:08 PM	Helium valve closed
12/12/2012	1:43:08 PM	H2 valve closed
12/12/2012	1:43:08 PM	BCl3 valve closed
12/12/2012	1:43:08 PM	PH3 valve closed
12/12/2012	1:43:08 PM	SiCl4 pre valve closed
12/12/2012	1:43:08 PM	SiCl4 post valve closed
12/12/2012	1:43:08 PM	Bypass valve closed
12/12/2012	1:43:08 PM	Bubbler valve closed
12/12/2012	1:43:08 PM	Main Vac valve opened
12/12/2012	1:43:08 PM	Helium MFC set to  0.000000
12/12/2012	1:43:08 PM	H2 MFC set to  0.000000
12/12/2012	1:43:08 PM	BCl3 MFC set to  0.000000
12/12/2012	1:43:08 PM	PH3 MFC set to  0.000000
12/12/2012	1:43:08 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:43:08 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:43:08 PM	Tube furnace set to 200
12/12/2012	1:43:38 PM	H2 valve closed
12/12/2012	1:43:38 PM	BCl3 valve closed
12/12/2012	1:43:38 PM	PH3 valve closed
12/12/2012	1:43:38 PM	SiCl4 pre valve closed
12/12/2012	1:43:38 PM	SiCl4 post valve closed
12/12/2012	1:43:38 PM	Bypass valve closed
12/12/2012	1:43:38 PM	Bubbler valve closed
12/12/2012	1:43:38 PM	Helium valve opened
12/12/2012	1:43:38 PM	Main Vac valve opened
12/12/2012	1:43:38 PM	Helium MFC set to  20.000000
12/12/2012	1:43:38 PM	H2 MFC set to  0.000000
12/12/2012	1:43:38 PM	BCl3 MFC set to  0.000000
12/12/2012	1:43:38 PM	PH3 MFC set to  0.000000
12/12/2012	1:43:38 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:43:38 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:43:39 PM	Tube furnace set to 200
12/12/2012	1:44:09 PM	Helium valve closed
12/12/2012	1:44:09 PM	H2 valve closed
12/12/2012	1:44:09 PM	BCl3 valve closed
12/12/2012	1:44:09 PM	PH3 valve closed
12/12/2012	1:44:09 PM	SiCl4 pre valve closed
12/12/2012	1:44:09 PM	SiCl4 post valve closed
12/12/2012	1:44:09 PM	Bypass valve closed
12/12/2012	1:44:09 PM	Bubbler valve closed
12/12/2012	1:44:09 PM	Main Vac valve opened
12/12/2012	1:44:09 PM	Helium MFC set to  0.000000
12/12/2012	1:44:09 PM	H2 MFC set to  0.000000
12/12/2012	1:44:09 PM	BCl3 MFC set to  0.000000
12/12/2012	1:44:09 PM	PH3 MFC set to  0.000000
12/12/2012	1:44:09 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:44:09 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:44:09 PM	Tube furnace set to 200
12/12/2012	1:44:39 PM	H2 valve closed
12/12/2012	1:44:39 PM	BCl3 valve closed
12/12/2012	1:44:39 PM	PH3 valve closed
12/12/2012	1:44:39 PM	SiCl4 pre valve closed
12/12/2012	1:44:39 PM	SiCl4 post valve closed
12/12/2012	1:44:39 PM	Bypass valve closed
12/12/2012	1:44:39 PM	Bubbler valve closed
12/12/2012	1:44:39 PM	Helium valve opened
12/12/2012	1:44:39 PM	Main Vac valve opened
12/12/2012	1:44:39 PM	Helium MFC set to  20.000000
12/12/2012	1:44:39 PM	H2 MFC set to  0.000000
12/12/2012	1:44:39 PM	BCl3 MFC set to  0.000000
12/12/2012	1:44:39 PM	PH3 MFC set to  0.000000
12/12/2012	1:44:39 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:44:39 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:44:39 PM	Tube furnace set to 200
12/12/2012	1:45:09 PM	Helium valve closed
12/12/2012	1:45:09 PM	H2 valve closed
12/12/2012	1:45:09 PM	BCl3 valve closed
12/12/2012	1:45:09 PM	PH3 valve closed
12/12/2012	1:45:09 PM	SiCl4 pre valve closed
12/12/2012	1:45:09 PM	SiCl4 post valve closed
12/12/2012	1:45:09 PM	Bypass valve closed
12/12/2012	1:45:09 PM	Bubbler valve closed
12/12/2012	1:45:09 PM	Main Vac valve opened
12/12/2012	1:45:09 PM	Helium MFC set to  0.000000
12/12/2012	1:45:09 PM	H2 MFC set to  0.000000
12/12/2012	1:45:09 PM	BCl3 MFC set to  0.000000
12/12/2012	1:45:09 PM	PH3 MFC set to  0.000000
12/12/2012	1:45:09 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:45:09 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:45:09 PM	Tube furnace set to 200
12/12/2012	1:45:39 PM	H2 valve closed
12/12/2012	1:45:39 PM	BCl3 valve closed
12/12/2012	1:45:39 PM	PH3 valve closed
12/12/2012	1:45:39 PM	SiCl4 pre valve closed
12/12/2012	1:45:39 PM	SiCl4 post valve closed
12/12/2012	1:45:39 PM	Bypass valve closed
12/12/2012	1:45:39 PM	Bubbler valve closed
12/12/2012	1:45:39 PM	Helium valve opened
12/12/2012	1:45:39 PM	Main Vac valve opened
12/12/2012	1:45:39 PM	Helium MFC set to  20.000000
12/12/2012	1:45:39 PM	H2 MFC set to  0.000000
12/12/2012	1:45:39 PM	BCl3 MFC set to  0.000000
12/12/2012	1:45:39 PM	PH3 MFC set to  0.000000
12/12/2012	1:45:39 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:45:39 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:45:40 PM	Tube furnace set to 200
12/12/2012	1:46:10 PM	Helium valve closed
12/12/2012	1:46:10 PM	H2 valve closed
12/12/2012	1:46:10 PM	BCl3 valve closed
12/12/2012	1:46:10 PM	PH3 valve closed
12/12/2012	1:46:10 PM	SiCl4 pre valve closed
12/12/2012	1:46:10 PM	SiCl4 post valve closed
12/12/2012	1:46:10 PM	Bypass valve closed
12/12/2012	1:46:10 PM	Bubbler valve closed
12/12/2012	1:46:10 PM	Main Vac valve opened
12/12/2012	1:46:10 PM	Helium MFC set to  0.000000
12/12/2012	1:46:10 PM	H2 MFC set to  0.000000
12/12/2012	1:46:10 PM	BCl3 MFC set to  0.000000
12/12/2012	1:46:10 PM	PH3 MFC set to  0.000000
12/12/2012	1:46:10 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:46:10 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:46:10 PM	Tube furnace set to 0
12/12/2012	1:46:11 PM	Run finished at 1:46 PM
12/12/2012	1:53:54 PM	Main Vac valve closed
12/12/2012	1:54:03 PM	Main Vac valve opened
12/12/2012	1:54:47 PM	Main Vac valve closed
12/12/2012	1:55:02 PM	Main Vac valve opened
12/12/2012	1:55:09 PM	Helium MFC set to  10.000000
12/12/2012	1:55:11 PM	Helium valve opened
12/12/2012	1:55:21 PM	Helium valve closed
12/12/2012	1:55:23 PM	Helium MFC set to  0.000000
12/12/2012	1:56:20 PM	Recipe started at 1:56 PM
12/12/2012	1:56:20 PM	Helium valve closed
12/12/2012	1:56:20 PM	H2 valve closed
12/12/2012	1:56:20 PM	BCl3 valve closed
12/12/2012	1:56:20 PM	PH3 valve closed
12/12/2012	1:56:20 PM	SiCl4 pre valve closed
12/12/2012	1:56:20 PM	SiCl4 post valve closed
12/12/2012	1:56:20 PM	Bypass valve closed
12/12/2012	1:56:20 PM	Bubbler valve closed
12/12/2012	1:56:20 PM	Main Vac valve opened
12/12/2012	1:56:20 PM	Helium MFC set to  0.000000
12/12/2012	1:56:20 PM	H2 MFC set to  0.000000
12/12/2012	1:56:20 PM	BCl3 MFC set to  0.000000
12/12/2012	1:56:20 PM	PH3 MFC set to  0.000000
12/12/2012	1:56:20 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:56:20 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:56:20 PM	Tube furnace set to 0
12/12/2012	1:56:50 PM	H2 valve closed
12/12/2012	1:56:50 PM	BCl3 valve closed
12/12/2012	1:56:50 PM	PH3 valve closed
12/12/2012	1:56:50 PM	SiCl4 pre valve closed
12/12/2012	1:56:50 PM	SiCl4 post valve closed
12/12/2012	1:56:50 PM	Bypass valve closed
12/12/2012	1:56:50 PM	Bubbler valve closed
12/12/2012	1:56:50 PM	Helium valve opened
12/12/2012	1:56:50 PM	Main Vac valve opened
12/12/2012	1:56:50 PM	Helium MFC set to  20.000000
12/12/2012	1:56:50 PM	H2 MFC set to  0.000000
12/12/2012	1:56:50 PM	BCl3 MFC set to  0.000000
12/12/2012	1:56:50 PM	PH3 MFC set to  0.000000
12/12/2012	1:56:50 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:56:50 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:56:50 PM	Tube furnace set to 0
12/12/2012	1:57:20 PM	Helium valve closed
12/12/2012	1:57:20 PM	H2 valve closed
12/12/2012	1:57:20 PM	BCl3 valve closed
12/12/2012	1:57:20 PM	PH3 valve closed
12/12/2012	1:57:20 PM	SiCl4 pre valve closed
12/12/2012	1:57:20 PM	SiCl4 post valve closed
12/12/2012	1:57:20 PM	Bypass valve closed
12/12/2012	1:57:20 PM	Bubbler valve closed
12/12/2012	1:57:20 PM	Main Vac valve opened
12/12/2012	1:57:20 PM	Helium MFC set to  0.000000
12/12/2012	1:57:20 PM	H2 MFC set to  0.000000
12/12/2012	1:57:20 PM	BCl3 MFC set to  0.000000
12/12/2012	1:57:20 PM	PH3 MFC set to  0.000000
12/12/2012	1:57:20 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:57:20 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:57:21 PM	Tube furnace set to 0
12/12/2012	1:57:51 PM	H2 valve closed
12/12/2012	1:57:51 PM	BCl3 valve closed
12/12/2012	1:57:51 PM	PH3 valve closed
12/12/2012	1:57:51 PM	SiCl4 pre valve closed
12/12/2012	1:57:51 PM	SiCl4 post valve closed
12/12/2012	1:57:51 PM	Bypass valve closed
12/12/2012	1:57:51 PM	Bubbler valve closed
12/12/2012	1:57:51 PM	Helium valve opened
12/12/2012	1:57:51 PM	Main Vac valve opened
12/12/2012	1:57:51 PM	Helium MFC set to  20.000000
12/12/2012	1:57:51 PM	H2 MFC set to  0.000000
12/12/2012	1:57:51 PM	BCl3 MFC set to  0.000000
12/12/2012	1:57:51 PM	PH3 MFC set to  0.000000
12/12/2012	1:57:51 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:57:51 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:57:51 PM	Tube furnace set to 0
12/12/2012	1:58:21 PM	Helium valve closed
12/12/2012	1:58:21 PM	H2 valve closed
12/12/2012	1:58:21 PM	BCl3 valve closed
12/12/2012	1:58:21 PM	PH3 valve closed
12/12/2012	1:58:21 PM	SiCl4 pre valve closed
12/12/2012	1:58:21 PM	SiCl4 post valve closed
12/12/2012	1:58:21 PM	Bypass valve closed
12/12/2012	1:58:21 PM	Bubbler valve closed
12/12/2012	1:58:21 PM	Main Vac valve opened
12/12/2012	1:58:21 PM	Helium MFC set to  0.000000
12/12/2012	1:58:21 PM	H2 MFC set to  0.000000
12/12/2012	1:58:21 PM	BCl3 MFC set to  0.000000
12/12/2012	1:58:21 PM	PH3 MFC set to  0.000000
12/12/2012	1:58:21 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:58:21 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:58:21 PM	Tube furnace set to 0
12/12/2012	1:58:51 PM	H2 valve closed
12/12/2012	1:58:51 PM	BCl3 valve closed
12/12/2012	1:58:51 PM	PH3 valve closed
12/12/2012	1:58:51 PM	SiCl4 pre valve closed
12/12/2012	1:58:51 PM	SiCl4 post valve closed
12/12/2012	1:58:51 PM	Bypass valve closed
12/12/2012	1:58:51 PM	Bubbler valve closed
12/12/2012	1:58:51 PM	Helium valve opened
12/12/2012	1:58:51 PM	Main Vac valve opened
12/12/2012	1:58:51 PM	Helium MFC set to  20.000000
12/12/2012	1:58:51 PM	H2 MFC set to  0.000000
12/12/2012	1:58:51 PM	BCl3 MFC set to  0.000000
12/12/2012	1:58:51 PM	PH3 MFC set to  0.000000
12/12/2012	1:58:51 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:58:51 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:58:51 PM	Tube furnace set to 0
12/12/2012	1:59:21 PM	Helium valve closed
12/12/2012	1:59:21 PM	H2 valve closed
12/12/2012	1:59:21 PM	BCl3 valve closed
12/12/2012	1:59:21 PM	PH3 valve closed
12/12/2012	1:59:21 PM	SiCl4 pre valve closed
12/12/2012	1:59:21 PM	SiCl4 post valve closed
12/12/2012	1:59:21 PM	Bypass valve closed
12/12/2012	1:59:21 PM	Bubbler valve closed
12/12/2012	1:59:21 PM	Main Vac valve opened
12/12/2012	1:59:21 PM	Helium MFC set to  0.000000
12/12/2012	1:59:21 PM	H2 MFC set to  0.000000
12/12/2012	1:59:21 PM	BCl3 MFC set to  0.000000
12/12/2012	1:59:21 PM	PH3 MFC set to  0.000000
12/12/2012	1:59:21 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:59:21 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:59:22 PM	Tube furnace set to 0
12/12/2012	1:59:52 PM	H2 valve closed
12/12/2012	1:59:52 PM	BCl3 valve closed
12/12/2012	1:59:52 PM	PH3 valve closed
12/12/2012	1:59:52 PM	SiCl4 pre valve closed
12/12/2012	1:59:52 PM	SiCl4 post valve closed
12/12/2012	1:59:52 PM	Bypass valve closed
12/12/2012	1:59:52 PM	Bubbler valve closed
12/12/2012	1:59:52 PM	Helium valve opened
12/12/2012	1:59:52 PM	Main Vac valve opened
12/12/2012	1:59:52 PM	Helium MFC set to  20.000000
12/12/2012	1:59:52 PM	H2 MFC set to  0.000000
12/12/2012	1:59:52 PM	BCl3 MFC set to  0.000000
12/12/2012	1:59:52 PM	PH3 MFC set to  0.000000
12/12/2012	1:59:52 PM	SiCl4 MFC set to  0.000000
12/12/2012	1:59:52 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	1:59:52 PM	Tube furnace set to 0
12/12/2012	2:00:22 PM	Helium valve closed
12/12/2012	2:00:22 PM	H2 valve closed
12/12/2012	2:00:22 PM	BCl3 valve closed
12/12/2012	2:00:22 PM	PH3 valve closed
12/12/2012	2:00:22 PM	SiCl4 pre valve closed
12/12/2012	2:00:22 PM	SiCl4 post valve closed
12/12/2012	2:00:22 PM	Bypass valve closed
12/12/2012	2:00:22 PM	Bubbler valve closed
12/12/2012	2:00:22 PM	Main Vac valve opened
12/12/2012	2:00:22 PM	Helium MFC set to  0.000000
12/12/2012	2:00:22 PM	H2 MFC set to  0.000000
12/12/2012	2:00:22 PM	BCl3 MFC set to  0.000000
12/12/2012	2:00:22 PM	PH3 MFC set to  0.000000
12/12/2012	2:00:22 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:00:22 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:00:22 PM	Tube furnace set to 0
12/12/2012	2:00:52 PM	H2 valve closed
12/12/2012	2:00:52 PM	BCl3 valve closed
12/12/2012	2:00:52 PM	PH3 valve closed
12/12/2012	2:00:52 PM	SiCl4 pre valve closed
12/12/2012	2:00:52 PM	SiCl4 post valve closed
12/12/2012	2:00:52 PM	Bypass valve closed
12/12/2012	2:00:52 PM	Bubbler valve closed
12/12/2012	2:00:52 PM	Helium valve opened
12/12/2012	2:00:52 PM	Main Vac valve opened
12/12/2012	2:00:52 PM	Helium MFC set to  20.000000
12/12/2012	2:00:52 PM	H2 MFC set to  0.000000
12/12/2012	2:00:52 PM	BCl3 MFC set to  0.000000
12/12/2012	2:00:52 PM	PH3 MFC set to  0.000000
12/12/2012	2:00:52 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:00:52 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:00:52 PM	Tube furnace set to 0
12/12/2012	2:01:22 PM	Helium valve closed
12/12/2012	2:01:22 PM	H2 valve closed
12/12/2012	2:01:22 PM	BCl3 valve closed
12/12/2012	2:01:22 PM	PH3 valve closed
12/12/2012	2:01:22 PM	SiCl4 pre valve closed
12/12/2012	2:01:22 PM	SiCl4 post valve closed
12/12/2012	2:01:22 PM	Bypass valve closed
12/12/2012	2:01:22 PM	Bubbler valve closed
12/12/2012	2:01:22 PM	Main Vac valve opened
12/12/2012	2:01:22 PM	Helium MFC set to  0.000000
12/12/2012	2:01:22 PM	H2 MFC set to  0.000000
12/12/2012	2:01:22 PM	BCl3 MFC set to  0.000000
12/12/2012	2:01:22 PM	PH3 MFC set to  0.000000
12/12/2012	2:01:22 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:01:22 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:01:23 PM	Tube furnace set to 0
12/12/2012	2:01:53 PM	H2 valve closed
12/12/2012	2:01:53 PM	BCl3 valve closed
12/12/2012	2:01:53 PM	PH3 valve closed
12/12/2012	2:01:53 PM	SiCl4 pre valve closed
12/12/2012	2:01:53 PM	SiCl4 post valve closed
12/12/2012	2:01:53 PM	Bypass valve closed
12/12/2012	2:01:53 PM	Bubbler valve closed
12/12/2012	2:01:53 PM	Helium valve opened
12/12/2012	2:01:53 PM	Main Vac valve opened
12/12/2012	2:01:53 PM	Helium MFC set to  20.000000
12/12/2012	2:01:53 PM	H2 MFC set to  0.000000
12/12/2012	2:01:53 PM	BCl3 MFC set to  0.000000
12/12/2012	2:01:53 PM	PH3 MFC set to  0.000000
12/12/2012	2:01:53 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:01:53 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:01:53 PM	Tube furnace set to 0
12/12/2012	2:02:23 PM	Helium valve closed
12/12/2012	2:02:23 PM	H2 valve closed
12/12/2012	2:02:23 PM	BCl3 valve closed
12/12/2012	2:02:23 PM	PH3 valve closed
12/12/2012	2:02:23 PM	SiCl4 pre valve closed
12/12/2012	2:02:23 PM	SiCl4 post valve closed
12/12/2012	2:02:23 PM	Bypass valve closed
12/12/2012	2:02:23 PM	Bubbler valve closed
12/12/2012	2:02:23 PM	Main Vac valve opened
12/12/2012	2:02:23 PM	Helium MFC set to  0.000000
12/12/2012	2:02:23 PM	H2 MFC set to  0.000000
12/12/2012	2:02:23 PM	BCl3 MFC set to  0.000000
12/12/2012	2:02:23 PM	PH3 MFC set to  0.000000
12/12/2012	2:02:23 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:02:23 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:02:23 PM	Tube furnace set to 0
12/12/2012	2:02:53 PM	H2 valve closed
12/12/2012	2:02:53 PM	BCl3 valve closed
12/12/2012	2:02:53 PM	PH3 valve closed
12/12/2012	2:02:53 PM	SiCl4 pre valve closed
12/12/2012	2:02:53 PM	SiCl4 post valve closed
12/12/2012	2:02:53 PM	Bypass valve closed
12/12/2012	2:02:53 PM	Bubbler valve closed
12/12/2012	2:02:53 PM	Helium valve opened
12/12/2012	2:02:53 PM	Main Vac valve opened
12/12/2012	2:02:53 PM	Helium MFC set to  20.000000
12/12/2012	2:02:53 PM	H2 MFC set to  0.000000
12/12/2012	2:02:53 PM	BCl3 MFC set to  0.000000
12/12/2012	2:02:53 PM	PH3 MFC set to  0.000000
12/12/2012	2:02:53 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:02:53 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:02:53 PM	Tube furnace set to 0
12/12/2012	2:03:23 PM	Helium valve closed
12/12/2012	2:03:23 PM	H2 valve closed
12/12/2012	2:03:23 PM	BCl3 valve closed
12/12/2012	2:03:23 PM	PH3 valve closed
12/12/2012	2:03:23 PM	SiCl4 pre valve closed
12/12/2012	2:03:23 PM	SiCl4 post valve closed
12/12/2012	2:03:23 PM	Bypass valve closed
12/12/2012	2:03:23 PM	Bubbler valve closed
12/12/2012	2:03:23 PM	Main Vac valve opened
12/12/2012	2:03:23 PM	Helium MFC set to  0.000000
12/12/2012	2:03:23 PM	H2 MFC set to  0.000000
12/12/2012	2:03:23 PM	BCl3 MFC set to  0.000000
12/12/2012	2:03:23 PM	PH3 MFC set to  0.000000
12/12/2012	2:03:23 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:03:23 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:03:24 PM	Tube furnace set to 0
12/12/2012	2:03:54 PM	H2 valve closed
12/12/2012	2:03:54 PM	BCl3 valve closed
12/12/2012	2:03:54 PM	PH3 valve closed
12/12/2012	2:03:54 PM	SiCl4 pre valve closed
12/12/2012	2:03:54 PM	SiCl4 post valve closed
12/12/2012	2:03:54 PM	Bypass valve closed
12/12/2012	2:03:54 PM	Bubbler valve closed
12/12/2012	2:03:54 PM	Helium valve opened
12/12/2012	2:03:54 PM	Main Vac valve opened
12/12/2012	2:03:54 PM	Helium MFC set to  20.000000
12/12/2012	2:03:54 PM	H2 MFC set to  0.000000
12/12/2012	2:03:54 PM	BCl3 MFC set to  0.000000
12/12/2012	2:03:54 PM	PH3 MFC set to  0.000000
12/12/2012	2:03:54 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:03:54 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:03:54 PM	Tube furnace set to 0
12/12/2012	2:04:24 PM	Helium valve closed
12/12/2012	2:04:24 PM	H2 valve closed
12/12/2012	2:04:24 PM	BCl3 valve closed
12/12/2012	2:04:24 PM	PH3 valve closed
12/12/2012	2:04:24 PM	SiCl4 pre valve closed
12/12/2012	2:04:24 PM	SiCl4 post valve closed
12/12/2012	2:04:24 PM	Bypass valve closed
12/12/2012	2:04:24 PM	Bubbler valve closed
12/12/2012	2:04:24 PM	Main Vac valve opened
12/12/2012	2:04:24 PM	Helium MFC set to  0.000000
12/12/2012	2:04:24 PM	H2 MFC set to  0.000000
12/12/2012	2:04:24 PM	BCl3 MFC set to  0.000000
12/12/2012	2:04:24 PM	PH3 MFC set to  0.000000
12/12/2012	2:04:24 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:04:24 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:04:24 PM	Tube furnace set to 0
12/12/2012	2:04:54 PM	H2 valve closed
12/12/2012	2:04:54 PM	BCl3 valve closed
12/12/2012	2:04:54 PM	PH3 valve closed
12/12/2012	2:04:54 PM	SiCl4 pre valve closed
12/12/2012	2:04:54 PM	SiCl4 post valve closed
12/12/2012	2:04:54 PM	Bypass valve closed
12/12/2012	2:04:54 PM	Bubbler valve closed
12/12/2012	2:04:54 PM	Helium valve opened
12/12/2012	2:04:54 PM	Main Vac valve opened
12/12/2012	2:04:54 PM	Helium MFC set to  20.000000
12/12/2012	2:04:54 PM	H2 MFC set to  0.000000
12/12/2012	2:04:54 PM	BCl3 MFC set to  0.000000
12/12/2012	2:04:54 PM	PH3 MFC set to  0.000000
12/12/2012	2:04:54 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:04:54 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:04:54 PM	Tube furnace set to 0
12/12/2012	2:05:24 PM	Helium valve closed
12/12/2012	2:05:24 PM	H2 valve closed
12/12/2012	2:05:24 PM	BCl3 valve closed
12/12/2012	2:05:24 PM	PH3 valve closed
12/12/2012	2:05:24 PM	SiCl4 pre valve closed
12/12/2012	2:05:24 PM	SiCl4 post valve closed
12/12/2012	2:05:24 PM	Bypass valve closed
12/12/2012	2:05:24 PM	Bubbler valve closed
12/12/2012	2:05:24 PM	Main Vac valve opened
12/12/2012	2:05:24 PM	Helium MFC set to  0.000000
12/12/2012	2:05:24 PM	H2 MFC set to  0.000000
12/12/2012	2:05:24 PM	BCl3 MFC set to  0.000000
12/12/2012	2:05:24 PM	PH3 MFC set to  0.000000
12/12/2012	2:05:24 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:05:24 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:05:24 PM	Tube furnace set to 200
12/12/2012	2:05:55 PM	H2 valve closed
12/12/2012	2:05:55 PM	BCl3 valve closed
12/12/2012	2:05:55 PM	PH3 valve closed
12/12/2012	2:05:55 PM	SiCl4 pre valve closed
12/12/2012	2:05:55 PM	SiCl4 post valve closed
12/12/2012	2:05:55 PM	Bypass valve closed
12/12/2012	2:05:55 PM	Bubbler valve closed
12/12/2012	2:05:55 PM	Helium valve opened
12/12/2012	2:05:55 PM	Main Vac valve opened
12/12/2012	2:05:55 PM	Helium MFC set to  20.000000
12/12/2012	2:05:55 PM	H2 MFC set to  0.000000
12/12/2012	2:05:55 PM	BCl3 MFC set to  0.000000
12/12/2012	2:05:55 PM	PH3 MFC set to  0.000000
12/12/2012	2:05:55 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:05:55 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:05:55 PM	Tube furnace set to 200
12/12/2012	2:06:25 PM	Helium valve closed
12/12/2012	2:06:25 PM	H2 valve closed
12/12/2012	2:06:25 PM	BCl3 valve closed
12/12/2012	2:06:25 PM	PH3 valve closed
12/12/2012	2:06:25 PM	SiCl4 pre valve closed
12/12/2012	2:06:25 PM	SiCl4 post valve closed
12/12/2012	2:06:25 PM	Bypass valve closed
12/12/2012	2:06:25 PM	Bubbler valve closed
12/12/2012	2:06:25 PM	Main Vac valve opened
12/12/2012	2:06:25 PM	Helium MFC set to  0.000000
12/12/2012	2:06:25 PM	H2 MFC set to  0.000000
12/12/2012	2:06:25 PM	BCl3 MFC set to  0.000000
12/12/2012	2:06:25 PM	PH3 MFC set to  0.000000
12/12/2012	2:06:25 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:06:25 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:06:25 PM	Tube furnace set to 200
12/12/2012	2:06:55 PM	H2 valve closed
12/12/2012	2:06:55 PM	BCl3 valve closed
12/12/2012	2:06:55 PM	PH3 valve closed
12/12/2012	2:06:55 PM	SiCl4 pre valve closed
12/12/2012	2:06:55 PM	SiCl4 post valve closed
12/12/2012	2:06:55 PM	Bypass valve closed
12/12/2012	2:06:55 PM	Bubbler valve closed
12/12/2012	2:06:55 PM	Helium valve opened
12/12/2012	2:06:55 PM	Main Vac valve opened
12/12/2012	2:06:55 PM	Helium MFC set to  20.000000
12/12/2012	2:06:55 PM	H2 MFC set to  0.000000
12/12/2012	2:06:55 PM	BCl3 MFC set to  0.000000
12/12/2012	2:06:55 PM	PH3 MFC set to  0.000000
12/12/2012	2:06:55 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:06:55 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:06:55 PM	Tube furnace set to 200
12/12/2012	2:07:25 PM	Helium valve closed
12/12/2012	2:07:25 PM	H2 valve closed
12/12/2012	2:07:25 PM	BCl3 valve closed
12/12/2012	2:07:25 PM	PH3 valve closed
12/12/2012	2:07:25 PM	SiCl4 pre valve closed
12/12/2012	2:07:25 PM	SiCl4 post valve closed
12/12/2012	2:07:25 PM	Bypass valve closed
12/12/2012	2:07:25 PM	Bubbler valve closed
12/12/2012	2:07:25 PM	Main Vac valve opened
12/12/2012	2:07:25 PM	Helium MFC set to  0.000000
12/12/2012	2:07:25 PM	H2 MFC set to  0.000000
12/12/2012	2:07:25 PM	BCl3 MFC set to  0.000000
12/12/2012	2:07:25 PM	PH3 MFC set to  0.000000
12/12/2012	2:07:25 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:07:25 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:07:26 PM	Tube furnace set to 200
12/12/2012	2:07:56 PM	H2 valve closed
12/12/2012	2:07:56 PM	BCl3 valve closed
12/12/2012	2:07:56 PM	PH3 valve closed
12/12/2012	2:07:56 PM	SiCl4 pre valve closed
12/12/2012	2:07:56 PM	SiCl4 post valve closed
12/12/2012	2:07:56 PM	Bypass valve closed
12/12/2012	2:07:56 PM	Bubbler valve closed
12/12/2012	2:07:56 PM	Helium valve opened
12/12/2012	2:07:56 PM	Main Vac valve opened
12/12/2012	2:07:56 PM	Helium MFC set to  20.000000
12/12/2012	2:07:56 PM	H2 MFC set to  0.000000
12/12/2012	2:07:56 PM	BCl3 MFC set to  0.000000
12/12/2012	2:07:56 PM	PH3 MFC set to  0.000000
12/12/2012	2:07:56 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:07:56 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:07:56 PM	Tube furnace set to 200
12/12/2012	2:08:26 PM	Helium valve closed
12/12/2012	2:08:26 PM	H2 valve closed
12/12/2012	2:08:26 PM	BCl3 valve closed
12/12/2012	2:08:26 PM	PH3 valve closed
12/12/2012	2:08:26 PM	SiCl4 pre valve closed
12/12/2012	2:08:26 PM	SiCl4 post valve closed
12/12/2012	2:08:26 PM	Bypass valve closed
12/12/2012	2:08:26 PM	Bubbler valve closed
12/12/2012	2:08:26 PM	Main Vac valve opened
12/12/2012	2:08:26 PM	Helium MFC set to  0.000000
12/12/2012	2:08:26 PM	H2 MFC set to  0.000000
12/12/2012	2:08:26 PM	BCl3 MFC set to  0.000000
12/12/2012	2:08:26 PM	PH3 MFC set to  0.000000
12/12/2012	2:08:26 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:08:26 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:08:26 PM	Tube furnace set to 200
12/12/2012	2:08:56 PM	H2 valve closed
12/12/2012	2:08:56 PM	BCl3 valve closed
12/12/2012	2:08:56 PM	PH3 valve closed
12/12/2012	2:08:56 PM	SiCl4 pre valve closed
12/12/2012	2:08:56 PM	SiCl4 post valve closed
12/12/2012	2:08:56 PM	Bypass valve closed
12/12/2012	2:08:56 PM	Bubbler valve closed
12/12/2012	2:08:56 PM	Helium valve opened
12/12/2012	2:08:56 PM	Main Vac valve opened
12/12/2012	2:08:56 PM	Helium MFC set to  20.000000
12/12/2012	2:08:56 PM	H2 MFC set to  0.000000
12/12/2012	2:08:56 PM	BCl3 MFC set to  0.000000
12/12/2012	2:08:56 PM	PH3 MFC set to  0.000000
12/12/2012	2:08:56 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:08:56 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:08:56 PM	Tube furnace set to 200
12/12/2012	2:09:26 PM	Helium valve closed
12/12/2012	2:09:26 PM	H2 valve closed
12/12/2012	2:09:26 PM	BCl3 valve closed
12/12/2012	2:09:26 PM	PH3 valve closed
12/12/2012	2:09:26 PM	SiCl4 pre valve closed
12/12/2012	2:09:26 PM	SiCl4 post valve closed
12/12/2012	2:09:26 PM	Bypass valve closed
12/12/2012	2:09:26 PM	Bubbler valve closed
12/12/2012	2:09:26 PM	Main Vac valve opened
12/12/2012	2:09:26 PM	Helium MFC set to  0.000000
12/12/2012	2:09:26 PM	H2 MFC set to  0.000000
12/12/2012	2:09:26 PM	BCl3 MFC set to  0.000000
12/12/2012	2:09:26 PM	PH3 MFC set to  0.000000
12/12/2012	2:09:26 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:09:26 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:09:27 PM	Tube furnace set to 200
12/12/2012	2:09:57 PM	H2 valve closed
12/12/2012	2:09:57 PM	BCl3 valve closed
12/12/2012	2:09:57 PM	PH3 valve closed
12/12/2012	2:09:57 PM	SiCl4 pre valve closed
12/12/2012	2:09:57 PM	SiCl4 post valve closed
12/12/2012	2:09:57 PM	Bypass valve closed
12/12/2012	2:09:57 PM	Bubbler valve closed
12/12/2012	2:09:57 PM	Helium valve opened
12/12/2012	2:09:57 PM	Main Vac valve opened
12/12/2012	2:09:57 PM	Helium MFC set to  20.000000
12/12/2012	2:09:57 PM	H2 MFC set to  0.000000
12/12/2012	2:09:57 PM	BCl3 MFC set to  0.000000
12/12/2012	2:09:57 PM	PH3 MFC set to  0.000000
12/12/2012	2:09:57 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:09:57 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:09:57 PM	Tube furnace set to 200
12/12/2012	2:10:27 PM	Helium valve closed
12/12/2012	2:10:27 PM	H2 valve closed
12/12/2012	2:10:27 PM	BCl3 valve closed
12/12/2012	2:10:27 PM	PH3 valve closed
12/12/2012	2:10:27 PM	SiCl4 pre valve closed
12/12/2012	2:10:27 PM	SiCl4 post valve closed
12/12/2012	2:10:27 PM	Bypass valve closed
12/12/2012	2:10:27 PM	Bubbler valve closed
12/12/2012	2:10:27 PM	Main Vac valve opened
12/12/2012	2:10:27 PM	Helium MFC set to  0.000000
12/12/2012	2:10:27 PM	H2 MFC set to  0.000000
12/12/2012	2:10:27 PM	BCl3 MFC set to  0.000000
12/12/2012	2:10:27 PM	PH3 MFC set to  0.000000
12/12/2012	2:10:27 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:10:27 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:10:27 PM	Tube furnace set to 200
12/12/2012	2:10:57 PM	H2 valve closed
12/12/2012	2:10:57 PM	BCl3 valve closed
12/12/2012	2:10:57 PM	PH3 valve closed
12/12/2012	2:10:57 PM	SiCl4 pre valve closed
12/12/2012	2:10:57 PM	SiCl4 post valve closed
12/12/2012	2:10:57 PM	Bypass valve closed
12/12/2012	2:10:57 PM	Bubbler valve closed
12/12/2012	2:10:57 PM	Helium valve opened
12/12/2012	2:10:57 PM	Main Vac valve opened
12/12/2012	2:10:57 PM	Helium MFC set to  20.000000
12/12/2012	2:10:57 PM	H2 MFC set to  0.000000
12/12/2012	2:10:57 PM	BCl3 MFC set to  0.000000
12/12/2012	2:10:57 PM	PH3 MFC set to  0.000000
12/12/2012	2:10:57 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:10:57 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:10:57 PM	Tube furnace set to 200
12/12/2012	2:11:27 PM	Helium valve closed
12/12/2012	2:11:27 PM	H2 valve closed
12/12/2012	2:11:27 PM	BCl3 valve closed
12/12/2012	2:11:27 PM	PH3 valve closed
12/12/2012	2:11:27 PM	SiCl4 pre valve closed
12/12/2012	2:11:27 PM	SiCl4 post valve closed
12/12/2012	2:11:27 PM	Bypass valve closed
12/12/2012	2:11:27 PM	Bubbler valve closed
12/12/2012	2:11:27 PM	Main Vac valve opened
12/12/2012	2:11:27 PM	Helium MFC set to  0.000000
12/12/2012	2:11:27 PM	H2 MFC set to  0.000000
12/12/2012	2:11:27 PM	BCl3 MFC set to  0.000000
12/12/2012	2:11:27 PM	PH3 MFC set to  0.000000
12/12/2012	2:11:27 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:11:27 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:11:28 PM	Tube furnace set to 0
12/12/2012	2:11:29 PM	Run finished at 2:11 PM
12/12/2012	2:13:00 PM	Main Vac valve closed
12/12/2012	2:13:10 PM	Main Vac valve opened
12/12/2012	2:13:51 PM	Recipe started at 2:13 PM
12/12/2012	2:13:51 PM	Helium valve closed
12/12/2012	2:13:51 PM	H2 valve closed
12/12/2012	2:13:51 PM	BCl3 valve closed
12/12/2012	2:13:51 PM	PH3 valve closed
12/12/2012	2:13:51 PM	SiCl4 pre valve closed
12/12/2012	2:13:51 PM	SiCl4 post valve closed
12/12/2012	2:13:52 PM	Main Vac valve closed
12/12/2012	2:13:52 PM	Bypass valve closed
12/12/2012	2:13:52 PM	Bubbler valve closed
12/12/2012	2:13:52 PM	Helium MFC set to  0.000000
12/12/2012	2:13:52 PM	H2 MFC set to  0.000000
12/12/2012	2:13:52 PM	BCl3 MFC set to  0.000000
12/12/2012	2:13:52 PM	PH3 MFC set to  0.000000
12/12/2012	2:13:52 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:13:52 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:13:52 PM	Tube furnace set to 0
12/12/2012	2:13:55 PM	Helium valve closed
12/12/2012	2:13:55 PM	BCl3 valve closed
12/12/2012	2:13:55 PM	PH3 valve closed
12/12/2012	2:13:55 PM	SiCl4 pre valve closed
12/12/2012	2:13:55 PM	SiCl4 post valve closed
12/12/2012	2:13:55 PM	Main Vac valve closed
12/12/2012	2:13:55 PM	Bypass valve closed
12/12/2012	2:13:55 PM	Bubbler valve closed
12/12/2012	2:13:55 PM	H2 valve opened
12/12/2012	2:13:55 PM	Helium MFC set to  0.000000
12/12/2012	2:13:55 PM	H2 MFC set to  500.000000
12/12/2012	2:13:55 PM	BCl3 MFC set to  0.000000
12/12/2012	2:13:55 PM	PH3 MFC set to  0.000000
12/12/2012	2:13:55 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:13:55 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:13:55 PM	Tube furnace set to 0
12/12/2012	2:15:07 PM	Helium valve closed
12/12/2012	2:15:07 PM	BCl3 valve closed
12/12/2012	2:15:07 PM	PH3 valve closed
12/12/2012	2:15:07 PM	SiCl4 pre valve closed
12/12/2012	2:15:07 PM	SiCl4 post valve closed
12/12/2012	2:15:07 PM	Main Vac valve closed
12/12/2012	2:15:07 PM	Bypass valve closed
12/12/2012	2:15:07 PM	H2 valve opened
12/12/2012	2:15:07 PM	Bubbler valve opened
12/12/2012	2:15:07 PM	Helium MFC set to  0.000000
12/12/2012	2:15:07 PM	H2 MFC set to  500.000000
12/12/2012	2:15:07 PM	BCl3 MFC set to  0.000000
12/12/2012	2:15:07 PM	PH3 MFC set to  0.000000
12/12/2012	2:15:07 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:15:07 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:15:07 PM	Tube furnace set to 0
12/12/2012	2:15:08 PM	Helium valve closed
12/12/2012	2:15:08 PM	BCl3 valve closed
12/12/2012	2:15:08 PM	PH3 valve closed
12/12/2012	2:15:08 PM	SiCl4 pre valve closed
12/12/2012	2:15:08 PM	SiCl4 post valve closed
12/12/2012	2:15:08 PM	Main Vac valve closed
12/12/2012	2:15:08 PM	Bypass valve closed
12/12/2012	2:15:08 PM	H2 valve opened
12/12/2012	2:15:08 PM	Bubbler valve opened
12/12/2012	2:15:08 PM	Helium MFC set to  0.000000
12/12/2012	2:15:08 PM	H2 MFC set to  500.000000
12/12/2012	2:15:08 PM	BCl3 MFC set to  0.000000
12/12/2012	2:15:08 PM	PH3 MFC set to  0.000000
12/12/2012	2:15:08 PM	SiCl4 MFC set to  0.000000
12/12/2012	2:15:08 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:15:08 PM	Tube furnace set to 1000
12/12/2012	2:35:08 PM	Helium valve closed
12/12/2012	2:35:08 PM	PH3 valve closed
12/12/2012	2:35:08 PM	Main Vac valve closed
12/12/2012	2:35:08 PM	Bypass valve closed
12/12/2012	2:35:08 PM	H2 valve opened
12/12/2012	2:35:08 PM	BCl3 valve opened
12/12/2012	2:35:08 PM	SiCl4 pre valve opened
12/12/2012	2:35:08 PM	SiCl4 post valve opened
12/12/2012	2:35:08 PM	Bubbler valve opened
12/12/2012	2:35:08 PM	Helium MFC set to  0.000000
12/12/2012	2:35:08 PM	H2 MFC set to  450.000000
12/12/2012	2:35:08 PM	BCl3 MFC set to  20.000000
12/12/2012	2:35:08 PM	PH3 MFC set to  0.000000
12/12/2012	2:35:08 PM	SiCl4 MFC set to  50.000000
12/12/2012	2:35:08 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:35:08 PM	Tube furnace set to 1000
12/12/2012	2:40:08 PM	Helium valve closed
12/12/2012	2:40:08 PM	PH3 valve closed
12/12/2012	2:40:08 PM	Main Vac valve closed
12/12/2012	2:40:08 PM	Bypass valve closed
12/12/2012	2:40:08 PM	H2 valve opened
12/12/2012	2:40:09 PM	BCl3 valve opened
12/12/2012	2:40:09 PM	SiCl4 pre valve opened
12/12/2012	2:40:09 PM	SiCl4 post valve opened
12/12/2012	2:40:09 PM	Bubbler valve opened
12/12/2012	2:40:09 PM	Helium MFC set to  0.000000
12/12/2012	2:40:09 PM	H2 MFC set to  450.000000
12/12/2012	2:40:09 PM	BCl3 MFC set to  0.750000
12/12/2012	2:40:09 PM	PH3 MFC set to  0.000000
12/12/2012	2:40:09 PM	SiCl4 MFC set to  50.000000
12/12/2012	2:40:09 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	2:40:09 PM	Tube furnace set to 1000
12/12/2012	3:10:09 PM	Helium valve closed
12/12/2012	3:10:09 PM	BCl3 valve closed
12/12/2012	3:10:09 PM	Main Vac valve closed
12/12/2012	3:10:09 PM	Bypass valve closed
12/12/2012	3:10:09 PM	H2 valve opened
12/12/2012	3:10:09 PM	PH3 valve opened
12/12/2012	3:10:09 PM	SiCl4 pre valve opened
12/12/2012	3:10:09 PM	SiCl4 post valve opened
12/12/2012	3:10:09 PM	Bubbler valve opened
12/12/2012	3:10:09 PM	Helium MFC set to  0.000000
12/12/2012	3:10:09 PM	H2 MFC set to  450.000000
12/12/2012	3:10:09 PM	BCl3 MFC set to  0.000000
12/12/2012	3:10:09 PM	PH3 MFC set to  3.000000
12/12/2012	3:10:09 PM	SiCl4 MFC set to  50.000000
12/12/2012	3:10:09 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:10:09 PM	Tube furnace set to 1000
12/12/2012	3:10:29 PM	Helium valve closed
12/12/2012	3:10:29 PM	BCl3 valve closed
12/12/2012	3:10:29 PM	Main Vac valve closed
12/12/2012	3:10:29 PM	Bypass valve closed
12/12/2012	3:10:29 PM	H2 valve opened
12/12/2012	3:10:29 PM	PH3 valve opened
12/12/2012	3:10:29 PM	SiCl4 pre valve opened
12/12/2012	3:10:29 PM	SiCl4 post valve opened
12/12/2012	3:10:29 PM	Bubbler valve opened
12/12/2012	3:10:29 PM	Helium MFC set to  0.000000
12/12/2012	3:10:29 PM	H2 MFC set to  450.000000
12/12/2012	3:10:29 PM	BCl3 MFC set to  0.000000
12/12/2012	3:10:29 PM	PH3 MFC set to  20.000000
12/12/2012	3:10:29 PM	SiCl4 MFC set to  50.000000
12/12/2012	3:10:29 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:10:29 PM	Tube furnace set to 1000
12/12/2012	3:10:49 PM	Helium valve closed
12/12/2012	3:10:49 PM	BCl3 valve closed
12/12/2012	3:10:49 PM	PH3 valve closed
12/12/2012	3:10:49 PM	SiCl4 pre valve closed
12/12/2012	3:10:49 PM	SiCl4 post valve closed
12/12/2012	3:10:49 PM	Main Vac valve closed
12/12/2012	3:10:49 PM	Bypass valve closed
12/12/2012	3:10:49 PM	H2 valve opened
12/12/2012	3:10:49 PM	Bubbler valve opened
12/12/2012	3:10:49 PM	Helium MFC set to  0.000000
12/12/2012	3:10:49 PM	H2 MFC set to  500.000000
12/12/2012	3:10:49 PM	BCl3 MFC set to  0.000000
12/12/2012	3:10:49 PM	PH3 MFC set to  0.000000
12/12/2012	3:10:49 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:10:49 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:10:49 PM	Tube furnace set to 950
12/12/2012	3:12:49 PM	Helium valve closed
12/12/2012	3:12:49 PM	BCl3 valve closed
12/12/2012	3:12:49 PM	PH3 valve closed
12/12/2012	3:12:49 PM	SiCl4 pre valve closed
12/12/2012	3:12:49 PM	SiCl4 post valve closed
12/12/2012	3:12:49 PM	Main Vac valve closed
12/12/2012	3:12:49 PM	Bypass valve closed
12/12/2012	3:12:49 PM	H2 valve opened
12/12/2012	3:12:49 PM	Bubbler valve opened
12/12/2012	3:12:49 PM	Helium MFC set to  0.000000
12/12/2012	3:12:49 PM	H2 MFC set to  500.000000
12/12/2012	3:12:49 PM	BCl3 MFC set to  0.000000
12/12/2012	3:12:49 PM	PH3 MFC set to  0.000000
12/12/2012	3:12:49 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:12:49 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:12:50 PM	Tube furnace set to 900
12/12/2012	3:14:50 PM	Helium valve closed
12/12/2012	3:14:50 PM	BCl3 valve closed
12/12/2012	3:14:50 PM	PH3 valve closed
12/12/2012	3:14:50 PM	SiCl4 pre valve closed
12/12/2012	3:14:50 PM	SiCl4 post valve closed
12/12/2012	3:14:50 PM	Main Vac valve closed
12/12/2012	3:14:50 PM	Bypass valve closed
12/12/2012	3:14:50 PM	H2 valve opened
12/12/2012	3:14:50 PM	Bubbler valve opened
12/12/2012	3:14:50 PM	Helium MFC set to  0.000000
12/12/2012	3:14:50 PM	H2 MFC set to  500.000000
12/12/2012	3:14:50 PM	BCl3 MFC set to  0.000000
12/12/2012	3:14:50 PM	PH3 MFC set to  0.000000
12/12/2012	3:14:50 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:14:50 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:14:50 PM	Tube furnace set to 850
12/12/2012	3:16:50 PM	H2 valve closed
12/12/2012	3:16:50 PM	BCl3 valve closed
12/12/2012	3:16:50 PM	PH3 valve closed
12/12/2012	3:16:50 PM	SiCl4 pre valve closed
12/12/2012	3:16:50 PM	SiCl4 post valve closed
12/12/2012	3:16:50 PM	Main Vac valve closed
12/12/2012	3:16:50 PM	Bypass valve closed
12/12/2012	3:16:50 PM	Helium valve opened
12/12/2012	3:16:50 PM	Bubbler valve opened
12/12/2012	3:16:50 PM	Helium MFC set to  500.000000
12/12/2012	3:16:50 PM	H2 MFC set to  0.000000
12/12/2012	3:16:50 PM	BCl3 MFC set to  0.000000
12/12/2012	3:16:50 PM	PH3 MFC set to  0.000000
12/12/2012	3:16:50 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:16:50 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:16:50 PM	Tube furnace set to 800
12/12/2012	3:18:50 PM	H2 valve closed
12/12/2012	3:18:50 PM	BCl3 valve closed
12/12/2012	3:18:50 PM	PH3 valve closed
12/12/2012	3:18:50 PM	SiCl4 pre valve closed
12/12/2012	3:18:50 PM	SiCl4 post valve closed
12/12/2012	3:18:50 PM	Main Vac valve closed
12/12/2012	3:18:50 PM	Bypass valve closed
12/12/2012	3:18:50 PM	Helium valve opened
12/12/2012	3:18:50 PM	Bubbler valve opened
12/12/2012	3:18:50 PM	Helium MFC set to  500.000000
12/12/2012	3:18:50 PM	H2 MFC set to  0.000000
12/12/2012	3:18:50 PM	BCl3 MFC set to  0.000000
12/12/2012	3:18:50 PM	PH3 MFC set to  0.000000
12/12/2012	3:18:50 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:18:50 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:18:50 PM	Tube furnace set to 750
12/12/2012	3:20:50 PM	H2 valve closed
12/12/2012	3:20:50 PM	BCl3 valve closed
12/12/2012	3:20:50 PM	PH3 valve closed
12/12/2012	3:20:50 PM	SiCl4 pre valve closed
12/12/2012	3:20:50 PM	SiCl4 post valve closed
12/12/2012	3:20:50 PM	Main Vac valve closed
12/12/2012	3:20:50 PM	Bypass valve closed
12/12/2012	3:20:50 PM	Helium valve opened
12/12/2012	3:20:50 PM	Bubbler valve opened
12/12/2012	3:20:50 PM	Helium MFC set to  500.000000
12/12/2012	3:20:50 PM	H2 MFC set to  0.000000
12/12/2012	3:20:50 PM	BCl3 MFC set to  0.000000
12/12/2012	3:20:50 PM	PH3 MFC set to  0.000000
12/12/2012	3:20:50 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:20:50 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:20:51 PM	Tube furnace set to 0
12/12/2012	3:36:42 PM	Helium valve closed
12/12/2012	3:36:42 PM	H2 valve closed
12/12/2012	3:36:42 PM	BCl3 valve closed
12/12/2012	3:36:42 PM	PH3 valve closed
12/12/2012	3:36:42 PM	SiCl4 pre valve closed
12/12/2012	3:36:42 PM	SiCl4 post valve closed
12/12/2012	3:36:42 PM	Main Vac valve closed
12/12/2012	3:36:42 PM	Bypass valve closed
12/12/2012	3:36:42 PM	Bubbler valve closed
12/12/2012	3:36:42 PM	Helium MFC set to  0.000000
12/12/2012	3:36:42 PM	H2 MFC set to  0.000000
12/12/2012	3:36:42 PM	BCl3 MFC set to  0.000000
12/12/2012	3:36:42 PM	PH3 MFC set to  0.000000
12/12/2012	3:36:42 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:36:42 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:36:42 PM	Tube furnace set to 0
12/12/2012	3:36:43 PM	Helium valve closed
12/12/2012	3:36:43 PM	H2 valve closed
12/12/2012	3:36:43 PM	BCl3 valve closed
12/12/2012	3:36:43 PM	PH3 valve closed
12/12/2012	3:36:43 PM	SiCl4 pre valve closed
12/12/2012	3:36:43 PM	SiCl4 post valve closed
12/12/2012	3:36:43 PM	Main Vac valve closed
12/12/2012	3:36:43 PM	Bubbler valve closed
12/12/2012	3:36:43 PM	Bypass valve opened
12/12/2012	3:36:43 PM	Helium MFC set to  0.000000
12/12/2012	3:36:43 PM	H2 MFC set to  0.000000
12/12/2012	3:36:43 PM	BCl3 MFC set to  0.000000
12/12/2012	3:36:43 PM	PH3 MFC set to  0.000000
12/12/2012	3:36:43 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:36:43 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:36:43 PM	Tube furnace set to 0
12/12/2012	3:37:45 PM	Helium valve closed
12/12/2012	3:37:45 PM	H2 valve closed
12/12/2012	3:37:45 PM	BCl3 valve closed
12/12/2012	3:37:45 PM	PH3 valve closed
12/12/2012	3:37:45 PM	SiCl4 pre valve closed
12/12/2012	3:37:45 PM	SiCl4 post valve closed
12/12/2012	3:37:45 PM	Main Vac valve closed
12/12/2012	3:37:45 PM	Bubbler valve closed
12/12/2012	3:37:45 PM	Bypass valve opened
12/12/2012	3:37:45 PM	Helium MFC set to  0.000000
12/12/2012	3:37:45 PM	H2 MFC set to  0.000000
12/12/2012	3:37:45 PM	BCl3 MFC set to  0.000000
12/12/2012	3:37:45 PM	PH3 MFC set to  0.000000
12/12/2012	3:37:45 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:37:45 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:37:45 PM	Tube furnace set to 0
12/12/2012	3:38:45 PM	Helium valve closed
12/12/2012	3:38:45 PM	H2 valve closed
12/12/2012	3:38:45 PM	BCl3 valve closed
12/12/2012	3:38:45 PM	PH3 valve closed
12/12/2012	3:38:45 PM	SiCl4 pre valve closed
12/12/2012	3:38:45 PM	SiCl4 post valve closed
12/12/2012	3:38:45 PM	Bypass valve closed
12/12/2012	3:38:45 PM	Bubbler valve closed
12/12/2012	3:38:45 PM	Main Vac valve opened
12/12/2012	3:38:45 PM	Helium MFC set to  0.000000
12/12/2012	3:38:45 PM	H2 MFC set to  0.000000
12/12/2012	3:38:45 PM	BCl3 MFC set to  0.000000
12/12/2012	3:38:45 PM	PH3 MFC set to  0.000000
12/12/2012	3:38:45 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:38:45 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:38:45 PM	Tube furnace set to 0
12/12/2012	3:38:46 PM	Run finished at 3:38 PM
12/12/2012	3:39:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/12/2012	3:39:20 PM	Recipe started at 3:39 PM
12/12/2012	3:39:21 PM	Helium valve closed
12/12/2012	3:39:21 PM	H2 valve closed
12/12/2012	3:39:21 PM	BCl3 valve closed
12/12/2012	3:39:21 PM	PH3 valve closed
12/12/2012	3:39:21 PM	SiCl4 pre valve closed
12/12/2012	3:39:21 PM	SiCl4 post valve closed
12/12/2012	3:39:21 PM	Main Vac valve closed
12/12/2012	3:39:21 PM	Bypass valve closed
12/12/2012	3:39:21 PM	Bubbler valve closed
12/12/2012	3:39:21 PM	Helium MFC set to  0.000000
12/12/2012	3:39:21 PM	H2 MFC set to  0.000000
12/12/2012	3:39:21 PM	BCl3 MFC set to  0.000000
12/12/2012	3:39:21 PM	PH3 MFC set to  0.000000
12/12/2012	3:39:21 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:39:21 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:39:21 PM	Tube furnace set to 0
12/12/2012	3:39:24 PM	H2 valve closed
12/12/2012	3:39:24 PM	BCl3 valve closed
12/12/2012	3:39:24 PM	PH3 valve closed
12/12/2012	3:39:24 PM	SiCl4 pre valve closed
12/12/2012	3:39:24 PM	SiCl4 post valve closed
12/12/2012	3:39:24 PM	Main Vac valve closed
12/12/2012	3:39:24 PM	Bypass valve closed
12/12/2012	3:39:24 PM	Bubbler valve closed
12/12/2012	3:39:24 PM	Helium valve opened
12/12/2012	3:39:24 PM	Helium MFC set to  500.000000
12/12/2012	3:39:24 PM	H2 MFC set to  0.000000
12/12/2012	3:39:24 PM	BCl3 MFC set to  0.000000
12/12/2012	3:39:24 PM	PH3 MFC set to  0.000000
12/12/2012	3:39:24 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:39:24 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:39:24 PM	Tube furnace set to 0
12/12/2012	3:40:33 PM	Helium valve closed
12/12/2012	3:40:33 PM	H2 valve closed
12/12/2012	3:40:33 PM	BCl3 valve closed
12/12/2012	3:40:33 PM	PH3 valve closed
12/12/2012	3:40:33 PM	SiCl4 pre valve closed
12/12/2012	3:40:33 PM	SiCl4 post valve closed
12/12/2012	3:40:33 PM	Main Vac valve closed
12/12/2012	3:40:33 PM	Bypass valve closed
12/12/2012	3:40:33 PM	Bubbler valve closed
12/12/2012	3:40:33 PM	Helium MFC set to  0.000000
12/12/2012	3:40:33 PM	H2 MFC set to  0.000000
12/12/2012	3:40:33 PM	BCl3 MFC set to  0.000000
12/12/2012	3:40:33 PM	PH3 MFC set to  0.000000
12/12/2012	3:40:33 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:40:33 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:40:33 PM	Tube furnace set to 0
12/12/2012	3:40:34 PM	Run finished at 3:40 PM
12/12/2012	3:40:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/12/2012	3:46:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/12/2012	3:46:27 PM	Recipe started at 3:46 PM
12/12/2012	3:46:27 PM	Helium valve closed
12/12/2012	3:46:27 PM	H2 valve closed
12/12/2012	3:46:27 PM	BCl3 valve closed
12/12/2012	3:46:27 PM	PH3 valve closed
12/12/2012	3:46:27 PM	SiCl4 pre valve closed
12/12/2012	3:46:27 PM	SiCl4 post valve closed
12/12/2012	3:46:27 PM	Main Vac valve closed
12/12/2012	3:46:27 PM	Bubbler valve closed
12/12/2012	3:46:27 PM	Bypass valve opened
12/12/2012	3:46:27 PM	Helium MFC set to  0.000000
12/12/2012	3:46:27 PM	H2 MFC set to  0.000000
12/12/2012	3:46:27 PM	BCl3 MFC set to  0.000000
12/12/2012	3:46:27 PM	PH3 MFC set to  0.000000
12/12/2012	3:46:27 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:46:27 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:46:27 PM	Tube furnace set to 0
12/12/2012	3:47:54 PM	Helium valve closed
12/12/2012	3:47:54 PM	H2 valve closed
12/12/2012	3:47:54 PM	BCl3 valve closed
12/12/2012	3:47:54 PM	PH3 valve closed
12/12/2012	3:47:54 PM	SiCl4 pre valve closed
12/12/2012	3:47:54 PM	SiCl4 post valve closed
12/12/2012	3:47:54 PM	Main Vac valve closed
12/12/2012	3:47:54 PM	Bubbler valve closed
12/12/2012	3:47:54 PM	Bypass valve opened
12/12/2012	3:47:54 PM	Helium MFC set to  0.000000
12/12/2012	3:47:54 PM	H2 MFC set to  0.000000
12/12/2012	3:47:54 PM	BCl3 MFC set to  0.000000
12/12/2012	3:47:54 PM	PH3 MFC set to  0.000000
12/12/2012	3:47:54 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:47:54 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:47:54 PM	Tube furnace set to 0
12/12/2012	3:48:54 PM	Helium valve closed
12/12/2012	3:48:54 PM	H2 valve closed
12/12/2012	3:48:54 PM	BCl3 valve closed
12/12/2012	3:48:54 PM	PH3 valve closed
12/12/2012	3:48:54 PM	SiCl4 pre valve closed
12/12/2012	3:48:54 PM	SiCl4 post valve closed
12/12/2012	3:48:54 PM	Bypass valve closed
12/12/2012	3:48:54 PM	Bubbler valve closed
12/12/2012	3:48:54 PM	Main Vac valve opened
12/12/2012	3:48:54 PM	Helium MFC set to  0.000000
12/12/2012	3:48:54 PM	H2 MFC set to  0.000000
12/12/2012	3:48:54 PM	BCl3 MFC set to  0.000000
12/12/2012	3:48:54 PM	PH3 MFC set to  0.000000
12/12/2012	3:48:54 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:48:54 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:48:54 PM	Tube furnace set to 0
12/12/2012	3:48:55 PM	Run finished at 3:48 PM
12/12/2012	3:48:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/12/2012	3:51:40 PM	Recipe started at 3:51 PM
12/12/2012	3:51:40 PM	Helium valve closed
12/12/2012	3:51:40 PM	H2 valve closed
12/12/2012	3:51:40 PM	BCl3 valve closed
12/12/2012	3:51:40 PM	PH3 valve closed
12/12/2012	3:51:40 PM	SiCl4 pre valve closed
12/12/2012	3:51:40 PM	SiCl4 post valve closed
12/12/2012	3:51:40 PM	Bypass valve closed
12/12/2012	3:51:40 PM	Bubbler valve closed
12/12/2012	3:51:40 PM	Main Vac valve opened
12/12/2012	3:51:40 PM	Helium MFC set to  0.000000
12/12/2012	3:51:40 PM	H2 MFC set to  0.000000
12/12/2012	3:51:40 PM	BCl3 MFC set to  0.000000
12/12/2012	3:51:40 PM	PH3 MFC set to  0.000000
12/12/2012	3:51:40 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:51:40 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:51:40 PM	Tube furnace set to 0
12/12/2012	3:52:10 PM	H2 valve closed
12/12/2012	3:52:10 PM	BCl3 valve closed
12/12/2012	3:52:10 PM	PH3 valve closed
12/12/2012	3:52:10 PM	SiCl4 pre valve closed
12/12/2012	3:52:10 PM	SiCl4 post valve closed
12/12/2012	3:52:10 PM	Bypass valve closed
12/12/2012	3:52:10 PM	Bubbler valve closed
12/12/2012	3:52:10 PM	Helium valve opened
12/12/2012	3:52:10 PM	Main Vac valve opened
12/12/2012	3:52:10 PM	Helium MFC set to  20.000000
12/12/2012	3:52:10 PM	H2 MFC set to  0.000000
12/12/2012	3:52:10 PM	BCl3 MFC set to  0.000000
12/12/2012	3:52:10 PM	PH3 MFC set to  0.000000
12/12/2012	3:52:10 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:52:10 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:52:10 PM	Tube furnace set to 0
12/12/2012	3:52:40 PM	Helium valve closed
12/12/2012	3:52:40 PM	H2 valve closed
12/12/2012	3:52:40 PM	BCl3 valve closed
12/12/2012	3:52:40 PM	PH3 valve closed
12/12/2012	3:52:40 PM	SiCl4 pre valve closed
12/12/2012	3:52:40 PM	SiCl4 post valve closed
12/12/2012	3:52:40 PM	Bypass valve closed
12/12/2012	3:52:40 PM	Bubbler valve closed
12/12/2012	3:52:41 PM	Main Vac valve opened
12/12/2012	3:52:41 PM	Helium MFC set to  0.000000
12/12/2012	3:52:41 PM	H2 MFC set to  0.000000
12/12/2012	3:52:41 PM	BCl3 MFC set to  0.000000
12/12/2012	3:52:41 PM	PH3 MFC set to  0.000000
12/12/2012	3:52:41 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:52:41 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:52:41 PM	Tube furnace set to 0
12/12/2012	3:53:11 PM	H2 valve closed
12/12/2012	3:53:11 PM	BCl3 valve closed
12/12/2012	3:53:11 PM	PH3 valve closed
12/12/2012	3:53:11 PM	SiCl4 pre valve closed
12/12/2012	3:53:11 PM	SiCl4 post valve closed
12/12/2012	3:53:11 PM	Bypass valve closed
12/12/2012	3:53:11 PM	Bubbler valve closed
12/12/2012	3:53:11 PM	Helium valve opened
12/12/2012	3:53:11 PM	Main Vac valve opened
12/12/2012	3:53:11 PM	Helium MFC set to  20.000000
12/12/2012	3:53:11 PM	H2 MFC set to  0.000000
12/12/2012	3:53:11 PM	BCl3 MFC set to  0.000000
12/12/2012	3:53:11 PM	PH3 MFC set to  0.000000
12/12/2012	3:53:11 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:53:11 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:53:11 PM	Tube furnace set to 0
12/12/2012	3:53:41 PM	Helium valve closed
12/12/2012	3:53:41 PM	H2 valve closed
12/12/2012	3:53:41 PM	BCl3 valve closed
12/12/2012	3:53:41 PM	PH3 valve closed
12/12/2012	3:53:41 PM	SiCl4 pre valve closed
12/12/2012	3:53:41 PM	SiCl4 post valve closed
12/12/2012	3:53:41 PM	Bypass valve closed
12/12/2012	3:53:41 PM	Bubbler valve closed
12/12/2012	3:53:41 PM	Main Vac valve opened
12/12/2012	3:53:41 PM	Helium MFC set to  0.000000
12/12/2012	3:53:41 PM	H2 MFC set to  0.000000
12/12/2012	3:53:41 PM	BCl3 MFC set to  0.000000
12/12/2012	3:53:41 PM	PH3 MFC set to  0.000000
12/12/2012	3:53:41 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:53:41 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:53:41 PM	Tube furnace set to 0
12/12/2012	3:54:11 PM	H2 valve closed
12/12/2012	3:54:11 PM	BCl3 valve closed
12/12/2012	3:54:11 PM	PH3 valve closed
12/12/2012	3:54:11 PM	SiCl4 pre valve closed
12/12/2012	3:54:11 PM	SiCl4 post valve closed
12/12/2012	3:54:11 PM	Bypass valve closed
12/12/2012	3:54:11 PM	Bubbler valve closed
12/12/2012	3:54:11 PM	Helium valve opened
12/12/2012	3:54:11 PM	Main Vac valve opened
12/12/2012	3:54:11 PM	Helium MFC set to  20.000000
12/12/2012	3:54:11 PM	H2 MFC set to  0.000000
12/12/2012	3:54:11 PM	BCl3 MFC set to  0.000000
12/12/2012	3:54:11 PM	PH3 MFC set to  0.000000
12/12/2012	3:54:11 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:54:11 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:54:11 PM	Tube furnace set to 0
12/12/2012	3:54:41 PM	Helium valve closed
12/12/2012	3:54:41 PM	H2 valve closed
12/12/2012	3:54:41 PM	BCl3 valve closed
12/12/2012	3:54:41 PM	PH3 valve closed
12/12/2012	3:54:41 PM	SiCl4 pre valve closed
12/12/2012	3:54:41 PM	SiCl4 post valve closed
12/12/2012	3:54:41 PM	Bypass valve closed
12/12/2012	3:54:41 PM	Bubbler valve closed
12/12/2012	3:54:41 PM	Main Vac valve opened
12/12/2012	3:54:41 PM	Helium MFC set to  0.000000
12/12/2012	3:54:41 PM	H2 MFC set to  0.000000
12/12/2012	3:54:42 PM	BCl3 MFC set to  0.000000
12/12/2012	3:54:42 PM	PH3 MFC set to  0.000000
12/12/2012	3:54:42 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:54:42 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:54:42 PM	Tube furnace set to 0
12/12/2012	3:55:12 PM	H2 valve closed
12/12/2012	3:55:12 PM	BCl3 valve closed
12/12/2012	3:55:12 PM	PH3 valve closed
12/12/2012	3:55:12 PM	SiCl4 pre valve closed
12/12/2012	3:55:12 PM	SiCl4 post valve closed
12/12/2012	3:55:12 PM	Bypass valve closed
12/12/2012	3:55:12 PM	Bubbler valve closed
12/12/2012	3:55:12 PM	Helium valve opened
12/12/2012	3:55:12 PM	Main Vac valve opened
12/12/2012	3:55:12 PM	Helium MFC set to  20.000000
12/12/2012	3:55:12 PM	H2 MFC set to  0.000000
12/12/2012	3:55:12 PM	BCl3 MFC set to  0.000000
12/12/2012	3:55:12 PM	PH3 MFC set to  0.000000
12/12/2012	3:55:12 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:55:12 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:55:12 PM	Tube furnace set to 0
12/12/2012	3:55:42 PM	Helium valve closed
12/12/2012	3:55:42 PM	H2 valve closed
12/12/2012	3:55:42 PM	BCl3 valve closed
12/12/2012	3:55:42 PM	PH3 valve closed
12/12/2012	3:55:42 PM	SiCl4 pre valve closed
12/12/2012	3:55:42 PM	SiCl4 post valve closed
12/12/2012	3:55:42 PM	Bypass valve closed
12/12/2012	3:55:42 PM	Bubbler valve closed
12/12/2012	3:55:42 PM	Main Vac valve opened
12/12/2012	3:55:42 PM	Helium MFC set to  0.000000
12/12/2012	3:55:42 PM	H2 MFC set to  0.000000
12/12/2012	3:55:42 PM	BCl3 MFC set to  0.000000
12/12/2012	3:55:42 PM	PH3 MFC set to  0.000000
12/12/2012	3:55:42 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:55:42 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:55:42 PM	Tube furnace set to 0
12/12/2012	3:56:12 PM	H2 valve closed
12/12/2012	3:56:12 PM	BCl3 valve closed
12/12/2012	3:56:12 PM	PH3 valve closed
12/12/2012	3:56:12 PM	SiCl4 pre valve closed
12/12/2012	3:56:12 PM	SiCl4 post valve closed
12/12/2012	3:56:12 PM	Bypass valve closed
12/12/2012	3:56:12 PM	Bubbler valve closed
12/12/2012	3:56:12 PM	Helium valve opened
12/12/2012	3:56:12 PM	Main Vac valve opened
12/12/2012	3:56:12 PM	Helium MFC set to  20.000000
12/12/2012	3:56:12 PM	H2 MFC set to  0.000000
12/12/2012	3:56:12 PM	BCl3 MFC set to  0.000000
12/12/2012	3:56:12 PM	PH3 MFC set to  0.000000
12/12/2012	3:56:12 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:56:12 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:56:12 PM	Tube furnace set to 0
12/12/2012	3:56:42 PM	Helium valve closed
12/12/2012	3:56:42 PM	H2 valve closed
12/12/2012	3:56:42 PM	BCl3 valve closed
12/12/2012	3:56:42 PM	PH3 valve closed
12/12/2012	3:56:42 PM	SiCl4 pre valve closed
12/12/2012	3:56:42 PM	SiCl4 post valve closed
12/12/2012	3:56:42 PM	Bypass valve closed
12/12/2012	3:56:42 PM	Bubbler valve closed
12/12/2012	3:56:42 PM	Main Vac valve opened
12/12/2012	3:56:42 PM	Helium MFC set to  0.000000
12/12/2012	3:56:42 PM	H2 MFC set to  0.000000
12/12/2012	3:56:42 PM	BCl3 MFC set to  0.000000
12/12/2012	3:56:43 PM	PH3 MFC set to  0.000000
12/12/2012	3:56:43 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:56:43 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:56:43 PM	Tube furnace set to 0
12/12/2012	3:57:13 PM	H2 valve closed
12/12/2012	3:57:13 PM	BCl3 valve closed
12/12/2012	3:57:13 PM	PH3 valve closed
12/12/2012	3:57:13 PM	SiCl4 pre valve closed
12/12/2012	3:57:13 PM	SiCl4 post valve closed
12/12/2012	3:57:13 PM	Bypass valve closed
12/12/2012	3:57:13 PM	Bubbler valve closed
12/12/2012	3:57:13 PM	Helium valve opened
12/12/2012	3:57:13 PM	Main Vac valve opened
12/12/2012	3:57:13 PM	Helium MFC set to  20.000000
12/12/2012	3:57:13 PM	H2 MFC set to  0.000000
12/12/2012	3:57:13 PM	BCl3 MFC set to  0.000000
12/12/2012	3:57:13 PM	PH3 MFC set to  0.000000
12/12/2012	3:57:13 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:57:13 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:57:13 PM	Tube furnace set to 0
12/12/2012	3:57:43 PM	Helium valve closed
12/12/2012	3:57:43 PM	H2 valve closed
12/12/2012	3:57:43 PM	BCl3 valve closed
12/12/2012	3:57:43 PM	PH3 valve closed
12/12/2012	3:57:43 PM	SiCl4 pre valve closed
12/12/2012	3:57:43 PM	SiCl4 post valve closed
12/12/2012	3:57:43 PM	Bypass valve closed
12/12/2012	3:57:43 PM	Bubbler valve closed
12/12/2012	3:57:43 PM	Main Vac valve opened
12/12/2012	3:57:43 PM	Helium MFC set to  0.000000
12/12/2012	3:57:43 PM	H2 MFC set to  0.000000
12/12/2012	3:57:43 PM	BCl3 MFC set to  0.000000
12/12/2012	3:57:43 PM	PH3 MFC set to  0.000000
12/12/2012	3:57:43 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:57:43 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:57:43 PM	Tube furnace set to 0
12/12/2012	3:58:13 PM	H2 valve closed
12/12/2012	3:58:13 PM	BCl3 valve closed
12/12/2012	3:58:13 PM	PH3 valve closed
12/12/2012	3:58:13 PM	SiCl4 pre valve closed
12/12/2012	3:58:13 PM	SiCl4 post valve closed
12/12/2012	3:58:13 PM	Bypass valve closed
12/12/2012	3:58:13 PM	Bubbler valve closed
12/12/2012	3:58:13 PM	Helium valve opened
12/12/2012	3:58:13 PM	Main Vac valve opened
12/12/2012	3:58:13 PM	Helium MFC set to  20.000000
12/12/2012	3:58:13 PM	H2 MFC set to  0.000000
12/12/2012	3:58:13 PM	BCl3 MFC set to  0.000000
12/12/2012	3:58:13 PM	PH3 MFC set to  0.000000
12/12/2012	3:58:13 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:58:13 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:58:13 PM	Tube furnace set to 0
12/12/2012	3:58:43 PM	Helium valve closed
12/12/2012	3:58:43 PM	H2 valve closed
12/12/2012	3:58:43 PM	BCl3 valve closed
12/12/2012	3:58:43 PM	PH3 valve closed
12/12/2012	3:58:43 PM	SiCl4 pre valve closed
12/12/2012	3:58:43 PM	SiCl4 post valve closed
12/12/2012	3:58:43 PM	Bypass valve closed
12/12/2012	3:58:44 PM	Bubbler valve closed
12/12/2012	3:58:44 PM	Main Vac valve opened
12/12/2012	3:58:44 PM	Helium MFC set to  0.000000
12/12/2012	3:58:44 PM	H2 MFC set to  0.000000
12/12/2012	3:58:44 PM	BCl3 MFC set to  0.000000
12/12/2012	3:58:44 PM	PH3 MFC set to  0.000000
12/12/2012	3:58:44 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:58:44 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:58:44 PM	Tube furnace set to 0
12/12/2012	3:59:14 PM	H2 valve closed
12/12/2012	3:59:14 PM	BCl3 valve closed
12/12/2012	3:59:14 PM	PH3 valve closed
12/12/2012	3:59:14 PM	SiCl4 pre valve closed
12/12/2012	3:59:14 PM	SiCl4 post valve closed
12/12/2012	3:59:14 PM	Bypass valve closed
12/12/2012	3:59:14 PM	Bubbler valve closed
12/12/2012	3:59:14 PM	Helium valve opened
12/12/2012	3:59:14 PM	Main Vac valve opened
12/12/2012	3:59:14 PM	Helium MFC set to  20.000000
12/12/2012	3:59:14 PM	H2 MFC set to  0.000000
12/12/2012	3:59:14 PM	BCl3 MFC set to  0.000000
12/12/2012	3:59:14 PM	PH3 MFC set to  0.000000
12/12/2012	3:59:14 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:59:14 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:59:14 PM	Tube furnace set to 0
12/12/2012	3:59:44 PM	Helium valve closed
12/12/2012	3:59:44 PM	H2 valve closed
12/12/2012	3:59:44 PM	BCl3 valve closed
12/12/2012	3:59:44 PM	PH3 valve closed
12/12/2012	3:59:44 PM	SiCl4 pre valve closed
12/12/2012	3:59:44 PM	SiCl4 post valve closed
12/12/2012	3:59:44 PM	Bypass valve closed
12/12/2012	3:59:44 PM	Bubbler valve closed
12/12/2012	3:59:44 PM	Main Vac valve opened
12/12/2012	3:59:44 PM	Helium MFC set to  0.000000
12/12/2012	3:59:44 PM	H2 MFC set to  0.000000
12/12/2012	3:59:44 PM	BCl3 MFC set to  0.000000
12/12/2012	3:59:44 PM	PH3 MFC set to  0.000000
12/12/2012	3:59:44 PM	SiCl4 MFC set to  0.000000
12/12/2012	3:59:44 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	3:59:44 PM	Tube furnace set to 0
12/12/2012	4:00:14 PM	H2 valve closed
12/12/2012	4:00:14 PM	BCl3 valve closed
12/12/2012	4:00:14 PM	PH3 valve closed
12/12/2012	4:00:14 PM	SiCl4 pre valve closed
12/12/2012	4:00:14 PM	SiCl4 post valve closed
12/12/2012	4:00:14 PM	Bypass valve closed
12/12/2012	4:00:14 PM	Bubbler valve closed
12/12/2012	4:00:14 PM	Helium valve opened
12/12/2012	4:00:14 PM	Main Vac valve opened
12/12/2012	4:00:14 PM	Helium MFC set to  20.000000
12/12/2012	4:00:14 PM	H2 MFC set to  0.000000
12/12/2012	4:00:14 PM	BCl3 MFC set to  0.000000
12/12/2012	4:00:14 PM	PH3 MFC set to  0.000000
12/12/2012	4:00:14 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:00:14 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:00:14 PM	Tube furnace set to 0
12/12/2012	4:00:44 PM	Helium valve closed
12/12/2012	4:00:44 PM	H2 valve closed
12/12/2012	4:00:44 PM	BCl3 valve closed
12/12/2012	4:00:44 PM	PH3 valve closed
12/12/2012	4:00:44 PM	SiCl4 pre valve closed
12/12/2012	4:00:44 PM	SiCl4 post valve closed
12/12/2012	4:00:44 PM	Bypass valve closed
12/12/2012	4:00:44 PM	Bubbler valve closed
12/12/2012	4:00:44 PM	Main Vac valve opened
12/12/2012	4:00:44 PM	Helium MFC set to  0.000000
12/12/2012	4:00:45 PM	H2 MFC set to  0.000000
12/12/2012	4:00:45 PM	BCl3 MFC set to  0.000000
12/12/2012	4:00:45 PM	PH3 MFC set to  0.000000
12/12/2012	4:00:45 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:00:45 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:00:45 PM	Tube furnace set to 200
12/12/2012	4:01:15 PM	H2 valve closed
12/12/2012	4:01:15 PM	BCl3 valve closed
12/12/2012	4:01:15 PM	PH3 valve closed
12/12/2012	4:01:15 PM	SiCl4 pre valve closed
12/12/2012	4:01:15 PM	SiCl4 post valve closed
12/12/2012	4:01:15 PM	Bypass valve closed
12/12/2012	4:01:15 PM	Bubbler valve closed
12/12/2012	4:01:15 PM	Helium valve opened
12/12/2012	4:01:15 PM	Main Vac valve opened
12/12/2012	4:01:15 PM	Helium MFC set to  20.000000
12/12/2012	4:01:15 PM	H2 MFC set to  0.000000
12/12/2012	4:01:15 PM	BCl3 MFC set to  0.000000
12/12/2012	4:01:15 PM	PH3 MFC set to  0.000000
12/12/2012	4:01:15 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:01:15 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:01:15 PM	Tube furnace set to 200
12/12/2012	4:01:45 PM	Helium valve closed
12/12/2012	4:01:45 PM	H2 valve closed
12/12/2012	4:01:45 PM	BCl3 valve closed
12/12/2012	4:01:45 PM	PH3 valve closed
12/12/2012	4:01:45 PM	SiCl4 pre valve closed
12/12/2012	4:01:45 PM	SiCl4 post valve closed
12/12/2012	4:01:45 PM	Bypass valve closed
12/12/2012	4:01:45 PM	Bubbler valve closed
12/12/2012	4:01:45 PM	Main Vac valve opened
12/12/2012	4:01:45 PM	Helium MFC set to  0.000000
12/12/2012	4:01:45 PM	H2 MFC set to  0.000000
12/12/2012	4:01:45 PM	BCl3 MFC set to  0.000000
12/12/2012	4:01:45 PM	PH3 MFC set to  0.000000
12/12/2012	4:01:45 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:01:45 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:01:45 PM	Tube furnace set to 200
12/12/2012	4:02:15 PM	H2 valve closed
12/12/2012	4:02:15 PM	BCl3 valve closed
12/12/2012	4:02:15 PM	PH3 valve closed
12/12/2012	4:02:15 PM	SiCl4 pre valve closed
12/12/2012	4:02:15 PM	SiCl4 post valve closed
12/12/2012	4:02:15 PM	Bypass valve closed
12/12/2012	4:02:15 PM	Bubbler valve closed
12/12/2012	4:02:15 PM	Helium valve opened
12/12/2012	4:02:15 PM	Main Vac valve opened
12/12/2012	4:02:15 PM	Helium MFC set to  20.000000
12/12/2012	4:02:15 PM	H2 MFC set to  0.000000
12/12/2012	4:02:15 PM	BCl3 MFC set to  0.000000
12/12/2012	4:02:15 PM	PH3 MFC set to  0.000000
12/12/2012	4:02:15 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:02:15 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:02:15 PM	Tube furnace set to 200
12/12/2012	4:02:45 PM	Helium valve closed
12/12/2012	4:02:45 PM	H2 valve closed
12/12/2012	4:02:45 PM	BCl3 valve closed
12/12/2012	4:02:45 PM	PH3 valve closed
12/12/2012	4:02:45 PM	SiCl4 pre valve closed
12/12/2012	4:02:45 PM	SiCl4 post valve closed
12/12/2012	4:02:45 PM	Bypass valve closed
12/12/2012	4:02:45 PM	Bubbler valve closed
12/12/2012	4:02:45 PM	Main Vac valve opened
12/12/2012	4:02:45 PM	Helium MFC set to  0.000000
12/12/2012	4:02:45 PM	H2 MFC set to  0.000000
12/12/2012	4:02:45 PM	BCl3 MFC set to  0.000000
12/12/2012	4:02:46 PM	PH3 MFC set to  0.000000
12/12/2012	4:02:46 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:02:46 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:02:46 PM	Tube furnace set to 200
12/12/2012	4:03:16 PM	H2 valve closed
12/12/2012	4:03:16 PM	BCl3 valve closed
12/12/2012	4:03:16 PM	PH3 valve closed
12/12/2012	4:03:16 PM	SiCl4 pre valve closed
12/12/2012	4:03:16 PM	SiCl4 post valve closed
12/12/2012	4:03:16 PM	Bypass valve closed
12/12/2012	4:03:16 PM	Bubbler valve closed
12/12/2012	4:03:16 PM	Helium valve opened
12/12/2012	4:03:16 PM	Main Vac valve opened
12/12/2012	4:03:16 PM	Helium MFC set to  20.000000
12/12/2012	4:03:16 PM	H2 MFC set to  0.000000
12/12/2012	4:03:16 PM	BCl3 MFC set to  0.000000
12/12/2012	4:03:16 PM	PH3 MFC set to  0.000000
12/12/2012	4:03:16 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:03:16 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:03:16 PM	Tube furnace set to 200
12/12/2012	4:03:46 PM	Helium valve closed
12/12/2012	4:03:46 PM	H2 valve closed
12/12/2012	4:03:46 PM	BCl3 valve closed
12/12/2012	4:03:46 PM	PH3 valve closed
12/12/2012	4:03:46 PM	SiCl4 pre valve closed
12/12/2012	4:03:46 PM	SiCl4 post valve closed
12/12/2012	4:03:46 PM	Bypass valve closed
12/12/2012	4:03:46 PM	Bubbler valve closed
12/12/2012	4:03:46 PM	Main Vac valve opened
12/12/2012	4:03:46 PM	Helium MFC set to  0.000000
12/12/2012	4:03:46 PM	H2 MFC set to  0.000000
12/12/2012	4:03:46 PM	BCl3 MFC set to  0.000000
12/12/2012	4:03:46 PM	PH3 MFC set to  0.000000
12/12/2012	4:03:46 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:03:46 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:03:46 PM	Tube furnace set to 200
12/12/2012	4:04:16 PM	H2 valve closed
12/12/2012	4:04:16 PM	BCl3 valve closed
12/12/2012	4:04:16 PM	PH3 valve closed
12/12/2012	4:04:16 PM	SiCl4 pre valve closed
12/12/2012	4:04:16 PM	SiCl4 post valve closed
12/12/2012	4:04:16 PM	Bypass valve closed
12/12/2012	4:04:16 PM	Bubbler valve closed
12/12/2012	4:04:16 PM	Helium valve opened
12/12/2012	4:04:16 PM	Main Vac valve opened
12/12/2012	4:04:16 PM	Helium MFC set to  20.000000
12/12/2012	4:04:16 PM	H2 MFC set to  0.000000
12/12/2012	4:04:16 PM	BCl3 MFC set to  0.000000
12/12/2012	4:04:16 PM	PH3 MFC set to  0.000000
12/12/2012	4:04:16 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:04:16 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:04:16 PM	Tube furnace set to 200
12/12/2012	4:04:46 PM	Helium valve closed
12/12/2012	4:04:46 PM	H2 valve closed
12/12/2012	4:04:46 PM	BCl3 valve closed
12/12/2012	4:04:46 PM	PH3 valve closed
12/12/2012	4:04:46 PM	SiCl4 pre valve closed
12/12/2012	4:04:46 PM	SiCl4 post valve closed
12/12/2012	4:04:46 PM	Bypass valve closed
12/12/2012	4:04:46 PM	Bubbler valve closed
12/12/2012	4:04:46 PM	Main Vac valve opened
12/12/2012	4:04:46 PM	Helium MFC set to  0.000000
12/12/2012	4:04:46 PM	H2 MFC set to  0.000000
12/12/2012	4:04:46 PM	BCl3 MFC set to  0.000000
12/12/2012	4:04:46 PM	PH3 MFC set to  0.000000
12/12/2012	4:04:46 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:04:46 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:04:47 PM	Tube furnace set to 200
12/12/2012	4:05:17 PM	H2 valve closed
12/12/2012	4:05:17 PM	BCl3 valve closed
12/12/2012	4:05:17 PM	PH3 valve closed
12/12/2012	4:05:17 PM	SiCl4 pre valve closed
12/12/2012	4:05:17 PM	SiCl4 post valve closed
12/12/2012	4:05:17 PM	Bypass valve closed
12/12/2012	4:05:17 PM	Bubbler valve closed
12/12/2012	4:05:17 PM	Helium valve opened
12/12/2012	4:05:17 PM	Main Vac valve opened
12/12/2012	4:05:17 PM	Helium MFC set to  20.000000
12/12/2012	4:05:17 PM	H2 MFC set to  0.000000
12/12/2012	4:05:17 PM	BCl3 MFC set to  0.000000
12/12/2012	4:05:17 PM	PH3 MFC set to  0.000000
12/12/2012	4:05:17 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:05:17 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:05:17 PM	Tube furnace set to 200
12/12/2012	4:05:47 PM	Helium valve closed
12/12/2012	4:05:47 PM	H2 valve closed
12/12/2012	4:05:47 PM	BCl3 valve closed
12/12/2012	4:05:47 PM	PH3 valve closed
12/12/2012	4:05:47 PM	SiCl4 pre valve closed
12/12/2012	4:05:47 PM	SiCl4 post valve closed
12/12/2012	4:05:47 PM	Bypass valve closed
12/12/2012	4:05:47 PM	Bubbler valve closed
12/12/2012	4:05:47 PM	Main Vac valve opened
12/12/2012	4:05:47 PM	Helium MFC set to  0.000000
12/12/2012	4:05:47 PM	H2 MFC set to  0.000000
12/12/2012	4:05:47 PM	BCl3 MFC set to  0.000000
12/12/2012	4:05:47 PM	PH3 MFC set to  0.000000
12/12/2012	4:05:47 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:05:47 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:05:47 PM	Tube furnace set to 200
12/12/2012	4:06:17 PM	H2 valve closed
12/12/2012	4:06:17 PM	BCl3 valve closed
12/12/2012	4:06:17 PM	PH3 valve closed
12/12/2012	4:06:17 PM	SiCl4 pre valve closed
12/12/2012	4:06:17 PM	SiCl4 post valve closed
12/12/2012	4:06:17 PM	Bypass valve closed
12/12/2012	4:06:17 PM	Bubbler valve closed
12/12/2012	4:06:17 PM	Helium valve opened
12/12/2012	4:06:17 PM	Main Vac valve opened
12/12/2012	4:06:17 PM	Helium MFC set to  20.000000
12/12/2012	4:06:17 PM	H2 MFC set to  0.000000
12/12/2012	4:06:17 PM	BCl3 MFC set to  0.000000
12/12/2012	4:06:17 PM	PH3 MFC set to  0.000000
12/12/2012	4:06:17 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:06:17 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:06:17 PM	Tube furnace set to 200
12/12/2012	4:06:47 PM	Helium valve closed
12/12/2012	4:06:47 PM	H2 valve closed
12/12/2012	4:06:47 PM	BCl3 valve closed
12/12/2012	4:06:47 PM	PH3 valve closed
12/12/2012	4:06:47 PM	SiCl4 pre valve closed
12/12/2012	4:06:47 PM	SiCl4 post valve closed
12/12/2012	4:06:47 PM	Bypass valve closed
12/12/2012	4:06:47 PM	Bubbler valve closed
12/12/2012	4:06:47 PM	Main Vac valve opened
12/12/2012	4:06:47 PM	Helium MFC set to  0.000000
12/12/2012	4:06:47 PM	H2 MFC set to  0.000000
12/12/2012	4:06:47 PM	BCl3 MFC set to  0.000000
12/12/2012	4:06:47 PM	PH3 MFC set to  0.000000
12/12/2012	4:06:47 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:06:47 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:06:48 PM	Tube furnace set to 0
12/12/2012	4:06:49 PM	Run finished at 4:06 PM
12/12/2012	4:11:08 PM	Recipe started at 4:10 PM
12/12/2012	4:11:08 PM	Helium valve closed
12/12/2012	4:11:09 PM	H2 valve closed
12/12/2012	4:11:09 PM	BCl3 valve closed
12/12/2012	4:11:09 PM	PH3 valve closed
12/12/2012	4:11:09 PM	SiCl4 pre valve closed
12/12/2012	4:11:09 PM	SiCl4 post valve closed
12/12/2012	4:11:09 PM	Bypass valve closed
12/12/2012	4:11:09 PM	Bubbler valve closed
12/12/2012	4:11:09 PM	Main Vac valve opened
12/12/2012	4:11:09 PM	Helium MFC set to  0.000000
12/12/2012	4:11:09 PM	H2 MFC set to  0.000000
12/12/2012	4:11:09 PM	BCl3 MFC set to  0.000000
12/12/2012	4:11:09 PM	PH3 MFC set to  0.000000
12/12/2012	4:11:09 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:11:09 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:11:09 PM	Tube furnace set to 0
12/12/2012	4:11:39 PM	H2 valve closed
12/12/2012	4:11:39 PM	BCl3 valve closed
12/12/2012	4:11:39 PM	PH3 valve closed
12/12/2012	4:11:39 PM	SiCl4 pre valve closed
12/12/2012	4:11:39 PM	SiCl4 post valve closed
12/12/2012	4:11:39 PM	Bypass valve closed
12/12/2012	4:11:39 PM	Bubbler valve closed
12/12/2012	4:11:39 PM	Helium valve opened
12/12/2012	4:11:39 PM	Main Vac valve opened
12/12/2012	4:11:39 PM	Helium MFC set to  20.000000
12/12/2012	4:11:39 PM	H2 MFC set to  0.000000
12/12/2012	4:11:39 PM	BCl3 MFC set to  0.000000
12/12/2012	4:11:39 PM	PH3 MFC set to  0.000000
12/12/2012	4:11:39 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:11:39 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:11:39 PM	Tube furnace set to 0
12/12/2012	4:12:09 PM	Helium valve closed
12/12/2012	4:12:09 PM	H2 valve closed
12/12/2012	4:12:09 PM	BCl3 valve closed
12/12/2012	4:12:09 PM	PH3 valve closed
12/12/2012	4:12:09 PM	SiCl4 pre valve closed
12/12/2012	4:12:09 PM	SiCl4 post valve closed
12/12/2012	4:12:09 PM	Bypass valve closed
12/12/2012	4:12:09 PM	Bubbler valve closed
12/12/2012	4:12:09 PM	Main Vac valve opened
12/12/2012	4:12:09 PM	Helium MFC set to  0.000000
12/12/2012	4:12:09 PM	H2 MFC set to  0.000000
12/12/2012	4:12:09 PM	BCl3 MFC set to  0.000000
12/12/2012	4:12:09 PM	PH3 MFC set to  0.000000
12/12/2012	4:12:09 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:12:09 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:12:09 PM	Tube furnace set to 0
12/12/2012	4:12:39 PM	H2 valve closed
12/12/2012	4:12:39 PM	BCl3 valve closed
12/12/2012	4:12:39 PM	PH3 valve closed
12/12/2012	4:12:39 PM	SiCl4 pre valve closed
12/12/2012	4:12:39 PM	SiCl4 post valve closed
12/12/2012	4:12:39 PM	Bypass valve closed
12/12/2012	4:12:39 PM	Bubbler valve closed
12/12/2012	4:12:39 PM	Helium valve opened
12/12/2012	4:12:39 PM	Main Vac valve opened
12/12/2012	4:12:39 PM	Helium MFC set to  20.000000
12/12/2012	4:12:39 PM	H2 MFC set to  0.000000
12/12/2012	4:12:39 PM	BCl3 MFC set to  0.000000
12/12/2012	4:12:39 PM	PH3 MFC set to  0.000000
12/12/2012	4:12:39 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:12:39 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:12:39 PM	Tube furnace set to 0
12/12/2012	4:13:09 PM	Helium valve closed
12/12/2012	4:13:09 PM	H2 valve closed
12/12/2012	4:13:09 PM	BCl3 valve closed
12/12/2012	4:13:10 PM	PH3 valve closed
12/12/2012	4:13:10 PM	SiCl4 pre valve closed
12/12/2012	4:13:10 PM	SiCl4 post valve closed
12/12/2012	4:13:10 PM	Bypass valve closed
12/12/2012	4:13:10 PM	Bubbler valve closed
12/12/2012	4:13:10 PM	Main Vac valve opened
12/12/2012	4:13:10 PM	Helium MFC set to  0.000000
12/12/2012	4:13:10 PM	H2 MFC set to  0.000000
12/12/2012	4:13:10 PM	BCl3 MFC set to  0.000000
12/12/2012	4:13:10 PM	PH3 MFC set to  0.000000
12/12/2012	4:13:10 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:13:10 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:13:10 PM	Tube furnace set to 0
12/12/2012	4:13:40 PM	H2 valve closed
12/12/2012	4:13:40 PM	BCl3 valve closed
12/12/2012	4:13:40 PM	PH3 valve closed
12/12/2012	4:13:40 PM	SiCl4 pre valve closed
12/12/2012	4:13:40 PM	SiCl4 post valve closed
12/12/2012	4:13:40 PM	Bypass valve closed
12/12/2012	4:13:40 PM	Bubbler valve closed
12/12/2012	4:13:40 PM	Helium valve opened
12/12/2012	4:13:40 PM	Main Vac valve opened
12/12/2012	4:13:40 PM	Helium MFC set to  20.000000
12/12/2012	4:13:40 PM	H2 MFC set to  0.000000
12/12/2012	4:13:40 PM	BCl3 MFC set to  0.000000
12/12/2012	4:13:40 PM	PH3 MFC set to  0.000000
12/12/2012	4:13:40 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:13:40 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:13:40 PM	Tube furnace set to 0
12/12/2012	4:14:10 PM	Helium valve closed
12/12/2012	4:14:10 PM	H2 valve closed
12/12/2012	4:14:10 PM	BCl3 valve closed
12/12/2012	4:14:10 PM	PH3 valve closed
12/12/2012	4:14:10 PM	SiCl4 pre valve closed
12/12/2012	4:14:10 PM	SiCl4 post valve closed
12/12/2012	4:14:10 PM	Bypass valve closed
12/12/2012	4:14:10 PM	Bubbler valve closed
12/12/2012	4:14:10 PM	Main Vac valve opened
12/12/2012	4:14:10 PM	Helium MFC set to  0.000000
12/12/2012	4:14:10 PM	H2 MFC set to  0.000000
12/12/2012	4:14:10 PM	BCl3 MFC set to  0.000000
12/12/2012	4:14:10 PM	PH3 MFC set to  0.000000
12/12/2012	4:14:10 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:14:10 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:14:10 PM	Tube furnace set to 0
12/12/2012	4:14:40 PM	H2 valve closed
12/12/2012	4:14:40 PM	BCl3 valve closed
12/12/2012	4:14:40 PM	PH3 valve closed
12/12/2012	4:14:40 PM	SiCl4 pre valve closed
12/12/2012	4:14:40 PM	SiCl4 post valve closed
12/12/2012	4:14:40 PM	Bypass valve closed
12/12/2012	4:14:40 PM	Bubbler valve closed
12/12/2012	4:14:40 PM	Helium valve opened
12/12/2012	4:14:40 PM	Main Vac valve opened
12/12/2012	4:14:40 PM	Helium MFC set to  20.000000
12/12/2012	4:14:40 PM	H2 MFC set to  0.000000
12/12/2012	4:14:40 PM	BCl3 MFC set to  0.000000
12/12/2012	4:14:40 PM	PH3 MFC set to  0.000000
12/12/2012	4:14:40 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:14:40 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:14:40 PM	Tube furnace set to 0
12/12/2012	4:15:10 PM	Helium valve closed
12/12/2012	4:15:10 PM	H2 valve closed
12/12/2012	4:15:10 PM	BCl3 valve closed
12/12/2012	4:15:10 PM	PH3 valve closed
12/12/2012	4:15:10 PM	SiCl4 pre valve closed
12/12/2012	4:15:10 PM	SiCl4 post valve closed
12/12/2012	4:15:10 PM	Bypass valve closed
12/12/2012	4:15:11 PM	Bubbler valve closed
12/12/2012	4:15:11 PM	Main Vac valve opened
12/12/2012	4:15:11 PM	Helium MFC set to  0.000000
12/12/2012	4:15:11 PM	H2 MFC set to  0.000000
12/12/2012	4:15:11 PM	BCl3 MFC set to  0.000000
12/12/2012	4:15:11 PM	PH3 MFC set to  0.000000
12/12/2012	4:15:11 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:15:11 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:15:11 PM	Tube furnace set to 0
12/12/2012	4:15:41 PM	H2 valve closed
12/12/2012	4:15:41 PM	BCl3 valve closed
12/12/2012	4:15:41 PM	PH3 valve closed
12/12/2012	4:15:41 PM	SiCl4 pre valve closed
12/12/2012	4:15:41 PM	SiCl4 post valve closed
12/12/2012	4:15:41 PM	Bypass valve closed
12/12/2012	4:15:41 PM	Bubbler valve closed
12/12/2012	4:15:41 PM	Helium valve opened
12/12/2012	4:15:41 PM	Main Vac valve opened
12/12/2012	4:15:41 PM	Helium MFC set to  20.000000
12/12/2012	4:15:41 PM	H2 MFC set to  0.000000
12/12/2012	4:15:41 PM	BCl3 MFC set to  0.000000
12/12/2012	4:15:41 PM	PH3 MFC set to  0.000000
12/12/2012	4:15:41 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:15:41 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:15:41 PM	Tube furnace set to 0
12/12/2012	4:16:11 PM	Helium valve closed
12/12/2012	4:16:11 PM	H2 valve closed
12/12/2012	4:16:11 PM	BCl3 valve closed
12/12/2012	4:16:11 PM	PH3 valve closed
12/12/2012	4:16:11 PM	SiCl4 pre valve closed
12/12/2012	4:16:11 PM	SiCl4 post valve closed
12/12/2012	4:16:11 PM	Bypass valve closed
12/12/2012	4:16:11 PM	Bubbler valve closed
12/12/2012	4:16:11 PM	Main Vac valve opened
12/12/2012	4:16:11 PM	Helium MFC set to  0.000000
12/12/2012	4:16:11 PM	H2 MFC set to  0.000000
12/12/2012	4:16:11 PM	BCl3 MFC set to  0.000000
12/12/2012	4:16:11 PM	PH3 MFC set to  0.000000
12/12/2012	4:16:11 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:16:11 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:16:11 PM	Tube furnace set to 0
12/12/2012	4:16:41 PM	H2 valve closed
12/12/2012	4:16:41 PM	BCl3 valve closed
12/12/2012	4:16:41 PM	PH3 valve closed
12/12/2012	4:16:41 PM	SiCl4 pre valve closed
12/12/2012	4:16:41 PM	SiCl4 post valve closed
12/12/2012	4:16:41 PM	Bypass valve closed
12/12/2012	4:16:41 PM	Bubbler valve closed
12/12/2012	4:16:41 PM	Helium valve opened
12/12/2012	4:16:41 PM	Main Vac valve opened
12/12/2012	4:16:41 PM	Helium MFC set to  20.000000
12/12/2012	4:16:41 PM	H2 MFC set to  0.000000
12/12/2012	4:16:41 PM	BCl3 MFC set to  0.000000
12/12/2012	4:16:41 PM	PH3 MFC set to  0.000000
12/12/2012	4:16:41 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:16:41 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:16:41 PM	Tube furnace set to 0
12/12/2012	4:17:11 PM	Helium valve closed
12/12/2012	4:17:11 PM	H2 valve closed
12/12/2012	4:17:11 PM	BCl3 valve closed
12/12/2012	4:17:11 PM	PH3 valve closed
12/12/2012	4:17:11 PM	SiCl4 pre valve closed
12/12/2012	4:17:11 PM	SiCl4 post valve closed
12/12/2012	4:17:12 PM	Bypass valve closed
12/12/2012	4:17:12 PM	Bubbler valve closed
12/12/2012	4:17:12 PM	Main Vac valve opened
12/12/2012	4:17:12 PM	Helium MFC set to  0.000000
12/12/2012	4:17:12 PM	H2 MFC set to  0.000000
12/12/2012	4:17:12 PM	BCl3 MFC set to  0.000000
12/12/2012	4:17:12 PM	PH3 MFC set to  0.000000
12/12/2012	4:17:12 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:17:12 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:17:12 PM	Tube furnace set to 0
12/12/2012	4:17:42 PM	H2 valve closed
12/12/2012	4:17:42 PM	BCl3 valve closed
12/12/2012	4:17:42 PM	PH3 valve closed
12/12/2012	4:17:42 PM	SiCl4 pre valve closed
12/12/2012	4:17:42 PM	SiCl4 post valve closed
12/12/2012	4:17:42 PM	Bypass valve closed
12/12/2012	4:17:42 PM	Bubbler valve closed
12/12/2012	4:17:42 PM	Helium valve opened
12/12/2012	4:17:42 PM	Main Vac valve opened
12/12/2012	4:17:42 PM	Helium MFC set to  20.000000
12/12/2012	4:17:42 PM	H2 MFC set to  0.000000
12/12/2012	4:17:42 PM	BCl3 MFC set to  0.000000
12/12/2012	4:17:42 PM	PH3 MFC set to  0.000000
12/12/2012	4:17:42 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:17:42 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:17:42 PM	Tube furnace set to 0
12/12/2012	4:18:12 PM	Helium valve closed
12/12/2012	4:18:12 PM	H2 valve closed
12/12/2012	4:18:12 PM	BCl3 valve closed
12/12/2012	4:18:12 PM	PH3 valve closed
12/12/2012	4:18:12 PM	SiCl4 pre valve closed
12/12/2012	4:18:12 PM	SiCl4 post valve closed
12/12/2012	4:18:12 PM	Bypass valve closed
12/12/2012	4:18:12 PM	Bubbler valve closed
12/12/2012	4:18:12 PM	Main Vac valve opened
12/12/2012	4:18:12 PM	Helium MFC set to  0.000000
12/12/2012	4:18:12 PM	H2 MFC set to  0.000000
12/12/2012	4:18:12 PM	BCl3 MFC set to  0.000000
12/12/2012	4:18:12 PM	PH3 MFC set to  0.000000
12/12/2012	4:18:12 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:18:12 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:18:12 PM	Tube furnace set to 0
12/12/2012	4:18:42 PM	H2 valve closed
12/12/2012	4:18:42 PM	BCl3 valve closed
12/12/2012	4:18:42 PM	PH3 valve closed
12/12/2012	4:18:42 PM	SiCl4 pre valve closed
12/12/2012	4:18:42 PM	SiCl4 post valve closed
12/12/2012	4:18:42 PM	Bypass valve closed
12/12/2012	4:18:42 PM	Bubbler valve closed
12/12/2012	4:18:42 PM	Helium valve opened
12/12/2012	4:18:42 PM	Main Vac valve opened
12/12/2012	4:18:42 PM	Helium MFC set to  20.000000
12/12/2012	4:18:42 PM	H2 MFC set to  0.000000
12/12/2012	4:18:42 PM	BCl3 MFC set to  0.000000
12/12/2012	4:18:42 PM	PH3 MFC set to  0.000000
12/12/2012	4:18:42 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:18:42 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:18:42 PM	Tube furnace set to 0
12/12/2012	4:19:12 PM	Helium valve closed
12/12/2012	4:19:12 PM	H2 valve closed
12/12/2012	4:19:12 PM	BCl3 valve closed
12/12/2012	4:19:12 PM	PH3 valve closed
12/12/2012	4:19:12 PM	SiCl4 pre valve closed
12/12/2012	4:19:12 PM	SiCl4 post valve closed
12/12/2012	4:19:12 PM	Bypass valve closed
12/12/2012	4:19:12 PM	Bubbler valve closed
12/12/2012	4:19:13 PM	Main Vac valve opened
12/12/2012	4:19:13 PM	Helium MFC set to  0.000000
12/12/2012	4:19:13 PM	H2 MFC set to  0.000000
12/12/2012	4:19:13 PM	BCl3 MFC set to  0.000000
12/12/2012	4:19:13 PM	PH3 MFC set to  0.000000
12/12/2012	4:19:13 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:19:13 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:19:13 PM	Tube furnace set to 0
12/12/2012	4:19:43 PM	H2 valve closed
12/12/2012	4:19:43 PM	BCl3 valve closed
12/12/2012	4:19:43 PM	PH3 valve closed
12/12/2012	4:19:43 PM	SiCl4 pre valve closed
12/12/2012	4:19:43 PM	SiCl4 post valve closed
12/12/2012	4:19:43 PM	Bypass valve closed
12/12/2012	4:19:43 PM	Bubbler valve closed
12/12/2012	4:19:43 PM	Helium valve opened
12/12/2012	4:19:43 PM	Main Vac valve opened
12/12/2012	4:19:43 PM	Helium MFC set to  20.000000
12/12/2012	4:19:43 PM	H2 MFC set to  0.000000
12/12/2012	4:19:43 PM	BCl3 MFC set to  0.000000
12/12/2012	4:19:43 PM	PH3 MFC set to  0.000000
12/12/2012	4:19:43 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:19:43 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:19:43 PM	Tube furnace set to 0
12/12/2012	4:20:13 PM	Helium valve closed
12/12/2012	4:20:13 PM	H2 valve closed
12/12/2012	4:20:13 PM	BCl3 valve closed
12/12/2012	4:20:13 PM	PH3 valve closed
12/12/2012	4:20:13 PM	SiCl4 pre valve closed
12/12/2012	4:20:13 PM	SiCl4 post valve closed
12/12/2012	4:20:13 PM	Bypass valve closed
12/12/2012	4:20:13 PM	Bubbler valve closed
12/12/2012	4:20:13 PM	Main Vac valve opened
12/12/2012	4:20:13 PM	Helium MFC set to  0.000000
12/12/2012	4:20:13 PM	H2 MFC set to  0.000000
12/12/2012	4:20:13 PM	BCl3 MFC set to  0.000000
12/12/2012	4:20:13 PM	PH3 MFC set to  0.000000
12/12/2012	4:20:13 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:20:13 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:20:13 PM	Tube furnace set to 200
12/12/2012	4:20:43 PM	H2 valve closed
12/12/2012	4:20:43 PM	BCl3 valve closed
12/12/2012	4:20:43 PM	PH3 valve closed
12/12/2012	4:20:43 PM	SiCl4 pre valve closed
12/12/2012	4:20:43 PM	SiCl4 post valve closed
12/12/2012	4:20:43 PM	Bypass valve closed
12/12/2012	4:20:43 PM	Bubbler valve closed
12/12/2012	4:20:43 PM	Helium valve opened
12/12/2012	4:20:43 PM	Main Vac valve opened
12/12/2012	4:20:43 PM	Helium MFC set to  20.000000
12/12/2012	4:20:43 PM	H2 MFC set to  0.000000
12/12/2012	4:20:43 PM	BCl3 MFC set to  0.000000
12/12/2012	4:20:43 PM	PH3 MFC set to  0.000000
12/12/2012	4:20:43 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:20:43 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:20:43 PM	Tube furnace set to 200
12/12/2012	4:21:13 PM	Helium valve closed
12/12/2012	4:21:13 PM	H2 valve closed
12/12/2012	4:21:13 PM	BCl3 valve closed
12/12/2012	4:21:13 PM	PH3 valve closed
12/12/2012	4:21:13 PM	SiCl4 pre valve closed
12/12/2012	4:21:13 PM	SiCl4 post valve closed
12/12/2012	4:21:13 PM	Bypass valve closed
12/12/2012	4:21:13 PM	Bubbler valve closed
12/12/2012	4:21:13 PM	Main Vac valve opened
12/12/2012	4:21:13 PM	Helium MFC set to  0.000000
12/12/2012	4:21:14 PM	H2 MFC set to  0.000000
12/12/2012	4:21:14 PM	BCl3 MFC set to  0.000000
12/12/2012	4:21:14 PM	PH3 MFC set to  0.000000
12/12/2012	4:21:14 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:21:14 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:21:14 PM	Tube furnace set to 200
12/12/2012	4:21:44 PM	H2 valve closed
12/12/2012	4:21:44 PM	BCl3 valve closed
12/12/2012	4:21:44 PM	PH3 valve closed
12/12/2012	4:21:44 PM	SiCl4 pre valve closed
12/12/2012	4:21:44 PM	SiCl4 post valve closed
12/12/2012	4:21:44 PM	Bypass valve closed
12/12/2012	4:21:44 PM	Bubbler valve closed
12/12/2012	4:21:44 PM	Helium valve opened
12/12/2012	4:21:44 PM	Main Vac valve opened
12/12/2012	4:21:44 PM	Helium MFC set to  20.000000
12/12/2012	4:21:44 PM	H2 MFC set to  0.000000
12/12/2012	4:21:44 PM	BCl3 MFC set to  0.000000
12/12/2012	4:21:44 PM	PH3 MFC set to  0.000000
12/12/2012	4:21:44 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:21:44 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:21:44 PM	Tube furnace set to 200
12/12/2012	4:22:14 PM	Helium valve closed
12/12/2012	4:22:14 PM	H2 valve closed
12/12/2012	4:22:14 PM	BCl3 valve closed
12/12/2012	4:22:14 PM	PH3 valve closed
12/12/2012	4:22:14 PM	SiCl4 pre valve closed
12/12/2012	4:22:14 PM	SiCl4 post valve closed
12/12/2012	4:22:14 PM	Bypass valve closed
12/12/2012	4:22:14 PM	Bubbler valve closed
12/12/2012	4:22:14 PM	Main Vac valve opened
12/12/2012	4:22:14 PM	Helium MFC set to  0.000000
12/12/2012	4:22:14 PM	H2 MFC set to  0.000000
12/12/2012	4:22:14 PM	BCl3 MFC set to  0.000000
12/12/2012	4:22:14 PM	PH3 MFC set to  0.000000
12/12/2012	4:22:14 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:22:14 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:22:14 PM	Tube furnace set to 200
12/12/2012	4:22:44 PM	H2 valve closed
12/12/2012	4:22:44 PM	BCl3 valve closed
12/12/2012	4:22:44 PM	PH3 valve closed
12/12/2012	4:22:44 PM	SiCl4 pre valve closed
12/12/2012	4:22:44 PM	SiCl4 post valve closed
12/12/2012	4:22:44 PM	Bypass valve closed
12/12/2012	4:22:44 PM	Bubbler valve closed
12/12/2012	4:22:44 PM	Helium valve opened
12/12/2012	4:22:44 PM	Main Vac valve opened
12/12/2012	4:22:44 PM	Helium MFC set to  20.000000
12/12/2012	4:22:44 PM	H2 MFC set to  0.000000
12/12/2012	4:22:44 PM	BCl3 MFC set to  0.000000
12/12/2012	4:22:44 PM	PH3 MFC set to  0.000000
12/12/2012	4:22:44 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:22:44 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:22:44 PM	Tube furnace set to 200
12/12/2012	4:23:14 PM	Helium valve closed
12/12/2012	4:23:14 PM	H2 valve closed
12/12/2012	4:23:14 PM	BCl3 valve closed
12/12/2012	4:23:14 PM	PH3 valve closed
12/12/2012	4:23:14 PM	SiCl4 pre valve closed
12/12/2012	4:23:14 PM	SiCl4 post valve closed
12/12/2012	4:23:14 PM	Bypass valve closed
12/12/2012	4:23:14 PM	Bubbler valve closed
12/12/2012	4:23:14 PM	Main Vac valve opened
12/12/2012	4:23:14 PM	Helium MFC set to  0.000000
12/12/2012	4:23:15 PM	H2 MFC set to  0.000000
12/12/2012	4:23:15 PM	BCl3 MFC set to  0.000000
12/12/2012	4:23:15 PM	PH3 MFC set to  0.000000
12/12/2012	4:23:15 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:23:15 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:23:15 PM	Tube furnace set to 200
12/12/2012	4:23:45 PM	H2 valve closed
12/12/2012	4:23:45 PM	BCl3 valve closed
12/12/2012	4:23:45 PM	PH3 valve closed
12/12/2012	4:23:45 PM	SiCl4 pre valve closed
12/12/2012	4:23:45 PM	SiCl4 post valve closed
12/12/2012	4:23:45 PM	Bypass valve closed
12/12/2012	4:23:45 PM	Bubbler valve closed
12/12/2012	4:23:45 PM	Helium valve opened
12/12/2012	4:23:45 PM	Main Vac valve opened
12/12/2012	4:23:45 PM	Helium MFC set to  20.000000
12/12/2012	4:23:45 PM	H2 MFC set to  0.000000
12/12/2012	4:23:45 PM	BCl3 MFC set to  0.000000
12/12/2012	4:23:45 PM	PH3 MFC set to  0.000000
12/12/2012	4:23:45 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:23:45 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:23:45 PM	Tube furnace set to 200
12/12/2012	4:24:15 PM	Helium valve closed
12/12/2012	4:24:15 PM	H2 valve closed
12/12/2012	4:24:15 PM	BCl3 valve closed
12/12/2012	4:24:15 PM	PH3 valve closed
12/12/2012	4:24:15 PM	SiCl4 pre valve closed
12/12/2012	4:24:15 PM	SiCl4 post valve closed
12/12/2012	4:24:15 PM	Bypass valve closed
12/12/2012	4:24:15 PM	Bubbler valve closed
12/12/2012	4:24:15 PM	Main Vac valve opened
12/12/2012	4:24:15 PM	Helium MFC set to  0.000000
12/12/2012	4:24:15 PM	H2 MFC set to  0.000000
12/12/2012	4:24:15 PM	BCl3 MFC set to  0.000000
12/12/2012	4:24:15 PM	PH3 MFC set to  0.000000
12/12/2012	4:24:15 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:24:15 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:24:15 PM	Tube furnace set to 200
12/12/2012	4:24:45 PM	H2 valve closed
12/12/2012	4:24:45 PM	BCl3 valve closed
12/12/2012	4:24:45 PM	PH3 valve closed
12/12/2012	4:24:45 PM	SiCl4 pre valve closed
12/12/2012	4:24:45 PM	SiCl4 post valve closed
12/12/2012	4:24:45 PM	Bypass valve closed
12/12/2012	4:24:45 PM	Bubbler valve closed
12/12/2012	4:24:45 PM	Helium valve opened
12/12/2012	4:24:45 PM	Main Vac valve opened
12/12/2012	4:24:45 PM	Helium MFC set to  20.000000
12/12/2012	4:24:45 PM	H2 MFC set to  0.000000
12/12/2012	4:24:45 PM	BCl3 MFC set to  0.000000
12/12/2012	4:24:45 PM	PH3 MFC set to  0.000000
12/12/2012	4:24:45 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:24:45 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:24:45 PM	Tube furnace set to 200
12/12/2012	4:25:15 PM	Helium valve closed
12/12/2012	4:25:15 PM	H2 valve closed
12/12/2012	4:25:15 PM	BCl3 valve closed
12/12/2012	4:25:15 PM	PH3 valve closed
12/12/2012	4:25:15 PM	SiCl4 pre valve closed
12/12/2012	4:25:15 PM	SiCl4 post valve closed
12/12/2012	4:25:15 PM	Bypass valve closed
12/12/2012	4:25:15 PM	Bubbler valve closed
12/12/2012	4:25:15 PM	Main Vac valve opened
12/12/2012	4:25:15 PM	Helium MFC set to  0.000000
12/12/2012	4:25:15 PM	H2 MFC set to  0.000000
12/12/2012	4:25:15 PM	BCl3 MFC set to  0.000000
12/12/2012	4:25:15 PM	PH3 MFC set to  0.000000
12/12/2012	4:25:15 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:25:15 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:25:16 PM	Tube furnace set to 200
12/12/2012	4:25:46 PM	H2 valve closed
12/12/2012	4:25:46 PM	BCl3 valve closed
12/12/2012	4:25:46 PM	PH3 valve closed
12/12/2012	4:25:46 PM	SiCl4 pre valve closed
12/12/2012	4:25:46 PM	SiCl4 post valve closed
12/12/2012	4:25:46 PM	Bypass valve closed
12/12/2012	4:25:46 PM	Bubbler valve closed
12/12/2012	4:25:46 PM	Helium valve opened
12/12/2012	4:25:46 PM	Main Vac valve opened
12/12/2012	4:25:46 PM	Helium MFC set to  20.000000
12/12/2012	4:25:46 PM	H2 MFC set to  0.000000
12/12/2012	4:25:46 PM	BCl3 MFC set to  0.000000
12/12/2012	4:25:46 PM	PH3 MFC set to  0.000000
12/12/2012	4:25:46 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:25:46 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:25:46 PM	Tube furnace set to 200
12/12/2012	4:26:16 PM	Helium valve closed
12/12/2012	4:26:16 PM	H2 valve closed
12/12/2012	4:26:16 PM	BCl3 valve closed
12/12/2012	4:26:16 PM	PH3 valve closed
12/12/2012	4:26:16 PM	SiCl4 pre valve closed
12/12/2012	4:26:16 PM	SiCl4 post valve closed
12/12/2012	4:26:16 PM	Bypass valve closed
12/12/2012	4:26:16 PM	Bubbler valve closed
12/12/2012	4:26:16 PM	Main Vac valve opened
12/12/2012	4:26:16 PM	Helium MFC set to  0.000000
12/12/2012	4:26:16 PM	H2 MFC set to  0.000000
12/12/2012	4:26:16 PM	BCl3 MFC set to  0.000000
12/12/2012	4:26:16 PM	PH3 MFC set to  0.000000
12/12/2012	4:26:16 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:26:16 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:26:16 PM	Tube furnace set to 0
12/12/2012	4:26:17 PM	Run finished at 4:26 PM
12/12/2012	4:30:01 PM	Main Vac valve closed
12/12/2012	4:30:11 PM	Main Vac valve opened
12/12/2012	4:31:52 PM	Recipe started at 4:31 PM
12/12/2012	4:31:52 PM	Helium valve closed
12/12/2012	4:31:52 PM	H2 valve closed
12/12/2012	4:31:52 PM	BCl3 valve closed
12/12/2012	4:31:52 PM	PH3 valve closed
12/12/2012	4:31:52 PM	SiCl4 pre valve closed
12/12/2012	4:31:52 PM	SiCl4 post valve closed
12/12/2012	4:31:52 PM	Main Vac valve closed
12/12/2012	4:31:52 PM	Bypass valve closed
12/12/2012	4:31:52 PM	Bubbler valve closed
12/12/2012	4:31:52 PM	Helium MFC set to  0.000000
12/12/2012	4:31:52 PM	H2 MFC set to  0.000000
12/12/2012	4:31:52 PM	BCl3 MFC set to  0.000000
12/12/2012	4:31:52 PM	PH3 MFC set to  0.000000
12/12/2012	4:31:52 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:31:52 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:31:52 PM	Tube furnace set to 0
12/12/2012	4:31:55 PM	Helium valve closed
12/12/2012	4:31:55 PM	BCl3 valve closed
12/12/2012	4:31:55 PM	PH3 valve closed
12/12/2012	4:31:55 PM	SiCl4 pre valve closed
12/12/2012	4:31:55 PM	SiCl4 post valve closed
12/12/2012	4:31:55 PM	Main Vac valve closed
12/12/2012	4:31:55 PM	Bypass valve closed
12/12/2012	4:31:55 PM	Bubbler valve closed
12/12/2012	4:31:55 PM	H2 valve opened
12/12/2012	4:31:55 PM	Helium MFC set to  0.000000
12/12/2012	4:31:55 PM	H2 MFC set to  500.000000
12/12/2012	4:31:55 PM	BCl3 MFC set to  0.000000
12/12/2012	4:31:55 PM	PH3 MFC set to  0.000000
12/12/2012	4:31:55 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:31:55 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:31:55 PM	Tube furnace set to 0
12/12/2012	4:33:08 PM	Helium valve closed
12/12/2012	4:33:08 PM	BCl3 valve closed
12/12/2012	4:33:08 PM	PH3 valve closed
12/12/2012	4:33:08 PM	SiCl4 pre valve closed
12/12/2012	4:33:08 PM	SiCl4 post valve closed
12/12/2012	4:33:08 PM	Main Vac valve closed
12/12/2012	4:33:08 PM	Bypass valve closed
12/12/2012	4:33:08 PM	H2 valve opened
12/12/2012	4:33:08 PM	Bubbler valve opened
12/12/2012	4:33:08 PM	Helium MFC set to  0.000000
12/12/2012	4:33:08 PM	H2 MFC set to  500.000000
12/12/2012	4:33:08 PM	BCl3 MFC set to  0.000000
12/12/2012	4:33:08 PM	PH3 MFC set to  0.000000
12/12/2012	4:33:08 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:33:08 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:33:08 PM	Tube furnace set to 0
12/12/2012	4:33:09 PM	Helium valve closed
12/12/2012	4:33:09 PM	BCl3 valve closed
12/12/2012	4:33:09 PM	PH3 valve closed
12/12/2012	4:33:09 PM	SiCl4 pre valve closed
12/12/2012	4:33:09 PM	SiCl4 post valve closed
12/12/2012	4:33:09 PM	Main Vac valve closed
12/12/2012	4:33:09 PM	Bypass valve closed
12/12/2012	4:33:09 PM	H2 valve opened
12/12/2012	4:33:09 PM	Bubbler valve opened
12/12/2012	4:33:09 PM	Helium MFC set to  0.000000
12/12/2012	4:33:09 PM	H2 MFC set to  500.000000
12/12/2012	4:33:09 PM	BCl3 MFC set to  0.000000
12/12/2012	4:33:09 PM	PH3 MFC set to  0.000000
12/12/2012	4:33:09 PM	SiCl4 MFC set to  0.000000
12/12/2012	4:33:09 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:33:09 PM	Tube furnace set to 1000
12/12/2012	4:53:09 PM	Helium valve closed
12/12/2012	4:53:09 PM	PH3 valve closed
12/12/2012	4:53:09 PM	Main Vac valve closed
12/12/2012	4:53:09 PM	Bypass valve closed
12/12/2012	4:53:09 PM	H2 valve opened
12/12/2012	4:53:09 PM	BCl3 valve opened
12/12/2012	4:53:09 PM	SiCl4 pre valve opened
12/12/2012	4:53:09 PM	SiCl4 post valve opened
12/12/2012	4:53:09 PM	Bubbler valve opened
12/12/2012	4:53:09 PM	Helium MFC set to  0.000000
12/12/2012	4:53:09 PM	H2 MFC set to  450.000000
12/12/2012	4:53:09 PM	BCl3 MFC set to  20.000000
12/12/2012	4:53:09 PM	PH3 MFC set to  0.000000
12/12/2012	4:53:09 PM	SiCl4 MFC set to  50.000000
12/12/2012	4:53:09 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:53:09 PM	Tube furnace set to 1000
12/12/2012	4:58:09 PM	Helium valve closed
12/12/2012	4:58:09 PM	PH3 valve closed
12/12/2012	4:58:09 PM	Main Vac valve closed
12/12/2012	4:58:09 PM	Bypass valve closed
12/12/2012	4:58:09 PM	H2 valve opened
12/12/2012	4:58:10 PM	BCl3 valve opened
12/12/2012	4:58:10 PM	SiCl4 pre valve opened
12/12/2012	4:58:10 PM	SiCl4 post valve opened
12/12/2012	4:58:10 PM	Bubbler valve opened
12/12/2012	4:58:10 PM	Helium MFC set to  0.000000
12/12/2012	4:58:10 PM	H2 MFC set to  450.000000
12/12/2012	4:58:10 PM	BCl3 MFC set to  0.750000
12/12/2012	4:58:10 PM	PH3 MFC set to  0.000000
12/12/2012	4:58:10 PM	SiCl4 MFC set to  50.000000
12/12/2012	4:58:10 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	4:58:10 PM	Tube furnace set to 1000
12/12/2012	5:43:10 PM	Helium valve closed
12/12/2012	5:43:10 PM	BCl3 valve closed
12/12/2012	5:43:10 PM	Main Vac valve closed
12/12/2012	5:43:10 PM	Bypass valve closed
12/12/2012	5:43:10 PM	H2 valve opened
12/12/2012	5:43:10 PM	PH3 valve opened
12/12/2012	5:43:10 PM	SiCl4 pre valve opened
12/12/2012	5:43:10 PM	SiCl4 post valve opened
12/12/2012	5:43:10 PM	Bubbler valve opened
12/12/2012	5:43:10 PM	Helium MFC set to  0.000000
12/12/2012	5:43:10 PM	H2 MFC set to  450.000000
12/12/2012	5:43:10 PM	BCl3 MFC set to  0.000000
12/12/2012	5:43:10 PM	PH3 MFC set to  3.000000
12/12/2012	5:43:10 PM	SiCl4 MFC set to  50.000000
12/12/2012	5:43:10 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	5:43:10 PM	Tube furnace set to 1000
12/12/2012	5:43:30 PM	Helium valve closed
12/12/2012	5:43:30 PM	BCl3 valve closed
12/12/2012	5:43:30 PM	Main Vac valve closed
12/12/2012	5:43:30 PM	Bypass valve closed
12/12/2012	5:43:30 PM	H2 valve opened
12/12/2012	5:43:30 PM	PH3 valve opened
12/12/2012	5:43:30 PM	SiCl4 pre valve opened
12/12/2012	5:43:30 PM	SiCl4 post valve opened
12/12/2012	5:43:30 PM	Bubbler valve opened
12/12/2012	5:43:30 PM	Helium MFC set to  0.000000
12/12/2012	5:43:30 PM	H2 MFC set to  450.000000
12/12/2012	5:43:30 PM	BCl3 MFC set to  0.000000
12/12/2012	5:43:30 PM	PH3 MFC set to  20.000000
12/12/2012	5:43:30 PM	SiCl4 MFC set to  50.000000
12/12/2012	5:43:30 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	5:43:30 PM	Tube furnace set to 1000
12/12/2012	5:43:50 PM	Helium valve closed
12/12/2012	5:43:50 PM	BCl3 valve closed
12/12/2012	5:43:50 PM	PH3 valve closed
12/12/2012	5:43:50 PM	SiCl4 pre valve closed
12/12/2012	5:43:50 PM	SiCl4 post valve closed
12/12/2012	5:43:50 PM	Main Vac valve closed
12/12/2012	5:43:50 PM	Bypass valve closed
12/12/2012	5:43:50 PM	H2 valve opened
12/12/2012	5:43:50 PM	Bubbler valve opened
12/12/2012	5:43:50 PM	Helium MFC set to  0.000000
12/12/2012	5:43:50 PM	H2 MFC set to  500.000000
12/12/2012	5:43:50 PM	BCl3 MFC set to  0.000000
12/12/2012	5:43:50 PM	PH3 MFC set to  0.000000
12/12/2012	5:43:50 PM	SiCl4 MFC set to  0.000000
12/12/2012	5:43:50 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	5:43:50 PM	Tube furnace set to 950
12/12/2012	5:45:50 PM	Helium valve closed
12/12/2012	5:45:50 PM	BCl3 valve closed
12/12/2012	5:45:50 PM	PH3 valve closed
12/12/2012	5:45:50 PM	SiCl4 pre valve closed
12/12/2012	5:45:50 PM	SiCl4 post valve closed
12/12/2012	5:45:50 PM	Main Vac valve closed
12/12/2012	5:45:50 PM	Bypass valve closed
12/12/2012	5:45:50 PM	H2 valve opened
12/12/2012	5:45:51 PM	Bubbler valve opened
12/12/2012	5:45:51 PM	Helium MFC set to  0.000000
12/12/2012	5:45:51 PM	H2 MFC set to  500.000000
12/12/2012	5:45:51 PM	BCl3 MFC set to  0.000000
12/12/2012	5:45:51 PM	PH3 MFC set to  0.000000
12/12/2012	5:45:51 PM	SiCl4 MFC set to  0.000000
12/12/2012	5:45:51 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	5:45:51 PM	Tube furnace set to 900
12/12/2012	5:47:51 PM	Helium valve closed
12/12/2012	5:47:51 PM	BCl3 valve closed
12/12/2012	5:47:51 PM	PH3 valve closed
12/12/2012	5:47:51 PM	SiCl4 pre valve closed
12/12/2012	5:47:51 PM	SiCl4 post valve closed
12/12/2012	5:47:51 PM	Main Vac valve closed
12/12/2012	5:47:51 PM	Bypass valve closed
12/12/2012	5:47:51 PM	H2 valve opened
12/12/2012	5:47:51 PM	Bubbler valve opened
12/12/2012	5:47:51 PM	Helium MFC set to  0.000000
12/12/2012	5:47:51 PM	H2 MFC set to  500.000000
12/12/2012	5:47:51 PM	BCl3 MFC set to  0.000000
12/12/2012	5:47:51 PM	PH3 MFC set to  0.000000
12/12/2012	5:47:51 PM	SiCl4 MFC set to  0.000000
12/12/2012	5:47:51 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	5:47:51 PM	Tube furnace set to 850
12/12/2012	5:49:51 PM	H2 valve closed
12/12/2012	5:49:51 PM	BCl3 valve closed
12/12/2012	5:49:51 PM	PH3 valve closed
12/12/2012	5:49:51 PM	SiCl4 pre valve closed
12/12/2012	5:49:51 PM	SiCl4 post valve closed
12/12/2012	5:49:51 PM	Main Vac valve closed
12/12/2012	5:49:51 PM	Bypass valve closed
12/12/2012	5:49:51 PM	Helium valve opened
12/12/2012	5:49:51 PM	Bubbler valve opened
12/12/2012	5:49:51 PM	Helium MFC set to  500.000000
12/12/2012	5:49:51 PM	H2 MFC set to  0.000000
12/12/2012	5:49:51 PM	BCl3 MFC set to  0.000000
12/12/2012	5:49:51 PM	PH3 MFC set to  0.000000
12/12/2012	5:49:51 PM	SiCl4 MFC set to  0.000000
12/12/2012	5:49:51 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	5:49:51 PM	Tube furnace set to 800
12/12/2012	5:51:51 PM	H2 valve closed
12/12/2012	5:51:51 PM	BCl3 valve closed
12/12/2012	5:51:51 PM	PH3 valve closed
12/12/2012	5:51:51 PM	SiCl4 pre valve closed
12/12/2012	5:51:51 PM	SiCl4 post valve closed
12/12/2012	5:51:51 PM	Main Vac valve closed
12/12/2012	5:51:51 PM	Bypass valve closed
12/12/2012	5:51:51 PM	Helium valve opened
12/12/2012	5:51:51 PM	Bubbler valve opened
12/12/2012	5:51:51 PM	Helium MFC set to  500.000000
12/12/2012	5:51:51 PM	H2 MFC set to  0.000000
12/12/2012	5:51:51 PM	BCl3 MFC set to  0.000000
12/12/2012	5:51:51 PM	PH3 MFC set to  0.000000
12/12/2012	5:51:51 PM	SiCl4 MFC set to  0.000000
12/12/2012	5:51:51 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	5:51:51 PM	Tube furnace set to 750
12/12/2012	5:53:51 PM	H2 valve closed
12/12/2012	5:53:51 PM	BCl3 valve closed
12/12/2012	5:53:51 PM	PH3 valve closed
12/12/2012	5:53:51 PM	SiCl4 pre valve closed
12/12/2012	5:53:51 PM	SiCl4 post valve closed
12/12/2012	5:53:51 PM	Main Vac valve closed
12/12/2012	5:53:51 PM	Bypass valve closed
12/12/2012	5:53:51 PM	Helium valve opened
12/12/2012	5:53:51 PM	Bubbler valve opened
12/12/2012	5:53:51 PM	Helium MFC set to  500.000000
12/12/2012	5:53:51 PM	H2 MFC set to  0.000000
12/12/2012	5:53:51 PM	BCl3 MFC set to  0.000000
12/12/2012	5:53:51 PM	PH3 MFC set to  0.000000
12/12/2012	5:53:51 PM	SiCl4 MFC set to  0.000000
12/12/2012	5:53:52 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	5:53:52 PM	Tube furnace set to 0
12/12/2012	6:13:52 PM	Helium valve closed
12/12/2012	6:13:52 PM	H2 valve closed
12/12/2012	6:13:52 PM	BCl3 valve closed
12/12/2012	6:13:52 PM	PH3 valve closed
12/12/2012	6:13:52 PM	SiCl4 pre valve closed
12/12/2012	6:13:52 PM	SiCl4 post valve closed
12/12/2012	6:13:52 PM	Main Vac valve closed
12/12/2012	6:13:52 PM	Bypass valve closed
12/12/2012	6:13:52 PM	Bubbler valve closed
12/12/2012	6:13:52 PM	Helium MFC set to  0.000000
12/12/2012	6:13:52 PM	H2 MFC set to  0.000000
12/12/2012	6:13:52 PM	BCl3 MFC set to  0.000000
12/12/2012	6:13:52 PM	PH3 MFC set to  0.000000
12/12/2012	6:13:52 PM	SiCl4 MFC set to  0.000000
12/12/2012	6:13:52 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	6:13:52 PM	Tube furnace set to 0
12/12/2012	6:13:53 PM	Helium valve closed
12/12/2012	6:13:53 PM	H2 valve closed
12/12/2012	6:13:53 PM	BCl3 valve closed
12/12/2012	6:13:53 PM	PH3 valve closed
12/12/2012	6:13:53 PM	SiCl4 pre valve closed
12/12/2012	6:13:53 PM	SiCl4 post valve closed
12/12/2012	6:13:53 PM	Main Vac valve closed
12/12/2012	6:13:53 PM	Bubbler valve closed
12/12/2012	6:13:53 PM	Bypass valve opened
12/12/2012	6:13:53 PM	Helium MFC set to  0.000000
12/12/2012	6:13:53 PM	H2 MFC set to  0.000000
12/12/2012	6:13:53 PM	BCl3 MFC set to  0.000000
12/12/2012	6:13:53 PM	PH3 MFC set to  0.000000
12/12/2012	6:13:53 PM	SiCl4 MFC set to  0.000000
12/12/2012	6:13:53 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	6:13:53 PM	Tube furnace set to 0
12/12/2012	6:14:56 PM	Helium valve closed
12/12/2012	6:14:56 PM	H2 valve closed
12/12/2012	6:14:56 PM	BCl3 valve closed
12/12/2012	6:14:56 PM	PH3 valve closed
12/12/2012	6:14:56 PM	SiCl4 pre valve closed
12/12/2012	6:14:56 PM	SiCl4 post valve closed
12/12/2012	6:14:56 PM	Main Vac valve closed
12/12/2012	6:14:56 PM	Bubbler valve closed
12/12/2012	6:14:56 PM	Bypass valve opened
12/12/2012	6:14:56 PM	Helium MFC set to  0.000000
12/12/2012	6:14:56 PM	H2 MFC set to  0.000000
12/12/2012	6:14:56 PM	BCl3 MFC set to  0.000000
12/12/2012	6:14:56 PM	PH3 MFC set to  0.000000
12/12/2012	6:14:56 PM	SiCl4 MFC set to  0.000000
12/12/2012	6:14:56 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	6:14:56 PM	Tube furnace set to 0
12/12/2012	6:15:56 PM	Helium valve closed
12/12/2012	6:15:56 PM	H2 valve closed
12/12/2012	6:15:56 PM	BCl3 valve closed
12/12/2012	6:15:56 PM	PH3 valve closed
12/12/2012	6:15:56 PM	SiCl4 pre valve closed
12/12/2012	6:15:56 PM	SiCl4 post valve closed
12/12/2012	6:15:56 PM	Bypass valve closed
12/12/2012	6:15:56 PM	Bubbler valve closed
12/12/2012	6:15:56 PM	Main Vac valve opened
12/12/2012	6:15:56 PM	Helium MFC set to  0.000000
12/12/2012	6:15:56 PM	H2 MFC set to  0.000000
12/12/2012	6:15:56 PM	BCl3 MFC set to  0.000000
12/12/2012	6:15:56 PM	PH3 MFC set to  0.000000
12/12/2012	6:15:56 PM	SiCl4 MFC set to  0.000000
12/12/2012	6:15:56 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	6:15:56 PM	Tube furnace set to 0
12/12/2012	6:15:57 PM	Run finished at 6:15 PM
12/12/2012	6:17:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/12/2012	6:17:01 PM	Recipe started at 6:17 PM
12/12/2012	6:17:01 PM	Helium valve closed
12/12/2012	6:17:01 PM	H2 valve closed
12/12/2012	6:17:01 PM	BCl3 valve closed
12/12/2012	6:17:01 PM	PH3 valve closed
12/12/2012	6:17:01 PM	SiCl4 pre valve closed
12/12/2012	6:17:01 PM	SiCl4 post valve closed
12/12/2012	6:17:01 PM	Main Vac valve closed
12/12/2012	6:17:01 PM	Bypass valve closed
12/12/2012	6:17:01 PM	Bubbler valve closed
12/12/2012	6:17:01 PM	Helium MFC set to  0.000000
12/12/2012	6:17:01 PM	H2 MFC set to  0.000000
12/12/2012	6:17:01 PM	BCl3 MFC set to  0.000000
12/12/2012	6:17:01 PM	PH3 MFC set to  0.000000
12/12/2012	6:17:01 PM	SiCl4 MFC set to  0.000000
12/12/2012	6:17:01 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	6:17:02 PM	Tube furnace set to 0
12/12/2012	6:17:05 PM	H2 valve closed
12/12/2012	6:17:05 PM	BCl3 valve closed
12/12/2012	6:17:05 PM	PH3 valve closed
12/12/2012	6:17:05 PM	SiCl4 pre valve closed
12/12/2012	6:17:05 PM	SiCl4 post valve closed
12/12/2012	6:17:05 PM	Main Vac valve closed
12/12/2012	6:17:05 PM	Bypass valve closed
12/12/2012	6:17:05 PM	Bubbler valve closed
12/12/2012	6:17:05 PM	Helium valve opened
12/12/2012	6:17:05 PM	Helium MFC set to  500.000000
12/12/2012	6:17:05 PM	H2 MFC set to  0.000000
12/12/2012	6:17:05 PM	BCl3 MFC set to  0.000000
12/12/2012	6:17:05 PM	PH3 MFC set to  0.000000
12/12/2012	6:17:05 PM	SiCl4 MFC set to  0.000000
12/12/2012	6:17:05 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	6:17:05 PM	Tube furnace set to 0
12/12/2012	6:18:13 PM	Helium valve closed
12/12/2012	6:18:13 PM	H2 valve closed
12/12/2012	6:18:13 PM	BCl3 valve closed
12/12/2012	6:18:13 PM	PH3 valve closed
12/12/2012	6:18:13 PM	SiCl4 pre valve closed
12/12/2012	6:18:13 PM	SiCl4 post valve closed
12/12/2012	6:18:13 PM	Main Vac valve closed
12/12/2012	6:18:13 PM	Bypass valve closed
12/12/2012	6:18:13 PM	Bubbler valve closed
12/12/2012	6:18:13 PM	Helium MFC set to  0.000000
12/12/2012	6:18:13 PM	H2 MFC set to  0.000000
12/12/2012	6:18:13 PM	BCl3 MFC set to  0.000000
12/12/2012	6:18:13 PM	PH3 MFC set to  0.000000
12/12/2012	6:18:13 PM	SiCl4 MFC set to  0.000000
12/12/2012	6:18:13 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	6:18:13 PM	Tube furnace set to 0
12/12/2012	6:18:14 PM	Run finished at 6:18 PM
12/12/2012	6:18:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/12/2012	6:19:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/12/2012	6:19:33 PM	Recipe started at 6:19 PM
12/12/2012	6:19:33 PM	Helium valve closed
12/12/2012	6:19:33 PM	H2 valve closed
12/12/2012	6:19:33 PM	BCl3 valve closed
12/12/2012	6:19:33 PM	PH3 valve closed
12/12/2012	6:19:33 PM	SiCl4 pre valve closed
12/12/2012	6:19:33 PM	SiCl4 post valve closed
12/12/2012	6:19:33 PM	Main Vac valve closed
12/12/2012	6:19:33 PM	Bubbler valve closed
12/12/2012	6:19:33 PM	Bypass valve opened
12/12/2012	6:19:33 PM	Helium MFC set to  0.000000
12/12/2012	6:19:33 PM	H2 MFC set to  0.000000
12/12/2012	6:19:33 PM	BCl3 MFC set to  0.000000
12/12/2012	6:19:33 PM	PH3 MFC set to  0.000000
12/12/2012	6:19:33 PM	SiCl4 MFC set to  0.000000
12/12/2012	6:19:33 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	6:19:33 PM	Tube furnace set to 0
12/12/2012	6:20:53 PM	Helium valve closed
12/12/2012	6:20:53 PM	H2 valve closed
12/12/2012	6:20:53 PM	BCl3 valve closed
12/12/2012	6:20:53 PM	PH3 valve closed
12/12/2012	6:20:53 PM	SiCl4 pre valve closed
12/12/2012	6:20:53 PM	SiCl4 post valve closed
12/12/2012	6:20:53 PM	Main Vac valve closed
12/12/2012	6:20:53 PM	Bubbler valve closed
12/12/2012	6:20:53 PM	Bypass valve opened
12/12/2012	6:20:53 PM	Helium MFC set to  0.000000
12/12/2012	6:20:53 PM	H2 MFC set to  0.000000
12/12/2012	6:20:53 PM	BCl3 MFC set to  0.000000
12/12/2012	6:20:53 PM	PH3 MFC set to  0.000000
12/12/2012	6:20:53 PM	SiCl4 MFC set to  0.000000
12/12/2012	6:20:53 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	6:20:54 PM	Tube furnace set to 0
12/12/2012	6:21:54 PM	Helium valve closed
12/12/2012	6:21:54 PM	H2 valve closed
12/12/2012	6:21:54 PM	BCl3 valve closed
12/12/2012	6:21:54 PM	PH3 valve closed
12/12/2012	6:21:54 PM	SiCl4 pre valve closed
12/12/2012	6:21:54 PM	SiCl4 post valve closed
12/12/2012	6:21:54 PM	Bypass valve closed
12/12/2012	6:21:54 PM	Bubbler valve closed
12/12/2012	6:21:54 PM	Main Vac valve opened
12/12/2012	6:21:54 PM	Helium MFC set to  0.000000
12/12/2012	6:21:54 PM	H2 MFC set to  0.000000
12/12/2012	6:21:54 PM	BCl3 MFC set to  0.000000
12/12/2012	6:21:54 PM	PH3 MFC set to  0.000000
12/12/2012	6:21:54 PM	SiCl4 MFC set to  0.000000
12/12/2012	6:21:54 PM	Bypass solenoid MFC set to  0.000000
12/12/2012	6:21:54 PM	Tube furnace set to 0
12/12/2012	6:21:55 PM	Run finished at 6:21 PM
12/12/2012	6:21:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
